Inventor · disambiguated record
Juergen Reich
Also filed as: REICH JUERGEN
12 granted patents·1 pending application·89 citations·filing 2005–2024
89Inventor score
Top patents by PatentIndex Score
13 records- 0193US7528944B2Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process toolKLA TENCOR TECH CORP·Filed 2007·Granted May 5, 2009·28 cites·16 claims
- 0291US8755044B2Large particle detection for multi-spot surface scanning inspection systemsREICH JUERGEN·Filed 2012·Granted Jun 17, 2014·22 cites·20 claims
- 0388US8269960B2Computer-implemented methods for inspecting and/or classifying a waferREICH JUERGEN·Filed 2008·Granted Sep 18, 2012·19 cites·38 claims
- 0483US9664909B1Monolithic optical beam splitter with focusing lensKLA TENCOR CORP·Filed 2013·Granted May 30, 2017·8 cites·11 claims
- 0580US8885158B2Surface scanning inspection system with adjustable scan pitchWOLTERS CHRISTIAN·Filed 2012·Granted Nov 11, 2014·3 cites·20 claims
- 0678US9116132B2Surface scanning inspection system with independently adjustable scan pitchKLA TENCOR CORP·Filed 2014·Granted Aug 25, 2015·2 cites·19 claims
- 0775US9255891B2Inspection beam shaping for improved detection sensitivityKLA TENCOR CORP·Filed 2013·Granted Feb 9, 2016·2 cites·18 claims
- 0870US7511816B2Methods and systems for determining drift in a position of a light beam with respect to a chuckKLA TENCOR TECH CORP·Filed 2005·Granted Mar 31, 2009·4 cites·29 claims
- 0967US9182358B2Multi-spot defect inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 10, 2015·1 cites·31 claims
- 1066US2025116598A1Enhanced modes for scanning acoustic microscope inspection in semiconductor inspectionKLA CORP·Filed 2024·Application pending·0 cites
- 1162US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 1256US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 1343US8934091B2Monitoring incident beam position in a wafer inspection systemKLA TENCOR CORP·Filed 2013·Granted Jan 13, 2015·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →