Inventor · disambiguated record
Juergen Weichart
Also filed as: WEICHART JUERGEN
15 granted patents·1 pending application·97 citations·filing 1995–2020
91Inventor score
Top patents by PatentIndex Score
16 records- 0193US8574409B2Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering sourceKADLEC STANISLAV·Filed 2012·Granted Nov 5, 2013·18 cites·6 claims
- 0292US10202682B2Method of sputtering and sputter systemEVATEC AG·Filed 2017·Granted Feb 12, 2019·12 cites·24 claims
- 0389US11380530B2Reactive sputtering with HIPIMSEVATEC AG·Filed 2020·Granted Jul 5, 2022·2 cites·23 claims
- 0487US9644261B2Apparatus for sputtering and a method of fabricating a metallization structureOERLIKON ADVANCED TECH AG·Filed 2014·Granted May 9, 2017·12 cites·7 claims
- 0582US6814838B2Vacuum treatment chamber and method for treating surfacesUNAXIS BALZERS AG·Filed 2001·Granted Nov 9, 2004·20 cites·28 claims
- 0671US9624572B2Method of HIPIMS sputtering and HIPIMS sputter systemEVATEC AG·Filed 2014·Granted Apr 18, 2017·2 cites·21 claims
- 0770US10784092B2Reactive sputtering with HIPIMsWEICHART JUERGEN·Filed 2008·Granted Sep 22, 2020·2 cites·18 claims
- 0865US8246794B2Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering sourceKADLEC STANISLAV·Filed 2008·Granted Aug 21, 2012·1 cites·12 claims
- 0962US9719177B2In-situ conditioning for vacuum processing of polymer substratesWEICHART JUERGEN·Filed 2011·Granted Aug 1, 2017·1 cites·14 claims
- 1058US5670065AApparatus for plasma treatment of fine grained materialsBUCK CHEM TECH WERKE·Filed 1995·Granted Sep 23, 1997·17 cites·18 claims
- 1150US8691058B2Apparatus for sputtering and a method of fabricating a metallization structureWEICHART JUERGEN·Filed 2009·Granted Apr 8, 2014·0 cites·25 claims
- 1245US6432492B2HF-Plasma coating chamber or PECVD coating chamber, its use and method of plating CDs using the chamberUNAXIS BALZERS AG·Filed 1996·Granted Aug 13, 2002·7 cites·22 claims
- 1340US11143416B2Radiation heater arrangementEVATEC ADVANCED TECH AG·Filed 2014·Granted Oct 12, 2021·0 cites·18 claims
- 1438US8852412B2Magnetron source and method of manufacturingWEICHART JUERGEN·Filed 2011·Granted Oct 7, 2014·0 cites·18 claims
- 1531US6312574B1Target, magnetron source with said target and process for producing said targetUNAXIS BALZERS AG·Filed 1998·Granted Nov 6, 2001·3 cites·11 claims
- 1624US2017117174A1Electro-static chuck with radiofrequency shuntEVATEC AG·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →