Inventor · disambiguated record
Kazuya Daito
Also filed as: DAITO KAZUYA
31 granted patents·8 pending applications·27 citations·filing 2013–2024
94Inventor score
Files withAPPLIED MATERIALS INC39
Top patents by PatentIndex Score
39 records- 0193US9169556B2Tungsten growth modulation by controlling surface compositionAPPLIED MATERIALS INC·Filed 2013·Granted Oct 27, 2015·9 cites·20 claims
- 0287US11404313B2Selective tungsten deposition at low temperaturesAPPLIED MATERIALS INC·Filed 2020·Granted Aug 2, 2022·2 cites·18 claims
- 0385US10793951B2Apparatus to improve substrate temperature uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Oct 6, 2020·3 cites·8 claims
- 0484US12230479B2Processing chamber with multiple plasma unitsAPPLIED MATERIALS INC·Filed 2024·Granted Feb 18, 2025·0 cites·5 claims
- 0581US9957615B2Apparatus to improve substrate temperature uniformityAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·4 cites·5 claims
- 0679US9653352B2Methods for forming metal organic tungsten for middle of the line (MOL) applicationsAPPLIED MATERIALS INC·Filed 2014·Granted May 16, 2017·4 cites·20 claims
- 0777US11955319B2Processing chamber with multiple plasma unitsAPPLIED MATERIALS INC·Filed 2022·Granted Apr 9, 2024·0 cites·5 claims
- 0876US9947578B2Methods for forming low-resistance contacts through integrated process flow systemsAPPLIED MATERIALS INC·Filed 2016·Granted Apr 17, 2018·2 cites·19 claims
- 0974US11062900B2Method of reducing effective oxide thickness in a semiconductor structureAPPLIED MATERIALS INC·Filed 2019·Granted Jul 13, 2021·1 cites·19 claims
- 1073US11978196B2See-through metrology systems, apparatus, and methods for optical devicesAPPLIED MATERIALS INC·Filed 2021·Granted May 7, 2024·0 cites·20 claims
- 1173US11748875B2See-through metrology systems, apparatus, and methods for optical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Sep 5, 2023·0 cites·17 claims
- 1273US10508339B2Blocker plate for use in a substrate process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Dec 17, 2019·1 cites·11 claims
- 1372US11967525B2Selective tungsten deposition at low temperaturesAPPLIED MATERIALS INC·Filed 2022·Granted Apr 23, 2024·0 cites·15 claims
- 1471US10620031B2System for measuring level of a precursor in a containerAPPLIED MATERIALS INC·Filed 2017·Granted Apr 14, 2020·1 cites·19 claims
- 1569US11807008B2Multifunctional printhead service station with multi-axis motionsAPPLIED MATERIALS INC·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
- 1668US12379280B2Method of measuring efficiency for optical devicesAPPLIED MATERIALS INC·Filed 2022·Granted Aug 5, 2025·0 cites·7 claims
- 1767US11988574B2Illumination system for AR metrology toolAPPLIED MATERIALS INC·Filed 2021·Granted May 21, 2024·0 cites·9 claims
- 1867US2024385075A1Illumination system for ar metrology toolAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1966US12236575B2In-line metrology systems, apparatus, and methods for optical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Feb 25, 2025·0 cites·20 claims
- 2066US12229940B2In-line metrology systems, apparatus, and methods for optical devicesAPPLIED MATERIALS INC·Filed 2021·Granted Feb 18, 2025·0 cites·20 claims
- 2166US2022319837A1Dual plasma pre-clean for selective gap fillAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2264US2021159052A1Processing Chamber With Multiple Plasma UnitsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2362US11721542B2Dual plasma pre-clean for selective gap fillAPPLIED MATERIALS INC·Filed 2020·Granted Aug 8, 2023·0 cites·9 claims
- 2461US11421322B2Blocker plate for use in a substrate process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 23, 2022·0 cites·16 claims
- 2559US11884076B2Fluid management system for inkjet machinesAPPLIED MATERIALS INC·Filed 2022·Granted Jan 30, 2024·0 cites·18 claims
- 2659US11802791B2Optical device metrology systems and related methodsAPPLIED MATERIALS INC·Filed 2021·Granted Oct 31, 2023·0 cites·18 claims
- 2759US11515200B2Selective tungsten deposition within trench structuresAPPLIED MATERIALS INC·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 2856US11878532B2Inkjet platform for fabrication of optical films and structuresAPPLIED MATERIALS INC·Filed 2022·Granted Jan 23, 2024·0 cites·20 claims
- 2954US12152302B2Multiple-channel showerhead design and methods in manufacturingAPPLIED MATERIALS INC·Filed 2020·Granted Nov 26, 2024·0 cites·12 claims
- 3051US11355391B2Method for forming a metal gapfillAPPLIED MATERIALS INC·Filed 2020·Granted Jun 7, 2022·0 cites·19 claims
- 3151US9162930B2PVD ALN film with oxygen doping for a low etch rate hardmask filmAPPLIED MATERIALS INC·Filed 2013·Granted Oct 20, 2015·0 cites·12 claims
- 3250US11955381B2Low-temperature plasma pre-clean for selective gap fillAPPLIED MATERIALS INC·Filed 2020·Granted Apr 9, 2024·0 cites·20 claims
- 3350US11598003B2Substrate processing chamber having heated showerhead assemblyAPPLIED MATERIALS INC·Filed 2017·Granted Mar 7, 2023·0 cites·7 claims
- 3450US10535527B2Methods for depositing semiconductor filmsAPPLIED MATERIALS INC·Filed 2018·Granted Jan 14, 2020·0 cites·17 claims
- 3550US2024011147A1Electrostatic chuck cover piece to enable processing of dielectric substratesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3648US2024209500A1Processing system and methods for forming void-free and seam-free tungsten featuresAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3745US2021335586A1Methods and apparatus for cleaning a showerheadAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3843US2021327717A1Methods and Apparatus for Integrated Cobalt Disilicide FormationAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3938US2018145034A1Methods To Selectively Deposit Corrosion-Free Metal ContactsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →