Inventor · disambiguated record
Kazuto Hirokawa
Also filed as: HIROKAWA KAZUTO · KUMEKAWA MASAYUKI
40 granted patents·16 pending applications·863 citations·filing 1990–2020
98Inventor score
Top patents by PatentIndex Score
56 records- 0193US7214122B2Substrate polishing apparatusEBARA CORP·Filed 2005·Granted May 8, 2007·19 cites·14 claims
- 0293US5142173ABearing structureEBARA CORP·Filed 1990·Granted Aug 25, 1992·73 cites·10 claims
- 0392US11472001B2Elastic membrane and substrate holding apparatusEBARA CORP·Filed 2020·Granted Oct 18, 2022·2 cites·9 claims
- 0492US7150673B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2005·Granted Dec 19, 2006·15 cites·27 claims
- 0590US7234999B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2006·Granted Jun 26, 2007·12 cites·16 claims
- 0689US8002607B2Polishing apparatus and polishing methodEBARA CORP·Filed 2005·Granted Aug 23, 2011·11 cites·11 claims
- 0788US7967660B2Polishing apparatus and polishing methodEBARA CORP·Filed 2010·Granted Jun 28, 2011·7 cites·3 claims
- 0888US6595831B1Method for polishing workpieces using fixed abrasivesEBARA CORP·Filed 2000·Granted Jul 22, 2003·43 cites·24 claims
- 0986US6899592B1Polishing apparatus and dressing method for polishing toolEBARA CORP·Filed 2003·Granted May 31, 2005·72 cites·14 claims
- 1085US6942548B2Polishing method using an abrading plateEBARA CORP·Filed 2001·Granted Sep 13, 2005·27 cites·20 claims
- 1184US6220945B1Polishing apparatusEBARA CORP·Filed 1999·Granted Apr 24, 2001·51 cites·24 claims
- 1284US4998033AGas dynamic bearing for spindle motorEBARA CORP·Filed 1990·Granted Mar 5, 1991·63 cites·28 claims
- 1382US5089732ASpindle motorEBARA CORP·Filed 1990·Granted Feb 18, 1992·43 cites·13 claims
- 1481US6672945B1Polishing apparatus and dressing methodEBARA CORP·Filed 2000·Granted Jan 6, 2004·25 cites·18 claims
- 1580US6458012B1Polishing apparatusEBARA CORP·Filed 2000·Granted Oct 1, 2002·18 cites·21 claims
- 1680US5357162ASpindle motor using dynamic pressure bearingsEBARA CORP·Filed 1993·Granted Oct 18, 1994·38 cites·8 claims
- 1779US7976358B2Polishing apparatus and polishing methodEBARA CORP·Filed 2009·Granted Jul 12, 2011·4 cites·16 claims
- 1878US6402588B1Polishing apparatusEBARA CORP·Filed 1999·Granted Jun 11, 2002·42 cites·42 claims
- 1978US6390901B1Polishing apparatusEBARA CORP·Filed 1999·Granted May 21, 2002·51 cites·7 claims
- 2075US7361076B2Method for estimating polishing profile or polishing amount, polishing method and polishing apparatusEBARA CORP·Filed 2007·Granted Apr 22, 2008·4 cites·14 claims
- 2174US6579148B2Polishing apparatusEBARA CORP·Filed 2002·Granted Jun 17, 2003·13 cites·8 claims
- 2274US6190243B1Polishing apparatusEBARA CORP·Filed 1999·Granted Feb 20, 2001·36 cites·17 claims
- 2373US7507144B2Substrate polishing apparatusEBARA CORP·Filed 2007·Granted Mar 24, 2009·3 cites·16 claims
- 2472US6217411B1Polishing apparatusEBARA CORP·Filed 1999·Granted Apr 17, 2001·33 cites·11 claims
- 2570US6413149B1Abrading plate and polishing method using the sameEBARA CORP·Filed 1999·Granted Jul 2, 2002·31 cites·22 claims
- 2668US6712678B1Polishing-product discharging device and polishing deviceEBARA CORP·Filed 1999·Granted Mar 30, 2004·27 cites·14 claims
- 2768US6336850B1Slurry dispenser and polishing apparatusEBARA CORP·Filed 1998·Granted Jan 8, 2002·28 cites·48 claims
- 2866US6520845B2Polishing apparatusEBARA CORP·Filed 2001·Granted Feb 18, 2003·9 cites·4 claims
- 2964US6398626B1Polishing apparatusEBARA CORP·Filed 2000·Granted Jun 4, 2002·8 cites·25 claims
- 3063US7547242B2Substrate polishing apparatusEBARA CORP·Filed 2004·Granted Jun 16, 2009·7 cites·18 claims
- 3162US6196904B1Polishing apparatusEBARA CORP·Filed 1999·Granted Mar 6, 2001·19 cites·10 claims
- 3261US6626739B1Polishing method and polishing apparatusEBARA CORP·Filed 2000·Granted Sep 30, 2003·7 cites·23 claims
- 3357US7578920B2Electrolytic processing methodEBARA CORP·Filed 2004·Granted Aug 25, 2009·1 cites·7 claims
- 3454US8133380B2Method for regenerating ion exchangerSAITO TAKAYUKI·Filed 2008·Granted Mar 13, 2012·0 cites·8 claims
- 3553US7427345B2Method and device for regenerating ion exchanger, and electrolytic processing apparatusEBARA CORP·Filed 2002·Granted Sep 23, 2008·3 cites·36 claims
- 3652US7101257B2Substrate polishing apparatusSHIMADZU CORP·Filed 2003·Granted Sep 5, 2006·3 cites·4 claims
- 3752US6866565B2Polishing tool and polishing apparatusEBARA CORP·Filed 2003·Granted Mar 15, 2005·2 cites·18 claims
- 3849US6261162B1Polishing apparatus and method of manufacturing grinding plateEBARA CORP·Filed 1999·Granted Jul 17, 2001·11 cites·26 claims
- 3948US6413155B2Polishing apparatusEBARA CORP·Filed 2001·Granted Jul 2, 2002·2 cites·9 claims
- 4047US7476303B2Electrolytic processing apparatus and electrolytic processing methodEBARA CORP·Filed 2004·Granted Jan 13, 2009·0 cites·14 claims
- 4143US2007004324A1Polishing apparatusHIROSE MASAYOSHI·Filed 2003·Application pending·0 cites
- 4243US2004087248A1Polishing method and apparatusFiled 2003·Application pending·0 cites
- 4342US2007205112A1Polishing apparatus and polishing methodKODERA MASAKO·Filed 2007·Application pending·0 cites
- 4442US2004242121A1Substrate polishing apparatusFiled 2003·Application pending·0 cites
- 4541US2008217164A1Electrolytic Processing ApparatusTOMA YASUSHI·Filed 2005·Application pending·0 cites
- 4640US2007187257A1Electrolytic processing apparatus and electrolytic processing methodEBARA CORP·Filed 2005·Application pending·0 cites
- 4740US2002137440A1Polishing apparatusFiled 2002·Application pending·0 cites
- 4840US2007020918A1Substrate processing method and substrate processing apparatusEBARA CORP·Filed 2004·Application pending·0 cites
- 4940US2004033771A1Polishing toolFiled 2003·Application pending·0 cites
- 5039US2001029161A1Polishing apparatus and method of manufacturing grinding plateFiled 2001·Application pending·0 cites
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →