Inventor · disambiguated record
Kevin M. Daniels
Also filed as: DANIELS KEVIN · DANIELS KEVIN M
25 granted patents·11 pending applications·79 citations·filing 2004–2024
94Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT10APPLIED MATERIALS INC8VARIAN SEMICONDUCTOR EQUIPMENT ASS INC4DANIELS KEVIN M3BATEMAN NICHOLAS2
Top patents by PatentIndex Score
36 records- 0191US7816239B2Technique for manufacturing a solar cellVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Oct 19, 2010·16 cites·15 claims
- 0289US9064795B2Technique for processing a substrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jun 23, 2015·8 cites·3 claims
- 0386US9093372B2Technique for processing a substrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jul 28, 2015·6 cites·13 claims
- 0484US8937004B2Apparatus and method for controllably implanting workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 20, 2015·5 cites·13 claims
- 0584US8216923B2Integrated shadow mask/carrier for patterned ion implantationBATEMAN NICHOLAS·Filed 2010·Granted Jul 10, 2012·6 cites·20 claims
- 0684US7675048B2Wafer holding robot end effecter vertical position determination in ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Mar 9, 2010·16 cites·20 claims
- 0783US9297063B2Plasma potential modulated ion implantation systemRADOVANOV SVETLANA B·Filed 2012·Granted Mar 29, 2016·4 cites·20 claims
- 0881US10224181B2Radio frequency extraction system for charge neutralized ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Mar 5, 2019·3 cites·13 claims
- 0975US12400824B2Ion extraction optics having novel blocker configurationAPPLIED MATERIALS INC·Filed 2022·Granted Aug 26, 2025·0 cites·20 claims
- 1075US8481960B2Deceleration lensRADOVANOV SVETLANA·Filed 2011·Granted Jul 9, 2013·4 cites·20 claims
- 1174US9000446B2Techniques for processing a substrateRIORDON BENJAMIN B·Filed 2010·Granted Apr 7, 2015·1 cites·11 claims
- 1274US8461030B2Apparatus and method for controllably implanting workpiecesRENAU ANTHONY·Filed 2010·Granted Jun 11, 2013·3 cites·19 claims
- 1372US9006688B2Techniques for processing a substrate using a maskDANIELS KEVIN M·Filed 2010·Granted Apr 14, 2015·3 cites·23 claims
- 1471US9287085B2Processing apparatus and method of treating a substrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·2 cites·17 claims
- 1561US11948781B2Apparatus and system including high angle extraction opticsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 2, 2024·0 cites·20 claims
- 1661US11495430B2Tunable extraction assembly for wide angle ion beamAPPLIED MATERIALS INC·Filed 2020·Granted Nov 8, 2022·0 cites·13 claims
- 1761US11361935B2Apparatus and system including high angle extraction opticsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
- 1861US8756021B2Method and system for in-situ monitoring of cathode erosion and predicting cathode lifetimeLOW RUSSELL J·Filed 2010·Granted Jun 17, 2014·1 cites·6 claims
- 1961US2025232942A1Ion extraction optics for ion processing systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2059US8900982B2Techniques for processing a substrateDANIELS KEVIN M·Filed 2010·Granted Dec 2, 2014·1 cites·15 claims
- 2158US12106943B2Substrate halo arrangement for improved process uniformityAPPLIED MATERIALS INC·Filed 2021·Granted Oct 1, 2024·0 cites·9 claims
- 2256US9863032B2Techniques for processing a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jan 9, 2018·0 cites·7 claims
- 2352US2024369547A1Systems and methods for pathogen detectionUNIV MARYLAND·Filed 2022·Application pending·0 cites
- 2450US2024128052A1Inductively coupled plasma apparatus with novel faraday shieldAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2548US8461558B2System and method for ion implantation with dual purpose maskKOO BON-WOONG·Filed 2011·Granted Jun 11, 2013·0 cites·21 claims
- 2648US2015179455A1Technique For Processing A SubstrateVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2015·Application pending·0 cites
- 2747US2012244692A1Integrated shadow mask/carrier for pattern ion implantationBATEMAN NICHOLAS·Filed 2012·Application pending·0 cites
- 2846US2023197422A1Fastening assembly for beam blocker in ion processing apparatusAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2944US2014127394A1Reducing Glitching In An Ion ImplanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Application pending·0 cites
- 3043US10062548B2Gas injection system for ion beam deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 28, 2018·0 cites·10 claims
- 3140US2019272983A1Substrate halo arrangement for improved process uniformityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Application pending·0 cites
- 3239US7236853B2Automated robot alignment system and method using kinematic pins and end effector sensorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Jun 26, 2007·0 cites·17 claims
- 3337US2011027463A1Workpiece handling systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
- 3434US2012017938A1Platen cleaningWEAVER WILLIAM T·Filed 2011·Application pending·0 cites
- 3533US9076914B2Techniques for processing a substrateDANIELS KEVIN M·Filed 2010·Granted Jul 7, 2015·0 cites·30 claims
- 3630US2006124155A1Technique for reducing backside particlesSUURONEN DAVID E·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →