Inventor · disambiguated record
Kenneth P. Gross
Also filed as: GROSS KENNETH P
31 granted patents·4 pending applications·1,258 citations·filing 1986–2018
97Inventor score
Files withKLA TENCOR CORP15KLA TENCOR TECH CORP6TENCOR INSTRUMENTS4GROSS KENNETH P2SCHWIERKING ROGER A2
Top patents by PatentIndex Score
35 records- 0197US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0297US5416594ASurface scanner with thin film gaugeTENCOR INSTRUMENTS·Filed 1993·Granted May 16, 1995·210 cites·24 claims
- 0397US5189481AParticle detector for rough surfacesTENCOR INSTRUMENTS·Filed 1991·Granted Feb 23, 1993·276 cites·14 claims
- 0496US6271916B1Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 1996·Granted Aug 7, 2001·278 cites·34 claims
- 0595US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 0695US7463369B2Systems and methods for measuring one or more characteristics of patterned features on a specimenKLA TENCOR TECH CORP·Filed 2006·Granted Dec 9, 2008·28 cites·20 claims
- 0795US7277172B2Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signalsKLA TENCOR TECH CORP·Filed 2006·Granted Oct 2, 2007·34 cites·27 claims
- 0893US9390902B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·13 cites·19 claims
- 0993US6721052B2Systems for measuring periodic structuresKLA TECHNOLOGIES CORP·Filed 2000·Granted Apr 13, 2004·56 cites·101 claims
- 1090US10690589B2Laser sustained plasma light source with forced flow through natural convectionKLA TENCOR CORP·Filed 2018·Granted Jun 23, 2020·8 cites·50 claims
- 1189US6606153B2Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 2001·Granted Aug 12, 2003·31 cites·26 claims
- 1288US7379183B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted May 27, 2008·18 cites·44 claims
- 1387US9615439B2System and method for inhibiting radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Apr 4, 2017·5 cites·31 claims
- 1486US9558858B2System and method for imaging a sample with a laser sustained plasma illumination outputKLA TENCOR CORP·Filed 2014·Granted Jan 31, 2017·9 cites·31 claims
- 1585US4746215AParticle counter air inlet assemblyPACIFIC SCIENTIFIC CO·Filed 1986·Granted May 24, 1988·53 cites·17 claims
- 1683US7477371B2Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 2006·Granted Jan 13, 2009·6 cites·48 claims
- 1782US5565979ASurface scanning apparatus and method using crossed-cylinder optical elementsTENCOR INSTRUMENTS·Filed 1994·Granted Oct 15, 1996·56 cites·12 claims
- 1879US7102744B2Process and assembly for non-destructive surface inspectionsKLA TENCOR CORP·Filed 2003·Granted Sep 5, 2006·12 cites·34 claims
- 1978US6692129B2Display apparatus including RGB color combiner and 1D light valve relay including schlieren filterSILICON LIGHT MACHINES INC·Filed 2002·Granted Feb 17, 2004·17 cites·20 claims
- 2077US10283342B2Laser sustained plasma light source with graded absorption featuresKLA TENCOR CORP·Filed 2016·Granted May 7, 2019·2 cites·35 claims
- 2175US9899205B2System and method for inhibiting VUV radiative emission of a laser-sustained plasma sourceKLA TENCOR CORP·Filed 2016·Granted Feb 20, 2018·2 cites·82 claims
- 2274US8045250B1Optical scanning using rotating parallel plateKLA TENCOR CORP·Filed 2008·Granted Oct 25, 2011·6 cites·24 claims
- 2373US8643840B2Cell for light sourceGROSS KENNETH P·Filed 2011·Granted Feb 4, 2014·3 cites·10 claims
- 2472US8148669B2Apparatus and method for effectuating temperature control in roller grillsSCHWIERKING ROGER A·Filed 2007·Granted Apr 3, 2012·7 cites·9 claims
- 2570US10139283B2Non-contact thermal measurements of VUV opticsKLA TENCOR CORP·Filed 2016·Granted Nov 27, 2018·1 cites·20 claims
- 2669US7433037B2System for measuring periodic structuresKLA TENCOR TECH CORP·Filed 2006·Granted Oct 7, 2008·1 cites·17 claims
- 2768US8581154B2Method for effectuating temperature control in roller grillsSCHWIERKING ROGER A·Filed 2011·Granted Nov 12, 2013·3 cites·7 claims
- 2862US5083035APosition location in surface scanning using interval timing between scan marks on test wafersTENCOR INSTRUMENTS·Filed 1990·Granted Jan 21, 1992·25 cites·10 claims
- 2956US9887076B2Method and system for controlling convective flow in a light-sustained plasmaKLA TENCOR CORP·Filed 2016·Granted Feb 6, 2018·0 cites·18 claims
- 3056US2011086318A1Method and apparatus for maintaining stable flame conditions in a gas burnerAMERICAN WYOTT CORP·Filed 2009·Application pending·0 cites
- 3153US2004141177A1System for measuring periodic structuresFiled 2003·Application pending·0 cites
- 3241US2005099627A1System for measuring periodic structuresFiled 2004·Application pending·0 cites
- 3340US10386234B2Wideband spectrographKLA TENCOR CORP·Filed 2017·Granted Aug 20, 2019·0 cites·33 claims
- 3438US10616987B2System and method for imaging a sample with an illumination source modified by a spatial selective wavelength filterKLA TENCOR CORP·Filed 2015·Granted Apr 7, 2020·0 cites·37 claims
- 3537US2013253366A1Core body temperature measuring deviceGROSS KENNETH P·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →