Inventor · disambiguated record
Kevin Song
Also filed as: SONG KEVIN · SONG KEVIN H
12 granted patents·4 pending applications·229 citations·filing 2002–2024
87Inventor score
Top patents by PatentIndex Score
16 records- 0196US6620670B2Process conditions and precursors for atomic layer deposition (ALD) of AL2O3APPLIED MATERIALS INC·Filed 2002·Granted Sep 16, 2003·217 cites·21 claims
- 0282US11724355B2Substrate polish edge uniformity control with secondary fluid dispenseAPPLIED MATERIALS INC·Filed 2020·Granted Aug 15, 2023·1 cites·20 claims
- 0368US2023339066A1Substrate polish edge uniformity control with secondary fluid dispenseAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0467US2025001547A1Face-up wafer electrochemical planarization apparatusAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0564US12090600B2Face-up wafer electrochemical planarization apparatusAPPLIED MATERIALS INC·Filed 2022·Granted Sep 17, 2024·0 cites·14 claims
- 0663US7622389B1Selective contact formation using masking and resist patterning techniquesSPANSION LLC·Filed 2006·Granted Nov 24, 2009·2 cites·20 claims
- 0760US10722997B2Multilayer polishing pads made by the methods for centrifugal casting of polymer polish padsTHOMAS WEST INC·Filed 2014·Granted Jul 28, 2020·2 cites·24 claims
- 0859US12257664B2Controlling chemical mechanical polishing pad stiffness by adjusting wetting in the backing layerAPPLIED MATERIALS INC·Filed 2020·Granted Mar 25, 2025·0 cites·20 claims
- 0959US6936842B2Method and apparatus for process monitoringAPPLIED MATERIALS INC·Filed 2002·Granted Aug 30, 2005·4 cites·11 claims
- 1057US8089113B2Damascene metal-insulator-metal (MIM) devicePANGRLE SUZETTE K·Filed 2006·Granted Jan 3, 2012·1 cites·20 claims
- 1148US8232175B2Damascene metal-insulator-metal (MIM) device with improved scaleabilityPANGRLE SUZETTE K·Filed 2006·Granted Jul 31, 2012·0 cites·11 claims
- 1247US7199056B2Low cost and low dishing slurry for polysilicon CMPAPPLIED MATERIALS INC·Filed 2003·Granted Apr 3, 2007·2 cites·22 claims
- 1345US9343666B2Damascene metal-insulator-metal (MIM) device with improved scaleabilityPANGRLE SUZETTE K·Filed 2012·Granted May 17, 2016·0 cites·14 claims
- 1442US2007082833A1Low cost and low dishing slurry for polysilicon cmpKO SEN-HOU·Filed 2006·Application pending·0 cites
- 1541US11090778B2Methods and systems for centrifugal casting of polymer polish pads and polishing pads made by the methodsTHOMAS WEST INC·Filed 2013·Granted Aug 17, 2021·0 cites·21 claims
- 1641US2023024009A1Face-up wafer edge polishing apparatusAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →