Inventor · disambiguated record
Kirkwood Rough
Also filed as: ROUGH KIRKWOOD · ROUGH KIRKWOOD H. ROUGH
3 granted patents·1 pending application·644 citations·filing 1992–2020
78Inventor score
Top patents by PatentIndex Score
4 records- 0197US5346578AInduction plasma sourceNOVELLUS SYSTEMS INC·Filed 1992·Granted Sep 13, 1994·242 cites·25 claims
- 0295US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 0383US12002611B2High power low frequency coilsCOMET TECHNOLOGIES USA INC·Filed 2020·Granted Jun 4, 2024·2 cites·20 claims
- 0444US2009026912A1Intensity modulated electron beam and application to electron beam blankerKLA TENCOR TECH CORP·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →