Inventor · disambiguated record
Koukichi Hiroshiro
Also filed as: HIROSHIRO KOUKICHI
15 granted patents·4 pending applications·32 citations·filing 2006–2024
88Inventor score
Top patents by PatentIndex Score
19 records- 0185US8701308B2Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing methodHIROSHIRO KOUKICHI·Filed 2009·Granted Apr 22, 2014·14 cites·18 claims
- 0283US8468943B2Imprint method, computer storage medium and imprint apparatusHIROSHIRO KOUKICHI·Filed 2010·Granted Jun 25, 2013·6 cites·14 claims
- 0378US11306249B2Substrate processing method, substrate processing device and etching liquidTOKYO ELECTRON LTD·Filed 2019·Granted Apr 19, 2022·2 cites·12 claims
- 0477US11049723B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 29, 2021·1 cites·10 claims
- 0575US8152928B2Substrate cleaning method, substrate cleaning system and program storage mediumWATANABE TSUKASA·Filed 2007·Granted Apr 10, 2012·5 cites·8 claims
- 0671US8303724B2Substrate processing method and non-transitory storage medium for carrying out such methodHIROSHIRO KOUKICHI·Filed 2011·Granted Nov 6, 2012·2 cites·10 claims
- 0763US12203021B2Substrate processing device and etching liquidTOKYO ELECTRON LTD·Filed 2022·Granted Jan 21, 2025·0 cites·2 claims
- 0863US8015984B2Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solventTOKYO ELECTRON LTD·Filed 2006·Granted Sep 13, 2011·1 cites·9 claims
- 0962US9099502B2Chemical-liquid mixing method and chemical-liquid mixing apparatusTANAKA HIROSHI·Filed 2007·Granted Aug 4, 2015·1 cites·8 claims
- 1059US12506012B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Dec 23, 2025·0 cites·17 claims
- 1159US2024332040A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1255US11723259B2Substrate processing apparatus and method of processing substrateTOKYO ELECTRON LTD·Filed 2021·Granted Aug 8, 2023·0 cites·12 claims
- 1353US9415356B1Chemical-liquid mixing method and chemical-liquid mixing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Aug 16, 2016·0 cites·5 claims
- 1451US9339775B2Chemical-liquid mixing method and chemical-liquid mixing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 17, 2016·0 cites·5 claims
- 1550US7998306B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Aug 16, 2011·0 cites·14 claims
- 1647US2010206337A1Substrate processing method, substrate processing apparatus, program, storage medium, and substitute agentTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1746US2022316059A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1846US2008178910A1Substrate cleaning apparatus, substrate cleaning method, and storage mediumTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1941US8522712B2Template treatment method, program, computer storage medium, template treatment apparatus and imprint systemHIROSHIRO KOUKICHI·Filed 2010·Granted Sep 3, 2013·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →