Inventor · disambiguated record
Konstantin Tsigutkin
Also filed as: TSIGUTKIN KONSTANTIN
7 granted patents·11 citations·filing 2013–2023
74Inventor score
Top patents by PatentIndex Score
7 records- 0192US9544984B2System and method for generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Jan 10, 2017·10 cites·25 claims
- 0280US12326407B2Inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2023·Granted Jun 10, 2025·0 cites·20 claims
- 0368US11692948B2Inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2019·Granted Jul 4, 2023·0 cites·20 claims
- 0459US8767291B2Suppression of parasitic optical feedback in pulse laser systemsKLA TENCOR CORP·Filed 2013·Granted Jul 1, 2014·1 cites·20 claims
- 0553US11499924B2Determining one or more characteristics of light in an optical systemKLA CORP·Filed 2020·Granted Nov 15, 2022·0 cites·27 claims
- 0641US11635700B2Method and apparatus for EUV mask inspectionKLA CORP·Filed 2021·Granted Apr 25, 2023·0 cites·19 claims
- 0738US11293880B2Method and apparatus for beam stabilization and reference correction for EUV inspectionKLA CORP·Filed 2020·Granted Apr 5, 2022·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →