Inventor · disambiguated record
Koji Tsunekawa
Also filed as: TSUNEKAWA KOJI
28 granted patents·25 pending applications·171 citations·filing 2001–2022
96Inventor score
Top patents by PatentIndex Score
53 records- 0191US8837924B2Vacuum heating/cooling apparatus and manufacturing method of magnetoresistance elementTSUNEKAWA KOJI·Filed 2011·Granted Sep 16, 2014·14 cites·6 claims
- 0289US9991102B2Sputtering apparatus, film deposition method, and control deviceCANON ANELVA CORP·Filed 2015·Granted Jun 5, 2018·3 cites·6 claims
- 0388US9017535B2High-frequency sputtering deviceNAGAMINE YOSHINORI·Filed 2010·Granted Apr 28, 2015·7 cites·5 claims
- 0488US6641703B2Magnetic multi-layer film manufacturing apparatusANELVA CORP·Filed 2001·Granted Nov 4, 2003·38 cites·38 claims
- 0587US8139325B2Tunnel magnetoresistive thin filmTSUNEKAWA KOJI·Filed 2008·Granted Mar 20, 2012·17 cites·4 claims
- 0686US8377270B2Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control programCANON ANELVA CORP·Filed 2009·Granted Feb 19, 2013·7 cites·2 claims
- 0786US8118981B2Sputtering apparatus and method for controlling the sameTSUNEKAWA KOJI·Filed 2009·Granted Feb 21, 2012·7 cites·13 claims
- 0884US10636634B2Sputtering apparatus, film deposition method, and control deviceCANON ANELVA CORP·Filed 2018·Granted Apr 28, 2020·1 cites·3 claims
- 0984US8934290B2Magnetoresistance effect device and method of production of the sameCANON ANELVA CORP·Filed 2013·Granted Jan 13, 2015·3 cites·3 claims
- 1084US7813088B2Magnetoresistance effect deviceCANON ANELVA CORP·Filed 2006·Granted Oct 12, 2010·13 cites·4 claims
- 1183US8932438B2Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage mediumTSUNEKAWA KOJI·Filed 2010·Granted Jan 13, 2015·6 cites·6 claims
- 1281US9752226B2Manufacturing apparatusCANON ANELVA CORP·Filed 2016·Granted Sep 5, 2017·2 cites·2 claims
- 1380US9039873B2Manufacturing apparatusCANON ANELVA CORP·Filed 2013·Granted May 26, 2015·3 cites·14 claims
- 1474US6720036B2Method of production of spin valve type giant magnetoresistive thin filmANELVA CORP·Filed 2002·Granted Apr 13, 2004·14 cites·31 claims
- 1573US8174800B2Magnetoresistive element, method of manufacturing the same, and magnetic multilayered film manufacturing apparatusTSUNEKAWA KOJI·Filed 2008·Granted May 8, 2012·7 cites·5 claims
- 1672US8394649B2Method of production of a magnetoresistance effect deviceDJAYAPRAWIRA DAVID D·Filed 2008·Granted Mar 12, 2013·6 cites·4 claims
- 1770US10378100B2Sputtering apparatus and recording medium for recording control program thereofCANON ANELVA CORP·Filed 2014·Granted Aug 13, 2019·0 cites·15 claims
- 1870US8246798B2Substrate processing apparatus and apparatus and method of manufacturing magnetic deviceHOSOYA HIROYUKI·Filed 2009·Granted Aug 21, 2012·2 cites·4 claims
- 1969US7914654B2Method and apparatus for depositing a magnetoresistive multilayer filmANELVA CORP·Filed 2007·Granted Mar 29, 2011·4 cites·10 claims
- 2066US2011042209A1Sputtering apparatus and recording medium for recording control program thereofCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 2163US7652852B2Magnetoresistance effect device and a preform thereforCANON ANELVA CORP·Filed 2005·Granted Jan 26, 2010·3 cites·4 claims
- 2263US7603763B2Method for manufacturing a magnetoresistive multilayer filmCANON ANELVA CORP·Filed 2004·Granted Oct 20, 2009·7 cites·9 claims
- 2360US6610373B2Magnetic film-forming device and methodANELVA CORP·Filed 2001·Granted Aug 26, 2003·4 cites·21 claims
- 2459US10629804B2Method of manufacturing magnetoresistive deviceNAGAMINE YOSHINORI·Filed 2007·Granted Apr 21, 2020·0 cites·10 claims
- 2559US2011143460A1Method of manufacturing magnetoresistance element and storage medium used in the manufacturing methodCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 2658US2008241596A1Magnetoresistive Multilayer FilmCANON ANELVA CORP·Filed 2007·Application pending·0 cites
- 2757US2009032056A1Contaminant removing method, contaminant removing mechanism, and vacuum thin film formation processing apparatusCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 2856US2015001068A1Manufacturing apparatusCANON ANELVA CORP·Filed 2014·Application pending·0 cites
- 2955US7771570B2Method and apparatus for depositing a magnetoresistive multilayer filmCANON ANELVA CORP·Filed 2007·Granted Aug 10, 2010·1 cites·9 claims
- 3055US7727409B2Magnetoresistance effect device and method of production thereofCANON ANELVA CORP·Filed 2008·Granted Jun 1, 2010·1 cites·6 claims
- 3155US2022415912A1Stacked structure, memory device and method of manufacturing stacked structureCANON ANELVA CORP·Filed 2022·Application pending·0 cites
- 3254US2013105298A1Sputtering apparatus, film deposition method, and control deviceCANON ANELVA CORP·Filed 2012·Application pending·0 cites
- 3353US9449800B2Sputtering apparatus and sputtering methodCANON ANELVA CORP·Filed 2014·Granted Sep 20, 2016·0 cites·6 claims
- 3453US8367156B2Method of manufacturing magnetoresistive device and apparatus for manufacturing the sameCANON ANELVA CORP·Filed 2011·Granted Feb 5, 2013·0 cites·2 claims
- 3551US8143611B2Phase-change memory element, phase-change memory cell, vacuum processing apparatus, and phase-change memory element manufacturing methodCHOI YOUNG-SUK·Filed 2010·Granted Mar 27, 2012·1 cites·4 claims
- 3651US2009321246A1Method of fabricating and apparatus of fabricating tunnel magnetic resistive elementCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 3750US2010078310A1Fabricating method of magnetoresistive element, and storage mediumCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 3850US2010080894A1Fabricating method of magnetoresistive element, and storage mediumCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 3948US2010178528A1Tunnel magnetoresistive thin film and magnetic multilayer film formation apparatusCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 4046US2008202917A1Method for Manufacturing a Magnetoresistive Multilayer FilmCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 4145US2015107516A1Plasma treatment apparatus and substrate treatment systemCANON ANELVA CORP·Filed 2014·Application pending·0 cites
- 4245US2013134032A1Method of fabricating and apparatus of fabricating tunnel magnetic resistive elementCANON ANELVA CORP·Filed 2012·Application pending·0 cites
- 4345US2005068695A1Magnetoresistive multilayer filmFiled 2004·Application pending·0 cites
- 4444US2011094875A1Magnetoresistance effect device and method of production of the sameCANON ANELVA CORP·Filed 2011·Application pending·0 cites
- 4543US2008180862A1Method of production of a magnetoresistance effect deviceANELVA CORP·Filed 2008·Application pending·0 cites
- 4643US2014353149A1Tunnel magneto-resistance element manufacturing apparatusCANON ANELVA CORP·Filed 2014·Application pending·0 cites
- 4742US2008055793A1Magnetoresistance effect deviceANELVA CORP·Filed 2007·Application pending·0 cites
- 4840US2006056115A1Magnetoresistance effect device and method of production of the sameNAT INST OF ADVANCED IND SCIEN·Filed 2005·Application pending·0 cites
- 4938US2010316890A1Magnetic tunnel junction device with magnetic free layer having sandwich structureCANON ANELVA CORP·Filed 2010·Application pending·0 cites
- 5037US2010200394A1Vacuum thin film forming apparatusCANON ANELVA CORP·Filed 2010·Application pending·0 cites
Showing the top 50 of 53 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Koji Tsunekawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →