Inventor · disambiguated record
Lawrence P. Muray
Also filed as: MURAY LAWRENCE · MURAY LAWRENCE P · MURAY LAWRENCE PETER
26 granted patents·7 pending applications·442 citations·filing 1991–2025
96Inventor score
Top patents by PatentIndex Score
33 records- 0197US7045794B1Stacked lens structure and method of use thereof for preventing electrical breakdownNOVELX INC·Filed 2005·Granted May 16, 2006·76 cites·29 claims
- 0294US10545099B1Ultra-high sensitivity hybrid inspection with full wafer coverage capabilityKLA TENCOR CORP·Filed 2019·Granted Jan 28, 2020·10 cites·24 claims
- 0394US7109486B1Layered electron beam column and method of use thereofNOVELX INC·Filed 2005·Granted Sep 19, 2006·33 cites·23 claims
- 0493US7335895B1Stacked lens structure and method of use thereof for preventing electrical breakdownNOVELX INC·Filed 2006·Granted Feb 26, 2008·19 cites·29 claims
- 0591US7332729B1System and method for multiple electron, ion, and photon beam alignmentNOVELX INC·Filed 2005·Granted Feb 19, 2008·19 cites·28 claims
- 0686US11699607B2Segmented multi-channel, backside illuminated, solid state detector with a through-hole for detecting secondary and backscattered electronsKLA CORP·Filed 2021·Granted Jul 11, 2023·1 cites·20 claims
- 0786US8003952B2Integrated deflectors for beam alignment and blanking in charged particle columnsAGILENT TECHNOLOGIES INC·Filed 2007·Granted Aug 23, 2011·10 cites·16 claims
- 0883US6369385B1Integrated microcolumn and scanning probe microscope arraysAPPLIED MATERIALS INC·Filed 1999·Granted Apr 9, 2002·81 cites·28 claims
- 0983US5155412AMethod for selectively scaling a field emission electron gun and device formed therebyIBM·Filed 1991·Granted Oct 13, 1992·44 cites·14 claims
- 1082US11239048B2Arrayed column detectorKLA CORP·Filed 2020·Granted Feb 1, 2022·1 cites·31 claims
- 1179US8106358B2Layered scanning charged particle microscope with differential pumping apertureSPALLAS JAMES P·Filed 2010·Granted Jan 31, 2012·6 cites·25 claims
- 1279US6195214B1Microcolumn assembly using laser spot weldingETEC SYSTEMS INC·Filed 1999·Granted Feb 27, 2001·32 cites·24 claims
- 1378US6555829B1High precision flexure stageAPPLIED MATERIALS INC·Filed 2000·Granted Apr 29, 2003·22 cites·20 claims
- 1475US6288401B1Electrostatic alignment of a charged particle beamETEC SYSTEMS INC·Filed 1999·Granted Sep 11, 2001·26 cites·20 claims
- 1573US8110801B2Layered scanning charged particle microscope package for a charged particle and radiation detectorINDERMUEHLE SCOTT W·Filed 2010·Granted Feb 7, 2012·5 cites·20 claims
- 1673US6791742B2MEMS structure with raised electrodesGLIMMERGLASS NETWORKS INC·Filed 2003·Granted Sep 14, 2004·14 cites·7 claims
- 1771US6641273B1MEMS structure with mechanical overdeflection limiterGLIMMERGLASS NETWORKS INC·Filed 2002·Granted Nov 4, 2003·21 cites·11 claims
- 1870US10438769B1Array-based characterization toolKLA TENCOR CORP·Filed 2018·Granted Oct 8, 2019·2 cites·47 claims
- 1970US8115168B2Layered scanning charged particle apparatus package having an embedded heaterMURAY LAWRENCE P·Filed 2010·Granted Feb 14, 2012·3 cites·19 claims
- 2067US12322568B2Auto-focus sensor implementation for multi-column microscopesKLA CORP·Filed 2022·Granted Jun 3, 2025·0 cites·20 claims
- 2167US9099276B1High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscopeKEYSIGHT TECHNOLOGIES INC·Filed 2014·Granted Aug 4, 2015·2 cites·20 claims
- 2266US2025385066A1High-voltage column with permanent magnet lens and positive wafer bias for overlayKLA CORP·Filed 2025·Application pending·0 cites
- 2365US10026588B2Imaging apparatus having a plurality of movable beam columns, and method of inspecting a plurality of regions of a substrate intended to be substantially identicalKEYSIGHT TECHNOLOGIES INC·Filed 2015·Granted Jul 17, 2018·1 cites·7 claims
- 2464US2025316437A1Ultra-high sensitivity hybrid inspection with full wafer coverage capabilityKLA CORP·Filed 2024·Application pending·0 cites
- 2557US6805454B2MEMS structure with mechanical overdeflection limiterGLIMMERGLASS NETWORKS INC·Filed 2003·Granted Oct 19, 2004·8 cites·13 claims
- 2655US12211196B2Ensemble of deep learning models for defect review in high volume manufacturingKLA CORP·Filed 2023·Granted Jan 28, 2025·0 cites·20 claims
- 2755US2024014000A1Miniature electron optical column with a large field of viewKLA CORP·Filed 2022·Application pending·0 cites
- 2854US2023326704A1Miniature hybrid electron beam columnKLA CORP·Filed 2022·Application pending·0 cites
- 2952US6693735B1MEMS structure with surface potential controlGLIMMERGLASS NETWORKS INC·Filed 2001·Granted Feb 17, 2004·6 cites·12 claims
- 3041US11410830B1Defect inspection and review using transmissive current image of charged particle beam systemKLA TENCOR CORP·Filed 2019·Granted Aug 9, 2022·0 cites·17 claims
- 3141US2008054180A1Apparatus and method of detecting secondary electronsSILVER CHARLES·Filed 2007·Application pending·0 cites
- 3236US2002145113A1Optical signal transmission for electron beam imaging apparatusAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 3333US2003197176A1Silicon on insulator standoff and method for manufacture thereofGLIMMERGLASS NETWORKS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →