Inventor · disambiguated record
Lisheng Gao
Also filed as: GAO LISHENG
59 granted patents·2 pending applications·577 citations·filing 2003–2020
98Inventor score
Top patents by PatentIndex Score
61 records- 0197US9092846B2Detecting defects on a wafer using defect-specific and multi-channel informationKLA TENCOR CORP·Filed 2014·Granted Jul 28, 2015·30 cites·56 claims
- 0296US9053527B2Detecting defects on a waferKLA TENCOR CORP·Filed 2013·Granted Jun 9, 2015·66 cites·51 claims
- 0395US10181185B2Image based specimen process controlKLA TENCOR CORP·Filed 2017·Granted Jan 15, 2019·21 cites·35 claims
- 0495US9915625B2Optical die to database inspectionKLA TENCOR CORP·Filed 2016·Granted Mar 13, 2018·22 cites·35 claims
- 0595US9726617B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2013·Granted Aug 8, 2017·20 cites·23 claims
- 0695US8775101B2Detecting defects on a waferHUANG JUNQING·Filed 2011·Granted Jul 8, 2014·70 cites·18 claims
- 0793US8223327B2Systems and methods for detecting defects on a waferCHEN LU·Filed 2009·Granted Jul 17, 2012·24 cites·24 claims
- 0893US8111900B2Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticleWU KENONG·Filed 2010·Granted Feb 7, 2012·27 cites·17 claims
- 0991US9846930B2Detecting defects on a wafer using defect-specific and multi-channel informationKLA TENCOR CORP·Filed 2016·Granted Dec 19, 2017·5 cites·17 claims
- 1091US9601393B2Selecting one or more parameters for inspection of a waferLEE CHRIS·Filed 2010·Granted Mar 21, 2017·17 cites·69 claims
- 1190US10648924B2Generating high resolution images from low resolution images for semiconductor applicationsKLA TENCOR CORP·Filed 2017·Granted May 12, 2020·5 cites·27 claims
- 1290US9171364B2Wafer inspection using free-form care areasKLA TENCOR CORP·Filed 2014·Granted Oct 27, 2015·16 cites·33 claims
- 1389US10600175B2Dynamic care areas for defect detectionKLA TENCOR CORP·Filed 2017·Granted Mar 24, 2020·4 cites·17 claims
- 1489US9310320B2Based sampling and binning for yield critical defectsKLA TENCOR CORP·Filed 2014·Granted Apr 12, 2016·8 cites·33 claims
- 1589US9189844B2Detecting defects on a wafer using defect-specific informationKLA TENCOR CORP·Filed 2012·Granted Nov 17, 2015·15 cites·68 claims
- 1689US7729529B2Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticleKLA TENCOR TECH CORP·Filed 2004·Granted Jun 1, 2010·39 cites·19 claims
- 1788US11270430B2Wafer inspection using difference imagesKLA TENCOR CORP·Filed 2018·Granted Mar 8, 2022·5 cites·18 claims
- 1888US10127652B2Defect detection and classification based on attributes determined from a standard reference imageKLA TENCOR CORP·Filed 2015·Granted Nov 13, 2018·9 cites·53 claims
- 1987US10605744B2Systems and methods for detecting defects on a waferKLA TENCOR CORP·Filed 2018·Granted Mar 31, 2020·3 cites·3 claims
- 2087US10395358B2High sensitivity repeater defect detectionKLA TENCOR CORP·Filed 2017·Granted Aug 27, 2019·7 cites·35 claims
- 2187US9224660B2Tuning wafer inspection recipes using precise defect locationsKLA TENCOR CORP·Filed 2014·Granted Dec 29, 2015·7 cites·39 claims
- 2286US9880107B2Systems and methods for detecting defects on a waferKLA TENCOR CORP·Filed 2013·Granted Jan 30, 2018·5 cites·44 claims
- 2385US8467047B2Systems and methods for detecting defects on a waferCHEN LU·Filed 2012·Granted Jun 18, 2013·5 cites·17 claims
- 2484US11244442B2Method and system for correlating optical images with scanning electron microscopy imagesKLA TENCOR CORP·Filed 2019·Granted Feb 8, 2022·3 cites·24 claims
- 2584US10324046B1Methods and systems for monitoring a non-defect related characteristic of a patterned waferKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·5 cites·20 claims
- 2684US9830421B2Alignment of inspection to design using built in targetsKLA TENCOR CORP·Filed 2015·Granted Nov 28, 2017·7 cites·26 claims
- 2784US9552636B2Detecting defects on a wafer using defect-specific and multi-channel informationKLA TENCOR CORP·Filed 2015·Granted Jan 24, 2017·3 cites·67 claims
- 2882US7359544B2Automatic supervised classifier setup tool for semiconductor defectsKLA TENCOR TECH CORP·Filed 2003·Granted Apr 15, 2008·46 cites·44 claims
- 2981US7142992B1Flexible hybrid defect classification for semiconductor manufacturingKLA TENCOR TECH CORP·Filed 2004·Granted Nov 28, 2006·28 cites·19 claims
- 3080US10648925B2Repeater defect detectionKLA TENCOR CORP·Filed 2017·Granted May 12, 2020·3 cites·19 claims
- 3180US10393671B2Intra-die defect detectionKLA TENCOR CORP·Filed 2016·Granted Aug 27, 2019·2 cites·22 claims
- 3280US10132760B2Apparatus and methods for finding a best aperture and mode to enhance defect detectionKLA TENCOR CORP·Filed 2017·Granted Nov 20, 2018·1 cites·18 claims
- 3380US9727047B2Defect detection using structural informationKLA TENCOR CORP·Filed 2015·Granted Aug 8, 2017·3 cites·18 claims
- 3479US9619876B2Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modesKLA TENCOR CORP·Filed 2013·Granted Apr 11, 2017·3 cites·27 claims
- 3578US9715725B2Context-based inspection for dark field inspectionKLA TENCOR CORP·Filed 2014·Granted Jul 25, 2017·5 cites·33 claims
- 3677US10395359B2Adaptive local threshold and color filteringKLA TENCOR CORP·Filed 2017·Granted Aug 27, 2019·2 cites·23 claims
- 3776US10818005B2Previous layer nuisance reduction through oblique illuminationKLA—TENCOR CORP·Filed 2019·Granted Oct 27, 2020·2 cites·22 claims
- 3876US10012599B2Optical die to database inspectionKLA TENCOR CORP·Filed 2016·Granted Jul 3, 2018·2 cites·24 claims
- 3975US10410338B2Method and system for correlating optical images with scanning electron microscopy imagesKLA TENCOR CORP·Filed 2014·Granted Sep 10, 2019·2 cites·28 claims
- 4074US9996942B2Sub-pixel alignment of inspection to designKLA TENCOR CORP·Filed 2016·Granted Jun 12, 2018·3 cites·22 claims
- 4173US8532949B2Computer-implemented methods and systems for classifying defects on a specimenTEH CHO HUAK·Filed 2005·Granted Sep 10, 2013·9 cites·24 claims
- 4271US9347891B2Wafer and reticle inspection systems and methods for selecting illumination pupil configurationsKLA TENCOR CORP·Filed 2013·Granted May 24, 2016·1 cites·23 claims
- 4371US7498542B2Control method and system for a trackless autonomous crawling all-position arc welding robot with wheels and permanent magnet caterpillar beltsPAN JILUAN·Filed 2005·Granted Mar 3, 2009·6 cites·7 claims
- 4470US9704234B2Adaptive local threshold and color filteringKLA TENCOR CORP·Filed 2014·Granted Jul 11, 2017·2 cites·35 claims
- 4569US10599944B2Visual feedback for inspection algorithms and filtersKLA TENCOR CORP·Filed 2012·Granted Mar 24, 2020·2 cites·25 claims
- 4665US9563943B2Based sampling and binning for yield critical defectsKLA TENCOR CORP·Filed 2016·Granted Feb 7, 2017·1 cites·19 claims
- 4765US8049877B2Computer-implemented methods, carrier media, and systems for selecting polarization settings for an inspection systemKLA TENCOR CORP·Filed 2008·Granted Nov 1, 2011·1 cites·21 claims
- 4861US8989479B2Region based virtual fourier filterGAO LISHENG·Filed 2011·Granted Mar 24, 2015·3 cites·35 claims
- 4960US9442077B2Scratch filter for wafer inspectionKLA TENCOR CORP·Filed 2014·Granted Sep 13, 2016·1 cites·38 claims
- 5059US8059886B2Adaptive signature detectionGAO YONG·Filed 2010·Granted Nov 15, 2011·1 cites·17 claims
Showing the top 50 of 61 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →