Inventor · disambiguated record
Luca Grella
Also filed as: GRELLA LUCA
19 granted patents·1 pending application·128 citations·filing 2002–2023
93Inventor score
Top patents by PatentIndex Score
20 records- 0186US7361941B1Calibration standards and methodsKLA TENCOR TECH CORP·Filed 2004·Granted Apr 22, 2008·24 cites·29 claims
- 0284US6815675B1Method and system for e-beam scanningKLA TENCOR TECH CORP·Filed 2003·Granted Nov 9, 2004·19 cites·25 claims
- 0383US6797955B1Filtered e-beam inspection and reviewKLA TENCOR TECH CORP·Filed 2003·Granted Sep 28, 2004·19 cites·10 claims
- 0481US9934933B1Extractor electrode for electron sourceKLA TENCOR CORP·Filed 2017·Granted Apr 3, 2018·3 cites·20 claims
- 0579US7755061B2Dynamic pattern generator with cup-shaped structureKLA TENCOR TECH CORP·Filed 2007·Granted Jul 13, 2010·8 cites·16 claims
- 0679US6979824B1Filtered e-beam inspection and reviewKLA TENCOR TECH CORP·Filed 2004·Granted Dec 27, 2005·14 cites·25 claims
- 0778US8089051B2Electron reflector with multiple reflective modesGRELLA LUCA·Filed 2010·Granted Jan 3, 2012·5 cites·14 claims
- 0878US7009177B1Apparatus and method for tilted particle-beam illuminationKLA TENCOR TECH CORP·Filed 2005·Granted Mar 7, 2006·4 cites·26 claims
- 0975US6670612B1Undercut measurement using SEMKLA TENCOR TECH CORP·Filed 2002·Granted Dec 30, 2003·11 cites·20 claims
- 1072US7276690B1Method and system for e-beam scanningKLA TENCOR TECH CORP·Filed 2004·Granted Oct 2, 2007·8 cites·7 claims
- 1169US11087950B2Charge control device for a system with multiple electron beamsKLA TENCOR CORP·Filed 2018·Granted Aug 10, 2021·1 cites·20 claims
- 1262US11651934B2Systems and methods of creating multiple electron beamsKLA CORP·Filed 2021·Granted May 16, 2023·0 cites·20 claims
- 1361US7098456B1Method and apparatus for accurate e-beam metrologyKLA TENCOR TECH CORP·Filed 2004·Granted Aug 29, 2006·5 cites·21 claims
- 1461US7019292B1E-beam detection of defective contacts/vias with flooding and energy filterKLA TENCOR TECH CORP·Filed 2004·Granted Mar 28, 2006·7 cites·22 claims
- 1559US2025112017A1Imaging thousands of electron beams during workpiece inspectionKLA CORP·Filed 2023·Application pending·0 cites
- 1654US7958464B1Electron beam patterningKLA TENCOR CORP·Filed 2008·Granted Jun 7, 2011·0 cites·2 claims
- 1753US11508591B2High resolution electron beam apparatus with dual-aperture schemesKLA CORP·Filed 2021·Granted Nov 22, 2022·0 cites·21 claims
- 1852US11830699B2Cold-field-emitter electron gun with self-cleaning extractor using reversed e-beam currentKLA CORP·Filed 2021·Granted Nov 28, 2023·0 cites·19 claims
- 1946US11302510B2Space charge insensitive electron gun designsKLA TENCOR CORP·Filed 2018·Granted Apr 12, 2022·0 cites·16 claims
- 2036US10460903B2Method and system for charge control for imaging floating metal structures on non-conducting substratesKLA TENCOR CORP·Filed 2016·Granted Oct 29, 2019·0 cites·57 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →