Inventor · disambiguated record
Markus Deguenther
Also filed as: DEGUENTHER MARKUS
109 granted patents·18 pending applications·411 citations·filing 2004–2024
99Inventor score
Top patents by PatentIndex Score
127 records- 0198US9599904B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Mar 21, 2017·15 cites·20 claims
- 0297US8279524B2Polarization-modulating optical elementFIOLKA DAMIAN·Filed 2005·Granted Oct 2, 2012·33 cites·16 claims
- 0396US9013684B2Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatusXALTER STEFAN·Filed 2012·Granted Apr 21, 2015·17 cites·18 claims
- 0495US8289623B2Polarization-modulating optical elementFIOLKA DAMIAN·Filed 2010·Granted Oct 16, 2012·19 cites·26 claims
- 0595US7511886B2Optical beam transformation system and illumination system comprising an optical beam transformation systemZEISS CARL SMT AG·Filed 2005·Granted Mar 31, 2009·63 cites·54 claims
- 0694US8259393B2Polarization-modulating optical elementFIOLKA DAMIAN·Filed 2009·Granted Sep 4, 2012·34 cites·17 claims
- 0793US8320043B2Illumination apparatus for microlithographyprojection system including polarization-modulating optical elementFIOLKA DAMIAN·Filed 2008·Granted Nov 27, 2012·21 cites·20 claims
- 0891US9176390B2Method for adjusting an illumination system of a projection exposure apparatus for projection lithographyLAYH MICHAEL·Filed 2012·Granted Nov 3, 2015·8 cites·21 claims
- 0990US8270077B2Polarization-modulating optical elementFIOLKA DAMIAN·Filed 2006·Granted Sep 18, 2012·20 cites·18 claims
- 1089US8294877B2Illumination optical unit for projection lithographyWANGLER JOHANNES·Filed 2012·Granted Oct 23, 2012·7 cites·15 claims
- 1188US9671548B2Optical waveguide for guiding illumination lightZEISS CARL SMT GMBH·Filed 2015·Granted Jun 6, 2017·8 cites·20 claims
- 1288US9046786B2Illumination system of a microlithographic projection exposure apparatusPATRA MICHAEL·Filed 2012·Granted Jun 2, 2015·5 cites·19 claims
- 1388US8482717B2Polarization-modulating optical elementFIOLKA DAMIAN·Filed 2008·Granted Jul 9, 2013·11 cites·24 claims
- 1488US8467031B2Illumination system for illuminating a mask in a microlithographic exposure apparatusSCHUBERT ERICH·Filed 2010·Granted Jun 18, 2013·6 cites·28 claims
- 1588US7605386B2Optical device with raster elements, and illumination system with the optical deviceZEISS CARL SMT AG·Filed 2006·Granted Oct 20, 2009·21 cites·19 claims
- 1687US9310694B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Apr 12, 2016·3 cites·27 claims
- 1787US8724086B2Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisationLAYH MICHAEL·Filed 2010·Granted May 13, 2014·4 cites·24 claims
- 1887US8705005B2Microlithographic illumination systemDEGUENTHER MARKUS·Filed 2008·Granted Apr 22, 2014·9 cites·49 claims
- 1987US7551263B2Device for adjusting the illumination dose on a photosensitive layerZEISS CARL SMT AG·Filed 2006·Granted Jun 23, 2009·9 cites·3 claims
- 2086US10018917B2Illumination optical unit for EUV projection lithographyZEISS CARL SMT GMBH·Filed 2017·Granted Jul 10, 2018·3 cites·19 claims
- 2186US9091945B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2012·Granted Jul 28, 2015·3 cites·22 claims
- 2285US9983483B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted May 29, 2018·2 cites·19 claims
- 2385US9116439B2Illumination system and lithographic apparatusMULDER HEINE MELLE·Filed 2011·Granted Aug 25, 2015·4 cites·20 claims
- 2485US8339577B2Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatusXALTER STEFAN·Filed 2009·Granted Dec 25, 2012·9 cites·31 claims
- 2584US9494483B2Measuring system for measuring an imaging quality of an EUV lensZEISS CARL SMT GMBH·Filed 2014·Granted Nov 15, 2016·5 cites·24 claims
- 2684US9477157B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Oct 25, 2016·2 cites·19 claims
- 2784US9280060B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Mar 8, 2016·5 cites·28 claims
- 2883US9910360B2Lighting system of a microlithographic projection exposure system and method for operating such a lighting systemZEISS CARL SMT GMBH·Filed 2016·Granted Mar 6, 2018·2 cites·15 claims
- 2983US9500954B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Nov 22, 2016·3 cites·21 claims
- 3083US8854604B2Microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2011·Granted Oct 7, 2014·4 cites·22 claims
- 3182US10444631B2Method of operating a microlithographic projection apparatus and illumination system of such an apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Oct 15, 2019·2 cites·22 claims
- 3282US10191382B2Illumination system for illuminating a mask in a microlithographic exposure apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Jan 29, 2019·1 cites·18 claims
- 3382US8705000B2Illumination optics and projection exposure apparatusHOEGELE ARTUR·Filed 2010·Granted Apr 22, 2014·5 cites·28 claims
- 3482US8004656B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2006·Granted Aug 23, 2011·5 cites·18 claims
- 3580US9897925B2Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Feb 20, 2018·1 cites·18 claims
- 3680US9810992B2Illumination systemZEISS CARL SMT GMBH·Filed 2016·Granted Nov 7, 2017·2 cites·21 claims
- 3778US8891057B2Microlithographic projection exposure apparatusLAYH MICHAEL·Filed 2010·Granted Nov 18, 2014·2 cites·21 claims
- 3878US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
- 3978US2024152057A1Apparatus and method for characterizing a microlithographic maskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 4077US9454085B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Sep 27, 2016·1 cites·25 claims
- 4177US8711479B2Illumination apparatus for microlithography projection system including polarization-modulating optical elementZEISS CARL SMT GMBH·Filed 2013·Granted Apr 29, 2014·1 cites·9 claims
- 4276US8755031B2Illumination system of a microlithographic projection exposure apparatusDEGUENTHER MARKUS·Filed 2011·Granted Jun 17, 2014·2 cites·7 claims
- 4374US9823577B2Facet mirror for a projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Nov 21, 2017·2 cites·22 claims
- 4473US9239229B2Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Jan 19, 2016·1 cites·13 claims
- 4572US11378887B2Pupil facet mirror, illumination optics and optical system for a projection lithography systemZEISS CARL SMT GMBH·Filed 2021·Granted Jul 5, 2022·0 cites·20 claims
- 4672US10698318B2Method and device for characterizing a mask for microlithographyZEISS CARL SMT GMBH·Filed 2018·Granted Jun 30, 2020·1 cites·19 claims
- 4772US9645501B2Illumination optical unit for EUV projection lithography, and optical system comprising such an illumination optical unitZEISS CARL SMT GMBH·Filed 2014·Granted May 9, 2017·3 cites·20 claims
- 4871US10241416B2Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Mar 26, 2019·1 cites·19 claims
- 4971US9535210B2Optical hollow waveguide assemblyZEISS CARL SMT GMBH·Filed 2016·Granted Jan 3, 2017·2 cites·20 claims
- 5071US9310690B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Apr 12, 2016·1 cites·21 claims
Showing the top 50 of 127 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →