Inventor · disambiguated record
Masayuki Hatano
Also filed as: HATANO MASAYUKI
34 granted patents·21 pending applications·464 citations·filing 1994–2024
97Inventor score
Top patents by PatentIndex Score
55 records- 0199US6035893AShutoff-opening devices and fluid control apparatus comprising such devicesOHMI TADAHIRO·Filed 1997·Granted Mar 14, 2000·143 cites·6 claims
- 0297US6615871B2Fluid control apparatusTADAHIRO OHMI·Filed 2002·Granted Sep 9, 2003·61 cites·12 claims
- 0394US5983933AShutoff-opening deviceOHMI TADAHIRO·Filed 1997·Granted Nov 16, 1999·85 cites·4 claims
- 0487US8550801B2Imprint apparatus and methodFURUTONO YOHKO·Filed 2011·Granted Oct 8, 2013·11 cites·10 claims
- 0586US10168615B2Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2014·Granted Jan 1, 2019·5 cites·12 claims
- 0685US8691123B2Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereonNAKAGAWA YASUTADA·Filed 2011·Granted Apr 8, 2014·6 cites·16 claims
- 0782US9885118B2Template forming method, template, and template base materialTOSHIBA MEMORY CORP·Filed 2015·Granted Feb 6, 2018·2 cites·25 claims
- 0881US11004683B2Imprint apparatus, imprint method, and method of manufacturing semiconductor deviceTOSHIBA MEMORY CORP·Filed 2018·Granted May 11, 2021·2 cites·16 claims
- 0977US9377777B2Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereonTOSHIBA KK·Filed 2014·Granted Jun 28, 2016·3 cites·4 claims
- 1076US6773626B2Reversible information display medium of liquid crystal type and non-contact IC card utilizing the sameTOKYO MAGNETIC PRINTING·Filed 2001·Granted Aug 10, 2004·23 cites·15 claims
- 1175US8420422B2Pattern forming method, processing method, and processing apparatusASANO MASAFUMI·Filed 2011·Granted Apr 16, 2013·4 cites·3 claims
- 1274US10118317B2Template and pattern formation methodTOSHIBA MEMORY CORP·Filed 2015·Granted Nov 6, 2018·2 cites·16 claims
- 1374US8973494B2Imprint method and imprint apparatusHATANO MASAYUKI·Filed 2011·Granted Mar 10, 2015·2 cites·20 claims
- 1473US5737162ACircuit breaking deviceMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Apr 7, 1998·26 cites·10 claims
- 1572US11953825B2Imprint apparatus, imprint method, and manufacturing method of semiconductor deviceKIOXIA CORP·Filed 2023·Granted Apr 9, 2024·0 cites·11 claims
- 1672US5643686AMagnetic recording medium and method for manufacturing the sameTOKYO MAGNETIC PRINTING·Filed 1994·Granted Jul 1, 1997·27 cites·20 claims
- 1768US8772179B2Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor deviceFUKUHARA KAZUYA·Filed 2012·Granted Jul 8, 2014·2 cites·16 claims
- 1867US2024427233A1Imprint apparatus, imprint method, and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2024·Application pending·0 cites
- 1966US7906258B2Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor deviceTOSHIBA KK·Filed 2008·Granted Mar 15, 2011·2 cites·16 claims
- 2064US11837469B2Imprint apparatus, imprint method, and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2021·Granted Dec 5, 2023·0 cites·16 claims
- 2164US8906281B2Imprint method, imprinting equipment, and method for manufacturing semiconductor deviceHATANO MASAYUKI·Filed 2012·Granted Dec 9, 2014·1 cites·10 claims
- 2262US2024427234A1Imprint method and method for manufacturing semiconductor deviceKIOXIA CORP·Filed 2024·Application pending·0 cites
- 2360US11333969B2Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2018·Granted May 17, 2022·0 cites·8 claims
- 2460US8901012B2Semiconductor manufacturing apparatus and method for manufacturing semiconductor deviceHATANO MASAYUKI·Filed 2012·Granted Dec 2, 2014·1 cites·20 claims
- 2560US2025284192A1Pattern forming method and method of manufacturing semiconductor deviceKIOXIA CORP·Filed 2024·Application pending·0 cites
- 2659US12072622B2Imprint method, method of manufacturing semiconductor device, and imprint deviceKIOXIA CORP·Filed 2022·Granted Aug 27, 2024·0 cites·20 claims
- 2759US2018119288A1Template and method of manufacturing semiconductor deviceTOSHIBA MEMORY CORP·Filed 2017·Application pending·0 cites
- 2859US2015014877A1Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2014·Application pending·0 cites
- 2958US5837953ADC circuit breaking deviceMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Nov 17, 1998·16 cites·14 claims
- 3057US6014498ADevice for heating fluid control apparatusFUJIKIN KK·Filed 1998·Granted Jan 11, 2000·18 cites·6 claims
- 3156US2020073233A1Imprint apparatus, imprint method, and manufacturing method of semiconductor deviceTOSHIBA MEMORY CORP·Filed 2019·Application pending·0 cites
- 3253US9360752B2Pattern formation methodTOSHIBA KK·Filed 2013·Granted Jun 7, 2016·0 cites·13 claims
- 3352US10773425B2Imprint template manufacturing apparatus and imprint template manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Granted Sep 15, 2020·0 cites·5 claims
- 3450US12271111B2Template, manufacturing method of template, and manufacturing method of semiconductor deviceKIOXIA CORP·Filed 2021·Granted Apr 8, 2025·0 cites·17 claims
- 3550US2009296054A1Immersion lithography methodKONO TAKUYA·Filed 2009·Application pending·0 cites
- 3649US8180472B2Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor deviceHATANO MASAYUKI·Filed 2009·Granted May 15, 2012·0 cites·17 claims
- 3748USRE46390EPattern forming method, processing method, and processing apparatusTOSHIBA KK·Filed 2015·Granted May 2, 2017·0 cites·36 claims
- 3848US2015054188A1Mold cleaning apparatus and mold cleaning methodTOSHIBA KK·Filed 2013·Application pending·0 cites
- 3947US10668496B2Imprint template treatment apparatusSHIBAURA MECHATRONICS CORP·Filed 2017·Granted Jun 2, 2020·0 cites·11 claims
- 4047US2010136796A1Substrate holding member, immersion type exposure device and method of fabricating semiconductor deviceHATANO MASAYUKI·Filed 2009·Application pending·0 cites
- 4146US5668691AArrangement for gas circuit breaker with reactor and capacitor connected in series and method for setting its circuit parameterMITSUBISHI ELECTRIC CORP·Filed 1996·Granted Sep 16, 1997·10 cites·18 claims
- 4245US2008218715A1Immersion exposure method of and immersion exposure apparatus for making exposure in a state where the space between the projection lens and substrate to be processed is filled with a liquidHATANO MASAYUKI·Filed 2008·Application pending·0 cites
- 4344US6704696B1Apparatus for and method of designing fluid control devicesFUJIKIN KK·Filed 1999·Granted Mar 9, 2004·12 cites·5 claims
- 4442US8118585B2Pattern formation method and a method for manufacturing a semiconductor deviceHATANO MASAYUKI·Filed 2010·Granted Feb 21, 2012·0 cites·18 claims
- 4540US2018117796A1Imprint template manufacturing apparatus and imprint template manufacturing methodSHIBAURA MECHATRONICS CORP·Filed 2018·Application pending·0 cites
- 4640US2002076511A1Reversible information display medium of liquid crystal type and non-contact IC card utilizing the sameFiled 2002·Application pending·0 cites
- 4738US2018022016A1Template for imprintSHIBAURA MECHATRONICS CORP·Filed 2017·Application pending·0 cites
- 4838US2015221501A1Imprint method, template, and imprint apparatusTOSHIBA KK·Filed 2014·Application pending·0 cites
- 4938US2010304280A1Method of forming a template, and method of manufacturing a semiconductor device using the templateHATANO MASAYUKI·Filed 2010·Application pending·0 cites
- 5037US2016056036A1Template, template forming method, and semiconductor device manufacturing methodTOSHIBA KK·Filed 2015·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →