Inventor · disambiguated record
Marian Mankos
Also filed as: MANKOS MARIAN
51 granted patents·2 pending applications·1,032 citations·filing 1998–2024
99Inventor score
Files withKLA TENCOR TECH CORP18APPLIED MATERIALS INC11MANKOS MARIAN7ETEC SYSTEMS INC5PDF SOLUTIONS INC5
Top patents by PatentIndex Score
53 records- 0199US9496119B1E-beam inspection apparatus and method of using the same on various integrated circuit chipsPDF SOLUTIONS INC·Filed 2016·Granted Nov 15, 2016·77 cites·21 claims
- 0298US7514681B1Electrical process monitoring using mirror-mode electron microscopyKLA TENCOR TECH CORP·Filed 2006·Granted Apr 7, 2009·94 cites·32 claims
- 0396US7821187B1Immersion gun equipped electron beam columnKLA TENCOR CORP·Filed 2008·Granted Oct 26, 2010·38 cites·5 claims
- 0496US6429443B1Multiple beam electron beam lithography systemAPPLIED MATERIALS INC·Filed 2000·Granted Aug 6, 2002·90 cites·9 claims
- 0595US8729466B1Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illuminationMANKOS MARIAN·Filed 2013·Granted May 20, 2014·21 cites·15 claims
- 0695US8183526B1Mirror monochromator for charged particle beam apparatusMANKOS MARIAN·Filed 2011·Granted May 22, 2012·21 cites·19 claims
- 0794US7205542B1Scanning electron microscope with curved axesKLA TENCOR TECH CORP·Filed 2006·Granted Apr 17, 2007·21 cites·29 claims
- 0893US8334508B1Mirror energy filter for electron beam apparatusMANKOS MARIAN·Filed 2011·Granted Dec 18, 2012·17 cites·14 claims
- 0993US6870172B1Maskless reflection electron beam projection lithographyKLA TENCOR TECH CORP·Filed 2004·Granted Mar 22, 2005·82 cites·34 claims
- 1091US6724002B2Multiple electron beam lithography system with multiple beam modulated laser illuminationAPPLIED MATERIALS INC·Filed 2002·Granted Apr 20, 2004·41 cites·12 claims
- 1190US7217924B1Holey mirror arrangement for dual-energy e-beam inspectorKLA TENCOR TECH CORP·Filed 2005·Granted May 15, 2007·15 cites·16 claims
- 1290US6803571B1Method and apparatus for dual-energy e-beam inspectorKLA TENCOR TECH CORP·Filed 2003·Granted Oct 12, 2004·34 cites·23 claims
- 1388US9406479B1Mirror pulse compressor for electron beam apparatusMANKOS MARIAN·Filed 2015·Granted Aug 2, 2016·5 cites·15 claims
- 1488US6903338B2Method and apparatus for reducing substrate edge effects in electron lensesKLA TENCOR TECH CORP·Filed 2003·Granted Jun 7, 2005·26 cites·18 claims
- 1588US6555830B1Suppression of emission noise for microcolumn applications in electron beam inspectionAPPLIED MATERIALS INC·Filed 2000·Granted Apr 29, 2003·30 cites·18 claims
- 1687US12429520B2Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic blockPDF SOLUTIONS INC·Filed 2024·Granted Sep 30, 2025·0 cites·20 claims
- 1786US8258474B1Compact arrangement for dual-beam low energy electron microscopeMANKOS MARIAN·Filed 2011·Granted Sep 4, 2012·7 cites·17 claims
- 1886US6220914B1Method of forming gated photocathode for controlled single and multiple electron beam emissionETEC SYSTEMS INC·Filed 1999·Granted Apr 24, 2001·42 cites·18 claims
- 1985US6930309B1Dual-energy electron flooding for neutralization of charged substrateKLA TENCOR TECH CORP·Filed 2004·Granted Aug 16, 2005·25 cites·27 claims
- 2085US6538256B1Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonanceAPPLIED MATERIALS INC·Filed 2000·Granted Mar 25, 2003·29 cites·36 claims
- 2184US7838832B1Electron beam apparatus and inspection method using dual illumination beams with dynamically controllable offsetsKLA TENCOR CORP·Filed 2008·Granted Nov 23, 2010·11 cites·20 claims
- 2284US6878937B1Prism array for electron beam inspection and defect reviewKLA TENCOR TECH CORP·Filed 2004·Granted Apr 12, 2005·20 cites·20 claims
- 2382US12038476B2Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic blockPDF SOLUTIONS INC·Filed 2023·Granted Jul 16, 2024·0 cites·18 claims
- 2482US7692167B1High-fidelity reflection electron beam lithographyKLA TENCOR TECH CORP·Filed 2006·Granted Apr 6, 2010·6 cites·20 claims
- 2581US8294125B2High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting apertureHAN LIQUN·Filed 2009·Granted Oct 23, 2012·11 cites·18 claims
- 2678US11668746B2Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic blockPDF SOLUTIONS INC·Filed 2022·Granted Jun 6, 2023·0 cites·20 claims
- 2778US7009177B1Apparatus and method for tilted particle-beam illuminationKLA TENCOR TECH CORP·Filed 2005·Granted Mar 7, 2006·4 cites·26 claims
- 2877US6376985B2Gated photocathode for controlled single and multiple electron beam emissionAPPLIED MATERIALS INC·Filed 1998·Granted Apr 23, 2002·25 cites·35 claims
- 2976US7816655B1Reflective electron patterning device and method of using sameKLA TENCOR TECH CORP·Filed 2004·Granted Oct 19, 2010·11 cites·38 claims
- 3076US6812461B1Photocathode source for e-beam inspection or reviewKLA TENCOR TECH CORP·Filed 2002·Granted Nov 2, 2004·11 cites·19 claims
- 3175US6759654B1High contrast inspection and review of magnetic media and headsKLA TENCOR TECH CORP·Filed 2003·Granted Jul 6, 2004·10 cites·22 claims
- 3275US6399934B1Optical coupling to gated photocathodesAPPLIED MATERIALS INC·Filed 2000·Granted Jun 4, 2002·11 cites·22 claims
- 3375US6288401B1Electrostatic alignment of a charged particle beamETEC SYSTEMS INC·Filed 1999·Granted Sep 11, 2001·26 cites·20 claims
- 3475US6215128B1Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithographyETEC SYSTEMS INC·Filed 1999·Granted Apr 10, 2001·34 cites·22 claims
- 3574US6943360B1Twisted-compensated low-energy electron microscopeKLA TENCOR TECH CORP·Filed 2004·Granted Sep 13, 2005·10 cites·21 claims
- 3674US6157039ACharged particle beam illumination of blanking aperture arrayETEC SYSTEMS INC·Filed 1998·Granted Dec 5, 2000·25 cites·32 claims
- 3773US11340293B2Methods for performing a non-contact electrical measurement on a cell, chip, wafer, die, or logic blockPDF SOLUTIONS INC·Filed 2020·Granted May 24, 2022·0 cites·15 claims
- 3873US7342238B2Systems, control subsystems, and methods for projecting an electron beam onto a specimenKLA TENCOR TECH CORP·Filed 2005·Granted Mar 11, 2008·4 cites·23 claims
- 3973US6858843B1Immersion objective lens for e-beam inspectionKLA TENCOR TECH CORP·Filed 2002·Granted Feb 22, 2005·10 cites·3 claims
- 4070US7095037B2Electron beam lithography system having improved electron gunFERNADEZ ANDRES·Filed 2004·Granted Aug 22, 2006·12 cites·30 claims
- 4169US11276549B1Compact arrangement for aberration correction of electron lensesMANKOS MARIAN·Filed 2011·Granted Mar 15, 2022·2 cites·20 claims
- 4267US6376984B1Patterned heat conducting photocathode for electron beam sourceAPPLIED MATERIALS INC·Filed 1999·Granted Apr 23, 2002·19 cites·20 claims
- 4364US8461526B2Electron beam column and methods of using sameMANKOS MARIAN·Filed 2010·Granted Jun 11, 2013·2 cites·15 claims
- 4464US6011269AShaped shadow projection for an electron beam columnETEC SYSTEMS INC·Filed 1998·Granted Jan 4, 2000·16 cites·15 claims
- 4562US7919193B1Shielding, particulate reducing high vacuum componentsKLA TENCOR CORP·Filed 2007·Granted Apr 5, 2011·2 cites·2 claims
- 4662US6936816B2High contrast inspection and review of magnetic media and headsKLA TENCOR TECH CORP·Filed 2004·Granted Aug 30, 2005·4 cites·17 claims
- 4762US6476401B1Moving photocathode with continuous regeneration for image conversion in electron beam lithographyAPPLIED MATERIALS INC·Filed 1999·Granted Nov 5, 2002·16 cites·35 claims
- 4858US6759800B1Diamond supported photocathodes for electron sourcesAPPLIED MATERIALS INC·Filed 1999·Granted Jul 6, 2004·13 cites·14 claims
- 4954US7566873B1High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatusKLA TENCOR TECH CORP·Filed 2006·Granted Jul 28, 2009·2 cites·21 claims
- 5047US8092927B2Shielding, particulate reducing high vacuum componentsTAHMASSEBPUR MOHAMMED·Filed 2011·Granted Jan 10, 2012·0 cites·5 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →