Inventor · disambiguated record
Mark A. Neil
Also filed as: NEIL MARK · NEIL MARK A · Neil Mark Allen
8 granted patents·2 pending applications·39 citations·filing 2003–2023
83Inventor score
Top patents by PatentIndex Score
10 records- 0184US7241991B1Region-of-interest based electron beam metrologyKLA TENCOR TECH CORP·Filed 2005·Granted Jul 10, 2007·10 cites·11 claims
- 0283US10386233B2Variable resolution spectrometerKLA TENCOR CORP·Filed 2018·Granted Aug 20, 2019·3 cites·20 claims
- 0381US10141156B2Measurement of overlay and edge placement errors with an electron beam column arrayKLA TENCOR CORP·Filed 2017·Granted Nov 27, 2018·3 cites·20 claims
- 0475US7041976B1Automated focusing of electron imageKLA TENCOR TECH CORP·Filed 2003·Granted May 9, 2006·10 cites·10 claims
- 0569US8658973B2Auger elemental identification algorithmNEIL MARK·Filed 2013·Granted Feb 25, 2014·3 cites·20 claims
- 0668US7015468B1Methods of stabilizing measurement of ArF resist in CD-SEMKLA TENCOR TECH CORP·Filed 2004·Granted Mar 21, 2006·10 cites·20 claims
- 0754US2024053280A1Methods And Systems For Systematic Error Compensation Across A Fleet Of Metrology Systems Based On A Trained Error Evaluation ModelKLA CORP·Filed 2023·Application pending·0 cites
- 0844US10429296B2Multilayer film metrology using an effective media approximationKLA TENCOR CORP·Filed 2018·Granted Oct 1, 2019·0 cites·23 claims
- 0944US10151631B2Spectroscopy with tailored spectral samplingKLA TENCOR CORP·Filed 2017·Granted Dec 11, 2018·0 cites·25 claims
- 1038US2012223227A1Apparatus and methods for real-time three-dimensional sem imaging and viewing of semiconductor wafersCHEN CHIEN-HUEI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →