Inventor · disambiguated record
Masahito Ozawa
Also filed as: OZAWA MASAHITO
7 granted patents·2 pending applications·998 citations·filing 1987–2012
90Inventor score
Top patents by PatentIndex Score
9 records- 0194US4779861ASheet separator/feederOKI ELECTRIC IND CO LTD·Filed 1987·Granted Oct 25, 1988·58 cites·4 claims
- 0293US5474410AMulti-chamber system provided with carrier unitsTEL VARIAN LIMITED·Filed 1994·Granted Dec 12, 1995·478 cites·10 claims
- 0392US5913978AApparatus and method for regulating pressure in two chambersTOKYO ELECTRON LTD·Filed 1996·Granted Jun 22, 1999·200 cites·13 claims
- 0489US6395094B1Process system with transfer unit for object to be processedTOKYO ELECTRON LTD·Filed 2000·Granted May 28, 2002·65 cites·6 claims
- 0589US5332442ASurface processing apparatusTOKYO ELECTRON LTD·Filed 1992·Granted Jul 26, 1994·139 cites·14 claims
- 0669US6234107B1Auxiliary vacuum chamber and vacuum processing unit using sameTOKYO ELECTRON LTD·Filed 1999·Granted May 22, 2001·39 cites·12 claims
- 0753US6702865B1Alignment processing mechanism and semiconductor processing device using itTOKYO ELECTRON LTD·Filed 1999·Granted Mar 9, 2004·19 cites·17 claims
- 0835US2011142579A1Transfer device and target object processing apparatus including sameTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0931US2013180448A1Substrate transfer device and substrate processing systemSAKAUE HIROMITSU·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →