Inventor · disambiguated record
Martin Plihal
Also filed as: PLIHAL MARTIN
42 granted patents·5 pending applications·416 citations·filing 2003–2024
97Inventor score
Top patents by PatentIndex Score
47 records- 0192US7570797B1Methods and systems for generating an inspection process for an inspection systemKLA TENCOR TECH CORP·Filed 2005·Granted Aug 4, 2009·83 cites·20 claims
- 0292US7227628B1Wafer inspection systems and methods for analyzing inspection dataKLA TENCOR TECH CORP·Filed 2004·Granted Jun 5, 2007·58 cites·30 claims
- 0391US10832396B2And noise based care areasKLA TENCOR CORP·Filed 2019·Granted Nov 10, 2020·8 cites·34 claims
- 0491US10267748B2Optimizing training sets used for setting up inspection-related algorithmsKLA TENCOR CORP·Filed 2017·Granted Apr 23, 2019·12 cites·20 claims
- 0591US9518934B2Wafer defect discoveryKLA TENCOR CORP·Filed 2015·Granted Dec 13, 2016·12 cites·20 claims
- 0690US7417724B1Wafer inspection systems and methods for analyzing inspection dataKLA TENCOR TECH CORP·Filed 2007·Granted Aug 26, 2008·14 cites·32 claims
- 0790US6718526B1Spatial signature analysisKLA TENCOR CORP·Filed 2003·Granted Apr 6, 2004·100 cites·20 claims
- 0889US9430743B2Composite defect classifierKLA TENCOR CORP·Filed 2015·Granted Aug 30, 2016·8 cites·30 claims
- 0987US11676264B2System and method for determining defects using physics-based image perturbationsKLA CORP·Filed 2020·Granted Jun 13, 2023·3 cites·24 claims
- 1087US8948494B2Unbiased wafer defect samplesKLA TENCOR CORP·Filed 2013·Granted Feb 3, 2015·6 cites·20 claims
- 1186US10699926B2Identifying nuisances and defects of interest in defects detected on a waferKLA TENCOR CORP·Filed 2018·Granted Jun 30, 2020·7 cites·26 claims
- 1285US8594823B2Scanner performance comparison and matching using design and defect dataPARK ALLEN·Filed 2010·Granted Nov 26, 2013·9 cites·12 claims
- 1384US10436720B2Adaptive automatic defect classificationKLA TENCOR CORP·Filed 2016·Granted Oct 8, 2019·8 cites·24 claims
- 1483US12299848B2Deep learning image denoising for semiconductor-based applicationsKLA CORP·Filed 2022·Granted May 13, 2025·1 cites·18 claims
- 1583US11379967B2Methods and systems for inspection of semiconductor structures with automatically generated defect featuresKLA CORP·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 1682US7394534B1Process excursion detectionKLA TENCOR CORP·Filed 2003·Granted Jul 1, 2008·15 cites·1 claims
- 1780US9714905B1Wafer inspection recipe setupKLA TENCOR CORP·Filed 2014·Granted Jul 25, 2017·8 cites·31 claims
- 1879US10902579B1Creating and tuning a classifier to capture more defects of interest during inspectionKLA TENCOR CORP·Filed 2018·Granted Jan 26, 2021·4 cites·14 claims
- 1979US7006886B1Detection of spatially repeating signaturesKLA TENCOR TECH CORP·Filed 2004·Granted Feb 28, 2006·23 cites·8 claims
- 2077US8537349B2Monitoring of time-varying defect classification performanceHUET PATRICK·Filed 2010·Granted Sep 17, 2013·6 cites·17 claims
- 2176US11055840B2Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspectionKLA CORP·Filed 2019·Granted Jul 6, 2021·2 cites·19 claims
- 2276US9613411B2Creating defect classifiers and nuisance filtersKLA TENCOR CORP·Filed 2014·Granted Apr 4, 2017·9 cites·41 claims
- 2374US8165837B1Multi-scale classification of defectsPARAMASIVAM SARAVANAN·Filed 2009·Granted Apr 24, 2012·10 cites·6 claims
- 2473US11119060B2Defect location accuracy using shape based grouping guided defect centeringKLA TENCOR CORP·Filed 2018·Granted Sep 14, 2021·2 cites·14 claims
- 2572US7646476B2Process excursion detectionKLA TENCOR CORP·Filed 2008·Granted Jan 12, 2010·2 cites·4 claims
- 2671US9835566B2Adaptive nuisance filterKLA TENCOR CORP·Filed 2016·Granted Dec 5, 2017·1 cites·27 claims
- 2769US10692690B2Care areas for improved electron beam defect detectionKLA TENCOR CORP·Filed 2017·Granted Jun 23, 2020·1 cites·20 claims
- 2869US2025290878A1Dynamic inspection of highly defective wafersKLA CORP·Filed 2024·Application pending·0 cites
- 2966US9891538B2Adaptive sampling for process window determinationKLA TENCOR CORP·Filed 2016·Granted Feb 13, 2018·1 cites·19 claims
- 3065US10964013B2System, method for training and applying defect classifiers in wafers having deeply stacked layersKLA TENCOR CORP·Filed 2018·Granted Mar 30, 2021·1 cites·16 claims
- 3160US2025225638A1Digital nonlinear neural network based image filtering for semiconductor applicationsKLA CORP·Filed 2024·Application pending·0 cites
- 3259US11379969B2Method for process monitoring with optical inspectionsKLA CORP·Filed 2020·Granted Jul 5, 2022·0 cites·18 claims
- 3357US12235224B2Process window qualification modulation layoutsKLA CORP·Filed 2022·Granted Feb 25, 2025·0 cites·4 claims
- 3453US2025071419A1Recommender systems and methods for autonomous mode selection in inspection and other toolsKLA CORP·Filed 2024·Application pending·0 cites
- 3552US2010067781A1Process Excursion DetectionKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 3651US10670536B2Mode selection for inspectionKLA TENCOR CORP·Filed 2019·Granted Jun 2, 2020·0 cites·22 claims
- 3751US9984454B2System, method and computer program product for correcting a difference image generated from a comparison of target and reference diesKLA TENCOR CORP·Filed 2016·Granted May 29, 2018·0 cites·20 claims
- 3850US8289510B2Process excursion detectionHUET PATRICK Y·Filed 2011·Granted Oct 16, 2012·0 cites·5 claims
- 3949US11114324B2Defect candidate generation for inspectionKLA CORP·Filed 2019·Granted Sep 7, 2021·0 cites·22 claims
- 4048US11151707B2System and method for difference filter and aperture selection using shallow deep learningKLA TENCOR CORP·Filed 2019·Granted Oct 19, 2021·0 cites·38 claims
- 4148US2017076911A1Wafer Defect DiscoveryKLA TENCOR CORP·Filed 2016·Application pending·0 cites
- 4247US11514357B2Nuisance mining for novel defect discoveryKLA TENCOR CORP·Filed 2019·Granted Nov 29, 2022·0 cites·20 claims
- 4343US9940705B2System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference componentsKLA TENCOR CORP·Filed 2016·Granted Apr 10, 2018·0 cites·19 claims
- 4437US11237119B2Diagnostic methods for the classifiers and the defects captured by optical toolsKLA TENCOR CORP·Filed 2017·Granted Feb 1, 2022·0 cites·17 claims
- 4537US9983148B2System and method for production line monitoringKLA TENCOR CORP·Filed 2016·Granted May 29, 2018·0 cites·26 claims
- 4637US9582869B2Dynamic binning for diversification and defect discoveryKLA TENCOR CORP·Filed 2015·Granted Feb 28, 2017·0 cites·37 claims
- 4733US10338004B2Production sample shaping that preserves re-normalizabilityKLA TENCOR CORP·Filed 2015·Granted Jul 2, 2019·0 cites·43 claims
Join the waitlist — get patent alerts
Get an alert when Martin Plihal files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →