Inventor · disambiguated record
Mark Saly
Also filed as: SALY MARK · SALY MARK J · SALY MARK JOSEPH
110 granted patents·57 pending applications·187 citations·filing 2012–2025
99Inventor score
Files withAPPLIED MATERIALS INC161APPLIED MATEIALS INC1LAVOIE ADRIEN1NOVELLUS SYSTEMS INC1ODEDRA RAJESH1
Top patents by PatentIndex Score
167 records- 0198US10633740B2Methods for depositing coatings on aerospace componentsAPPLIED MATERIALS INC·Filed 2019·Granted Apr 28, 2020·19 cites·20 claims
- 0297US11028480B2Methods of protecting metallic components against corrosion using chromium-containing thin filmsAPPLIED MATERIALS INC·Filed 2019·Granted Jun 8, 2021·12 cites·20 claims
- 0396US11447865B2Deposition of low-κ filmsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 20, 2022·4 cites·20 claims
- 0495US11848229B2Selective blocking of metal surfaces using bifunctional self-assembled monolayersAPPLIED MATERIALS INC·Filed 2022·Granted Dec 19, 2023·3 cites·18 claims
- 0595US9175023B2Molybdenum allyl complexes and use thereof in thin film depositionSIGMA ALDRICH CO LLC·Filed 2013·Granted Nov 3, 2015·22 cites·7 claims
- 0695US8728955B2Method of plasma activated deposition of a conformal film on a substrate surfaceLAVOIE ADRIEN·Filed 2012·Granted May 20, 2014·70 cites·15 claims
- 0794US11621172B2Vapor phase thermal etch solutions for metal oxo photoresistsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 4, 2023·2 cites·14 claims
- 0893US12473316B2Molybdenum (0) precursors for deposition of molybdenum filmsAPPLIED MATERIALS INC·Filed 2024·Granted Nov 18, 2025·1 cites·6 claims
- 0993US11545354B2Molecular layer deposition method and systemAPPLIED MATERIALS INC·Filed 2020·Granted Jan 3, 2023·3 cites·20 claims
- 1092US9911591B2Selective deposition of thin film dielectrics using surface blocking chemistryAPPLIED MATERIALS INC·Filed 2016·Granted Mar 6, 2018·7 cites·19 claims
- 1191US11760768B2Molybdenum(0) precursors for deposition of molybdenum filmsAPPLIED MATERIALS INC·Filed 2021·Granted Sep 19, 2023·2 cites·1 claims
- 1291US11342481B2Preclean and encapsulation of microLED featuresAPPLIED MATERIALS INC·Filed 2020·Granted May 24, 2022·2 cites·19 claims
- 1391US10023958B2Atomic layer deposition of films comprising silicon, carbon and nitrogen using halogenated silicon precursorsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 17, 2018·4 cites·6 claims
- 1491US9520284B1Ion beam activated directional depositionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 13, 2016·7 cites·19 claims
- 1590US11398388B2Methods for selective dry etching gallium oxideAPPLIED MATERIALS INC·Filed 2020·Granted Jul 26, 2022·2 cites·13 claims
- 1690US9875888B2High temperature silicon oxide atomic layer deposition technologyAPPLIED MATERIALS INC·Filed 2015·Granted Jan 23, 2018·6 cites·6 claims
- 1787US11972940B2Area selective carbon-based film depositionAPPLIED MATERIALS INC·Filed 2022·Granted Apr 30, 2024·1 cites·7 claims
- 1886US12305275B2Corrosion resistant film on a chamber component and methods of depositing thereofAPPLIED MATERIALS INC·Filed 2023·Granted May 20, 2025·0 cites·20 claims
- 1986US11549181B2Methods for atomic layer deposition of SiCO(N) using halogenated silylamidesAPPLIED MATERIALS INC·Filed 2019·Granted Jan 10, 2023·1 cites·10 claims
- 2086US11028477B2Bottom-up gap-fill by surface poisoning treatmentAPPLIED MATERIALS INC·Filed 2016·Granted Jun 8, 2021·4 cites·15 claims
- 2185US12060370B2Molybdenum (0) precursors for deposition of molybdenum filmsAPPLIED MATERIALS INC·Filed 2021·Granted Aug 13, 2024·1 cites·1 claims
- 2285US11886120B2Deposition of semiconductor integration filmsAPPLIED MATERIALS INC·Filed 2021·Granted Jan 30, 2024·1 cites·20 claims
- 2384US12291779B2Methods of selective atomic layer depositionAPPLIED MATERIALS INC·Filed 2023·Granted May 6, 2025·0 cites·11 claims
- 2484US11186909B2Methods of depositing low-K filmsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 30, 2021·1 cites·20 claims
- 2583US11562904B2Deposition of semiconductor integration filmsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 24, 2023·1 cites·6 claims
- 2682US12415824B2Molybdenum(0) precursors for deposition of molybdenum filmsAPPLIED MATERIALS INC·Filed 2023·Granted Sep 16, 2025·0 cites·14 claims
- 2781US12068170B2Vapor phase thermal etch solutions for metal oxo photoresistsAPPLIED MATERIALS INC·Filed 2023·Granted Aug 20, 2024·0 cites·10 claims
- 2881US2025283251A1Method for forming silicon-phosphorous materialsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2981US2025230545A1Methods of selective atomic layer depositionAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3080US11866824B2Homoleptic lanthanide deposition precursorsAPPLIED MATERIALS INC·Filed 2022·Granted Jan 9, 2024·0 cites·18 claims
- 3180US10985014B2Methods for selective deposition on silicon-based dielectricsAPPLIED MATERIALS INC·Filed 2018·Granted Apr 20, 2021·2 cites·20 claims
- 3280US2023313380A1Methods for depositing sacrificial coatings on aerospace componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3379US12338547B2Method for forming silicon-phosphorous materialsAPPLIED MATERIALS INC·Filed 2023·Granted Jun 24, 2025·0 cites·26 claims
- 3479US11164745B2Method of enhancing selective deposition by cross-linking of blocking moleculesAPPLIED MATERIALS INC·Filed 2018·Granted Nov 2, 2021·2 cites·19 claims
- 3578US12469715B2Dry etching with etch byproduct self-cleaningAPPLIED MATERIALS INC·Filed 2023·Granted Nov 11, 2025·0 cites·12 claims
- 3678US12281387B2Method of depositing metal filmsAPPLIED MATERIALS INC·Filed 2021·Granted Apr 22, 2025·0 cites·5 claims
- 3778US12033866B2Vapor phase thermal etch solutions for metal oxo photoresistsAPPLIED MATERIALS INC·Filed 2023·Granted Jul 9, 2024·0 cites·6 claims
- 3878US2025250675A1Method of depositing metal filmsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3978US2024322073A1Preclean and encapsulation of microled featuresAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4078US2023090196A1Methods For Atomic Layer Deposition Of SiCO(N) Using Halogenated SilylamidesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 4177US12040427B2Preclean and encapsulation of microLED featuresAPPLIED MATERIALS INC·Filed 2022·Granted Jul 16, 2024·0 cites·17 claims
- 4277US2023184119A1Methods of protecting metallic components against corrosion using chromium-containing thin filmsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4376US11697879B2Methods for depositing sacrificial coatings on aerospace componentsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 11, 2023·0 cites·20 claims
- 4476US11560804B2Methods for depositing coatings on aerospace componentsAPPLIED MATERIALS INC·Filed 2022·Granted Jan 24, 2023·0 cites·20 claims
- 4576US11384648B2Methods for depositing coatings on aerospace componentsAPPLIED MATERIALS INC·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 4676US11371136B2Methods for selective deposition of dielectric on silicon oxideAPPLIED MATERIALS INC·Filed 2018·Granted Jun 28, 2022·2 cites·20 claims
- 4776US2024047193A1Methods of Depositing SiCON with C, O, and N Compositional ControlAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4876US2019316256A1Methods Of Selective Atomic Layer DepositionAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 4975US11970777B2Deposition of low-k filmsAPPLIED MATERIALS INC·Filed 2022·Granted Apr 30, 2024·0 cites·20 claims
- 5074US12281382B2Methods for depositing blocking layers on conductive surfacesAPPLIED MATERIALS INC·Filed 2023·Granted Apr 22, 2025·0 cites·5 claims
Showing the top 50 of 167 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →