Inventor · disambiguated record
Marco Koert Stavenga
Also filed as: STAVENGA MARCO K · STAVENGA MARCO KOERT
61 granted patents·8 pending applications·361 citations·filing 2004–2021
98Inventor score
Files withASML NETHERLANDS BV45JANSEN HANS4STAVENGA MARCO KOERT4DE JONG ANTHONIUS MARTINUS CORNELIS PETRUS3DIERICHS MARCEL MATHIJS THEODORE MARIE3
Top patents by PatentIndex Score
69 records- 0198US7733459B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 8, 2010·66 cites·50 claims
- 0296US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 0395US8629971B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2010·Granted Jan 14, 2014·9 cites·20 claims
- 0495US7710537B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted May 4, 2010·13 cites·21 claims
- 0595US7304715B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 4, 2007·52 cites·39 claims
- 0694US11378893B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2020·Granted Jul 5, 2022·2 cites·20 claims
- 0793US9581914B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 28, 2017·5 cites·21 claims
- 0893US9454088B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2015·Granted Sep 27, 2016·4 cites·19 claims
- 0993US9025127B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2011·Granted May 5, 2015·6 cites·22 claims
- 1093US8953144B2Lithographic apparatus and device manufacturing methodDIERICHS MARCEL MATHIJS THEODORE MARIE·Filed 2011·Granted Feb 10, 2015·6 cites·22 claims
- 1192US9703210B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jul 11, 2017·4 cites·18 claims
- 1292US7880860B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 1, 2011·31 cites·29 claims
- 1390US8941811B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2011·Granted Jan 27, 2015·4 cites·21 claims
- 1490US8817231B2Lithographic apparatus and device manufacturing method involving a liquid confinement structureVERSPAY JACOBUS JOHANNUS LEONARDUS HENDRICUS·Filed 2010·Granted Aug 26, 2014·6 cites·46 claims
- 1590US7900641B2Cleaning device and a lithographic apparatus cleaning methodASML NETHERLANDS BV·Filed 2007·Granted Mar 8, 2011·12 cites·22 claims
- 1690US7423720B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 9, 2008·21 cites·37 claims
- 1789US9188880B2Lithographic apparatus and device manufacturing method involving a heaterCADEE THEODORUS PETRUS MARIA·Filed 2011·Granted Nov 17, 2015·4 cites·32 claims
- 1889US8638419B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2011·Granted Jan 28, 2014·4 cites·20 claims
- 1988US9772565B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2016·Granted Sep 26, 2017·2 cites·20 claims
- 2088US9268242B2Lithographic apparatus and device manufacturing method involving a heater and a temperature sensorCADEE THEODORUS PETRUS MARIA·Filed 2010·Granted Feb 23, 2016·4 cites·38 claims
- 2188US7397533B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 8, 2008·23 cites·32 claims
- 2286US10838310B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2019·Granted Nov 17, 2020·1 cites·20 claims
- 2386US8114568B2Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatusVAN DER HEIJDEN MARCUS THEODOOR WILHELMUS·Filed 2008·Granted Feb 14, 2012·12 cites·31 claims
- 2485US9164391B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2014·Granted Oct 20, 2015·2 cites·20 claims
- 2585US9059228B2Substrate table, immersion lithographic apparatus and device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Jun 16, 2015·6 cites·22 claims
- 2684US8018573B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 13, 2011·6 cites·19 claims
- 2783US8115899B2Lithographic apparatus and device manufacturing methodJANSEN HANS·Filed 2007·Granted Feb 14, 2012·4 cites·31 claims
- 2879US7378025B2Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 27, 2008·6 cites·18 claims
- 2978US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 3077US12197140B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2021·Granted Jan 14, 2025·0 cites·20 claims
- 3176US9176393B2Lithographic apparatus and a method of operating the apparatusCLOIN CHRISTIAN GERARDUS NORBERTUS HENDRICUS MARIE·Filed 2009·Granted Nov 3, 2015·5 cites·20 claims
- 3275US10620546B2Lithographic apparatus and device manufacturing method involving a liquid confinement structureASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·0 cites·20 claims
- 3374US12072635B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2021·Granted Aug 27, 2024·0 cites·19 claims
- 3474US11204558B2Particle suppression systems and methodsASML NETHERLANDS BV·Filed 2018·Granted Dec 21, 2021·1 cites·21 claims
- 3574US8859188B2Immersion liquid, exposure apparatus, and exposure processJANSEN HANS·Filed 2006·Granted Oct 14, 2014·2 cites·32 claims
- 3671US11187991B2Lithographic apparatus and a method of operating the apparatusASML NETHERLANDS BV·Filed 2015·Granted Nov 30, 2021·1 cites·20 claims
- 3771US10274832B2Lithographic apparatus and device manufacturing method involving a liquid confinement structureASML NETHERLANDS BV·Filed 2018·Granted Apr 30, 2019·0 cites·21 claims
- 3871US8755026B2Lithographic apparatus and a device manufacturing methodGOSEN JEROEN GERARD·Filed 2010·Granted Jun 17, 2014·2 cites·21 claims
- 3971US7522258B2Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contaminationASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·3 cites·35 claims
- 4070US9964861B2Lithographic apparatus and device manufacturing method involving a liquid confinement structureASML NETHERLANDS BV·Filed 2017·Granted May 8, 2018·0 cites·21 claims
- 4169US9798247B2Lithographic apparatus and device manufacturing method involving a liquid confinement structureASML NETHERLANDS BV·Filed 2017·Granted Oct 24, 2017·0 cites·21 claims
- 4268US9261797B2Lithographic apparatus and device manufacturing method involving a liquid confinement structureASML NETHERLANDS BV·Filed 2014·Granted Feb 16, 2016·0 cites·21 claims
- 4368US8246838B2Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing methodVERHAGEN MARTINUS CORNELIS MARIA·Filed 2011·Granted Aug 21, 2012·1 cites·6 claims
- 4468US2017139333A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
- 4566US11215933B2Substrate table, immersion lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jan 4, 2022·0 cites·19 claims
- 4666US9645507B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted May 9, 2017·0 cites·23 claims
- 4764US10712675B2Immersion liquid, exposure apparatus, and exposure processASML NETHERLANDS BV·Filed 2017·Granted Jul 14, 2020·0 cites·20 claims
- 4864US10509326B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Dec 17, 2019·0 cites·20 claims
- 4963US10254663B2Lithographic apparatus and device manufacturing method involving a heaterASML NETHERLANDS BV·Filed 2015·Granted Apr 9, 2019·0 cites·38 claims
- 5063US8817227B2Immersion lithography apparatusSTAVENGA MARCO KOERT·Filed 2008·Granted Aug 26, 2014·1 cites·23 claims
Showing the top 50 of 69 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →