Inventor · disambiguated record
Marko Tuominen
Also filed as: TUOMINEN MARKO · TUOMINEN MARKO J
83 granted patents·30 pending applications·5,865 citations·filing 1995–2025
99Inventor score
Top patents by PatentIndex Score
113 records- 0199US11389824B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2020·Granted Jul 19, 2022·11 cites·19 claims
- 0299US10695794B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2015·Granted Jun 30, 2020·53 cites·27 claims
- 0399US10443123B2Dual selective depositionASM IP HOLDING BV·Filed 2018·Granted Oct 15, 2019·46 cites·21 claims
- 0499US10047435B2Dual selective depositionASM IP HOLDING BV·Filed 2015·Granted Aug 14, 2018·463 cites·52 claims
- 0599US9895715B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·525 cites·27 claims
- 0699US9257303B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2015·Granted Feb 9, 2016·82 cites·19 claims
- 0798US11213853B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2019·Granted Jan 4, 2022·9 cites·20 claims
- 0898US10814349B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2019·Granted Oct 27, 2020·19 cites·22 claims
- 0998US10456808B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2018·Granted Oct 29, 2019·12 cites·20 claims
- 1098US10343186B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2016·Granted Jul 9, 2019·53 cites·22 claims
- 1198US10283319B2Atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted May 7, 2019·18 cites·19 claims
- 1298US10273584B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted Apr 30, 2019·17 cites·28 claims
- 1398US10157786B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Dec 18, 2018·55 cites·21 claims
- 1498US10049924B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2017·Granted Aug 14, 2018·53 cites·20 claims
- 1598US9679808B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2016·Granted Jun 13, 2017·57 cites·20 claims
- 1698US9502289B2Selective formation of metallic films on metallic surfacesASM INT NV·Filed 2015·Granted Nov 22, 2016·86 cites·31 claims
- 1798US9112003B2Selective formation of metallic films on metallic surfacesASM INT·Filed 2012·Granted Aug 18, 2015·93 cites·30 claims
- 1898US8956971B2Selective formation of metallic films on metallic surfacesHAUKKA SUVI P·Filed 2011·Granted Feb 17, 2015·565 cites·28 claims
- 1998US7851019B2Method for controlling the sublimation of reactantsASM INT·Filed 2008·Granted Dec 14, 2010·551 cites·19 claims
- 2098US7824492B2Method of growing oxide thin filmsASM INT·Filed 2003·Granted Nov 2, 2010·540 cites·39 claims
- 2198US7601225B2System for controlling the sublimation of reactantsASM INT·Filed 2003·Granted Oct 13, 2009·564 cites·25 claims
- 2298US6660660B2Methods for making a dielectric stack in an integrated circuitASM INTERNATIONAL NV·Filed 2001·Granted Dec 9, 2003·354 cites·5 claims
- 2397US11739427B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2021·Granted Aug 29, 2023·2 cites·24 claims
- 2497US11643726B2Methods for forming a layer comprising a condensing and a curing stepASM IP HOLDING BV·Filed 2022·Granted May 9, 2023·2 cites·12 claims
- 2597US11094535B2Selective passivation and selective depositionASM IP HOLDING BV·Filed 2018·Granted Aug 17, 2021·20 cites·19 claims
- 2697US10280519B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2017·Granted May 7, 2019·14 cites·20 claims
- 2797US7045406B2Method of forming an electrode with adjusted work functionASM INT·Filed 2003·Granted May 16, 2006·155 cites·12 claims
- 2897US6759325B2Sealing porous structuresASM MICROCHEMISTRY OY·Filed 2002·Granted Jul 6, 2004·169 cites·29 claims
- 2996US11654454B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2022·Granted May 23, 2023·1 cites·18 claims
- 3096US11643720B2Selective deposition of silicon oxide on metal surfacesASM IP HOLDING BV·Filed 2021·Granted May 9, 2023·6 cites·19 claims
- 3196US8309173B2System for controlling the sublimation of reactantsTUOMINEN MARKO·Filed 2010·Granted Nov 13, 2012·556 cites·19 claims
- 3296US7666773B2Selective deposition of noble metal thin filmsASM INT·Filed 2006·Granted Feb 23, 2010·48 cites·18 claims
- 3396US7476618B2Selective formation of metal layers in an integrated circuitASM JAPAN·Filed 2005·Granted Jan 13, 2009·126 cites·45 claims
- 3496US6492283B2Method of forming ultrathin oxide layerASM MICROCHEMISTRY OY·Filed 2001·Granted Dec 10, 2002·124 cites·37 claims
- 3595US11898240B2Selective deposition of silicon oxide on dielectric surfaces relative to metal surfacesASM IP HOLDING BV·Filed 2021·Granted Feb 13, 2024·4 cites·20 claims
- 3694US10662533B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2019·Granted May 26, 2020·3 cites·23 claims
- 3794US8927403B2Selective deposition of noble metal thin filmsHUOTARI HANNU·Filed 2011·Granted Jan 6, 2015·26 cites·23 claims
- 3893US11739428B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2021·Granted Aug 29, 2023·1 cites·27 claims
- 3992US7038284B2Methods for making a dielectric stack in an integrated circuitASM INT·Filed 2003·Granted May 2, 2006·51 cites·8 claims
- 4091US11640899B2Atomic layer etching processesASM IP HOLDING BV·Filed 2021·Granted May 2, 2023·1 cites·19 claims
- 4191US7704896B2Atomic layer deposition of thin films on germaniumASM INT·Filed 2006·Granted Apr 27, 2010·18 cites·23 claims
- 4290US11047040B2Dual selective depositionASM IP HOLDING BV·Filed 2019·Granted Jun 29, 2021·3 cites·18 claims
- 4390US7771534B2Method of growing oxide thin filmsASM INT·Filed 2006·Granted Aug 10, 2010·12 cites·12 claims
- 4489US11525184B2Dual selective depositionASM IP HOLDING BV·Filed 2021·Granted Dec 13, 2022·1 cites·22 claims
- 4589US10662534B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2019·Granted May 26, 2020·1 cites·22 claims
- 4689US2025037970A1Atomic layer etching processesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4788US12320012B2Thermal atomic layer etching processesASM IP HOLDING BV·Filed 2023·Granted Jun 3, 2025·0 cites·20 claims
- 4888US12136552B2Toposelective vapor deposition using an inhibitorASM IP HOLDING BV·Filed 2021·Granted Nov 5, 2024·1 cites·20 claims
- 4988US11158500B2Plasma enhanced deposition processes for controlled formation of oxygen containing thin filmsASM IP HOLDING BV·Filed 2018·Granted Oct 26, 2021·4 cites·18 claims
- 5088US8025922B2Enhanced deposition of noble metalsASM INT·Filed 2006·Granted Sep 27, 2011·10 cites·43 claims
Showing the top 50 of 113 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →