Inventor · disambiguated record
Marinus Johannes Maria Van Dam
Also filed as: VAN DAM MARINUS J M · VAN DAM MARINUS JOHANNES MARIA
16 granted patents·2 pending applications·45 citations·filing 1990–2021
91Inventor score
Files withASML NETHERLANDS BV13DE VRIES GOSSE CHARLES1OCE NEDERLAND BV1VAN BOXTEL FRANK JOHANNES JACOBUS1VAN DAM MARINUS JOHANNES MARIA1
Top patents by PatentIndex Score
18 records- 0193US11262661B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 1, 2022·4 cites·18 claims
- 0292US10775704B2Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use thereinASML NETHERLANDS BV·Filed 2019·Granted Sep 15, 2020·4 cites·20 claims
- 0390US10895452B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Jan 19, 2021·3 cites·15 claims
- 0489US11940739B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 26, 2024·1 cites·19 claims
- 0588US10365565B2Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use thereinASML NETHERLANDS BV·Filed 2017·Granted Jul 30, 2019·3 cites·13 claims
- 0687US10809193B2Inspection apparatus having non-linear opticsASML NETHERLANDS BV·Filed 2019·Granted Oct 20, 2020·3 cites·18 claims
- 0781US9785051B2Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devicesASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·5 cites·29 claims
- 0880US8675169B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2011·Granted Mar 18, 2014·4 cites·20 claims
- 0979US8218130B2Device manufacturing method and lithographic apparatus,and computer program productVAN DAM MARINUS JOHANNES MARIA·Filed 2008·Granted Jul 10, 2012·7 cites·15 claims
- 1078US10488765B2Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatusASML NETHERLANDS BV·Filed 2018·Granted Nov 26, 2019·2 cites·13 claims
- 1178US9927711B2Actuation mechanism, optical apparatus and lithography apparatusASML NETHERLANDS BV·Filed 2014·Granted Mar 27, 2018·3 cites·20 claims
- 1268US11549806B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 10, 2023·0 cites·20 claims
- 1354US12460971B2Wavelength selection module, illumination system and metrology systemASML NETHERLANDS BV·Filed 2020·Granted Nov 4, 2025·0 cites·17 claims
- 1441US8867021B2Illumination system, lithographic apparatus and method of adjusting an illumination modeDE VRIES GOSSE CHARLES·Filed 2010·Granted Oct 21, 2014·0 cites·19 claims
- 1540US7148954B2Lithographic apparatus and method for its useASML NETHERLANDS BV·Filed 2005·Granted Dec 12, 2006·0 cites·21 claims
- 1640US2007058151A1Optical element for use in lithography apparatus and method of conditioning radiation beamZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
- 1735US2004263816A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1828US5111037ADevice for measuring light scattered by an information supportOCE NEDERLAND BV·Filed 1990·Granted May 5, 1992·6 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →