Inventor · disambiguated record
Martin Voelcker
Also filed as: VOELCKER MARTIN
7 granted patents·2 pending applications·75 citations·filing 1998–2022
83Inventor score
Files withZEISS CARL SMT GMBH4ZEISS CARL JENA GMBH2CARL ZEISS MICROIMAGING1ZEISS CARL LASER OPTICS GMBH1ZEISS CARL MICROIMAGING GMBH1
Top patents by PatentIndex Score
9 records- 0189US11269260B2Method and assembly for characterizing a mask or a wafer for microlithographyZEISS CARL SMT GMBH·Filed 2021·Granted Mar 8, 2022·2 cites·20 claims
- 0278US6771417B1Applications of adaptive optics in microscopyZEISS CARL JENA GMBH·Filed 1998·Granted Aug 3, 2004·45 cites·1 claims
- 0368US11774870B2Method for removing a particle from a mask systemZEISS CARL SMT GMBH·Filed 2022·Granted Oct 3, 2023·0 cites·24 claims
- 0466US7733564B2Applications of adaptive optics in microscopyCARL ZEISS MICROIMAGING·Filed 2002·Granted Jun 8, 2010·10 cites·12 claims
- 0564US7335866B2Method for improving depth discrimination in optical reproduction systemsZEISS CARL MICROIMAGING GMBH·Filed 2003·Granted Feb 26, 2008·13 cites·13 claims
- 0662US11003090B2Lithography apparatus comprising a plurality of individually controllable write headsZEISS CARL SMT GMBH·Filed 2020·Granted May 11, 2021·0 cites·22 claims
- 0753US2010024865A1Continuous coating installation, methods for producing crystalline solar cells, and solar cellZEISS CARL LASER OPTICS GMBH·Filed 2009·Application pending·0 cites
- 0850US2017255110A1Lithography apparatus comprising a plurality of individually controllable write headsZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 0930US6545263B2Scanning probe microscope with probe integrated in an optical systemZEISS CARL JENA GMBH·Filed 1998·Granted Apr 8, 2003·5 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →