Inventor · disambiguated record
Michael Shifrin
Also filed as: SHIFRIN MICHAEL
6 granted patents·2 pending applications·35 citations·filing 2008–2023
74Inventor score
Top patents by PatentIndex Score
8 records- 0186US7803715B1Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmaskHAIMSON SHAI·Filed 2008·Granted Sep 28, 2010·34 cites·20 claims
- 0274US11710616B2TEM-based metrology method and systemNOVA LTD·Filed 2022·Granted Jul 25, 2023·0 cites·22 claims
- 0369US11450541B2Metrology method and systemNOVA LTD·Filed 2018·Granted Sep 20, 2022·1 cites·19 claims
- 0467US11309162B2TEM-based metrology method and systemNOVA LTD·Filed 2021·Granted Apr 19, 2022·0 cites·5 claims
- 0564US2023074398A1Metrology method and systemNOVA LTD·Filed 2022·Application pending·0 cites
- 0654US10916404B2TEM-based metrology method and systemNOVA MEASURING INSTR LTD·Filed 2018·Granted Feb 9, 2021·0 cites·14 claims
- 0747US2025123571A1Full-wafer metrology up-samplingNOVA LTD·Filed 2023·Application pending·0 cites
- 0834US12057355B2Semiconductor device manufacture with in-line hotspot detectionNOVA LTD·Filed 2020·Granted Aug 6, 2024·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →