Inventor · disambiguated record
Michael Widmann
Also filed as: WIDMANN MICHAEL
3 granted patents·1 pending application·19 citations·filing 2009–2019
67Inventor score
Top patents by PatentIndex Score
4 records- 0182US8279402B2Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the sameSIX STEPHAN·Filed 2009·Granted Oct 2, 2012·11 cites·27 claims
- 0274US9604299B2Method and device for connecting an optical element to a frameZEISS CARL SMT GMBH·Filed 2014·Granted Mar 28, 2017·2 cites·22 claims
- 0370US8705006B2Method and device for connecting an optical element to a frameSCHOEPPACH ARMIN·Filed 2009·Granted Apr 22, 2014·6 cites·29 claims
- 0438US2020180374A1Coupling UnitGENTNER WOLFGANG·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →