Inventor · disambiguated record

Minghang Wu

Also filed as: WU MINGHANG

1 granted patent·1 pending application·0 citations·filing 2011–2015

13Inventor score

Technology areasH10P

Files withLAM RES CORP1 SHIH HONG1

Top patents by PatentIndex Score

2 records

0146US9054148B2Method for performing hot water seal on electrostatic chuckSHIH HONG·Filed 2011·Granted Jun 9, 2015·0 cites·12 claims
0241US2015235889A1System and method for performing hot water seal on electrostatic chuckLAM RES CORP·Filed 2015·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →