Inventor · disambiguated record
Motomu Kosuda
Also filed as: KOSUDA MOTOMU
6 granted patents·4 pending applications·31 citations·filing 2006–2014
79Inventor score
Top patents by PatentIndex Score
10 records- 0186US8088678B2Semiconductor manufacturing apparatus and methodKITANO NAOMU·Filed 2009·Granted Jan 3, 2012·15 cites·13 claims
- 0284US7857946B2Sputtering film forming method, electronic device manufacturing method, and sputtering systemCANON ANELVA CORP·Filed 2008·Granted Dec 28, 2010·7 cites·9 claims
- 0373US8415753B2Semiconductor device and method of manufacturing the sameNAKAGAWA TAKASHI·Filed 2010·Granted Apr 9, 2013·4 cites·13 claims
- 0470US10378100B2Sputtering apparatus and recording medium for recording control program thereofCANON ANELVA CORP·Filed 2014·Granted Aug 13, 2019·0 cites·15 claims
- 0570US7655549B2Method for depositing a metal gate on a high-k dielectric filmCANON ANELVA CORP·Filed 2006·Granted Feb 2, 2010·4 cites·20 claims
- 0666US2011042209A1Sputtering apparatus and recording medium for recording control program thereofCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0757US8026143B2Semiconductor element and manufacturing method thereofCANON ANELVA CORP·Filed 2007·Granted Sep 27, 2011·1 cites·7 claims
- 0850US2009178621A1Substrate treating system for depositing a metal gate on a high-k dielectric film and improving high-k dielectric film and metal gate interfaceCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0949US2009170300A1Semiconductor element and manufacturing method thereofCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 1034US2012199919A1Semiconductor device and method of manufacturing the sameNAKAGAWA TAKASHI·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →