Inventor · disambiguated record
Muneyuki Fukuda
Also filed as: FUKUDA MUNEYUKI
93 granted patents·10 pending applications·1,173 citations·filing 2001–2023
99Inventor score
Top patents by PatentIndex Score
103 records- 0199US6664552B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2001·Granted Dec 16, 2003·139 cites·2 claims
- 0298US11043359B2Charged particle beam apparatus and charged particle beam inspection systemHITACHI HIGH TECH CORP·Filed 2020·Granted Jun 22, 2021·14 cites·10 claims
- 0397US6781125B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2001·Granted Aug 24, 2004·114 cites·14 claims
- 0496US11398367B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2020·Granted Jul 26, 2022·4 cites·11 claims
- 0596US7326942B2Ion beam system and machining methodHITACHI HIGH TECH CORP·Filed 2005·Granted Feb 5, 2008·24 cites·16 claims
- 0696US7205560B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2005·Granted Apr 17, 2007·32 cites·27 claims
- 0796US7205554B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2005·Granted Apr 17, 2007·34 cites·5 claims
- 0896US6717156B2Beam as well as method and equipment for specimen fabricationHITACHI LTD·Filed 2002·Granted Apr 6, 2004·109 cites·19 claims
- 0995US7550750B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Jun 23, 2009·26 cites·32 claims
- 1095US7449690B2Inspection method and inspection apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 11, 2008·28 cites·20 claims
- 1195US6927391B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2004·Granted Aug 9, 2005·69 cites·4 claims
- 1295US6858851B2Apparatus for specimen fabrication and method for specimen fabricationHITACHI HIGH TECH CORP·Filed 2003·Granted Feb 22, 2005·57 cites·12 claims
- 1395US6838667B2Method and apparatus for charged particle beam microscopyHITACHI LTD·Filed 2001·Granted Jan 4, 2005·59 cites·17 claims
- 1494US10714304B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Jul 14, 2020·8 cites·12 claims
- 1594US7897936B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2007·Granted Mar 1, 2011·15 cites·15 claims
- 1694US7470918B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Dec 30, 2008·22 cites·15 claims
- 1794US7465945B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Dec 16, 2008·20 cites·7 claims
- 1892US10879037B2Charged particle beam device with distance setting between irradiation regions in a scan lineHITACHI HIGH TECH CORP·Filed 2016·Granted Dec 29, 2020·8 cites·13 claims
- 1992US8841612B2Charged particle beam microscopeFUKUDA MUNEYUKI·Filed 2011·Granted Sep 23, 2014·12 cites·5 claims
- 2092US7888639B2Method and apparatus for processing a micro sampleHITACHI LTD·Filed 2007·Granted Feb 15, 2011·14 cites·2 claims
- 2192US7462828B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 9, 2008·18 cites·30 claims
- 2292US6794663B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2003·Granted Sep 21, 2004·33 cites·9 claims
- 2391US7952083B2Ion beam system and machining methodHITACHI HIGH TECH CORP·Filed 2008·Granted May 31, 2011·11 cites·6 claims
- 2491US7368729B2Method, apparatus and system for specimen fabrication by using an ion beamHITACHI HIGH TECH CORP·Filed 2006·Granted May 6, 2008·12 cites·13 claims
- 2590US11398366B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2020·Granted Jul 26, 2022·2 cites·14 claims
- 2690US7268356B2Method and apparatus for specimen fabricationHITACHI LTD·Filed 2004·Granted Sep 11, 2007·28 cites·13 claims
- 2789US11355308B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Jun 7, 2022·2 cites·13 claims
- 2889US8222618B2Method and apparatus for processing a microsampleTOKUDA MITSUO·Filed 2011·Granted Jul 17, 2012·9 cites·18 claims
- 2989US8153969B2Inspection method and inspection system using charged particle beamFUKADA ATSUKO·Filed 2008·Granted Apr 10, 2012·16 cites·7 claims
- 3089US7482603B2Apparatus and method for specimen fabricationHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 27, 2009·10 cites·22 claims
- 3189US7453072B2Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment thereforHITACHI HIGH TECH CORP·Filed 2007·Granted Nov 18, 2008·7 cites·9 claims
- 3288US11749494B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2021·Granted Sep 5, 2023·1 cites·16 claims
- 3388US10037866B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted Jul 31, 2018·5 cites·14 claims
- 3488US8618520B2Method and apparatus for processing a micro sampleTOKUDA MITSUO·Filed 2012·Granted Dec 31, 2013·7 cites·24 claims
- 3588US7655907B2Charged particle beam apparatus and pattern measuring methodHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 2, 2010·12 cites·12 claims
- 3688US7557347B2Charged particle beam apparatus, scanning electron microscope, and sample observation method using the sameHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 7, 2009·11 cites·19 claims
- 3787US8389935B2Charged particle beam apparatus permitting high-resolution and high-contrast observationFUKUDA MUNEYUKI·Filed 2009·Granted Mar 5, 2013·7 cites·12 claims
- 3886US9892887B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted Feb 13, 2018·3 cites·7 claims
- 3986US7875849B2Electron beam apparatus and electron beam inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 25, 2011·7 cites·12 claims
- 4086US7095021B2Method, apparatus and system for specimen fabrication by using an ion beamHITACHI HIGH TECH CORP·Filed 2004·Granted Aug 22, 2006·19 cites·17 claims
- 4185US6627889B2Apparatus and method for observing sample using electron beamHITACHI LTD·Filed 2002·Granted Sep 30, 2003·21 cites·4 claims
- 4284US8766183B2Charged particle beam deviceFUKUDA MUNEYUKI·Filed 2009·Granted Jul 1, 2014·8 cites·17 claims
- 4384US8431915B2Charged particle beam apparatus permitting high resolution and high-contrast observationFUKUDA MUNEYUKI·Filed 2012·Granted Apr 30, 2013·4 cites·13 claims
- 4484US7372050B2Method of preventing charging, and apparatus for charged particle beam using the sameHITACHI LTD·Filed 2005·Granted May 13, 2008·5 cites·10 claims
- 4583US10340115B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2018·Granted Jul 2, 2019·2 cites·11 claims
- 4682US8431893B2Electron beam apparatus and electron beam inspection methodFUKUDA MUNEYUKI·Filed 2012·Granted Apr 30, 2013·4 cites·2 claims
- 4782US8026481B2Charged particle apparatus, scanning electron microscope, and sample inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 27, 2011·6 cites·7 claims
- 4881US8207498B2Electron beam apparatus and electron beam inspection methodFUKUDA MUNEYUKI·Filed 2011·Granted Jun 26, 2012·4 cites·2 claims
- 4981US7884325B2Electron beam measurement apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Feb 8, 2011·6 cites·12 claims
- 5080US11328897B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted May 10, 2022·1 cites·17 claims
Showing the top 50 of 103 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →