Inventor · disambiguated record
Neungho Shin
Also filed as: SHIN NEUNGHO
7 granted patents·2 pending applications·66 citations·filing 2003–2016
84Inventor score
Top patents by PatentIndex Score
9 records- 0186US7435685B2Method of forming a low-K dual damascene interconnect structureAPPLIED MATERIALS INC·Filed 2006·Granted Oct 14, 2008·13 cites·18 claims
- 0280US7132369B2Method of forming a low-K dual damascene interconnect structureAPPLIED MATERIALS INC·Filed 2003·Granted Nov 7, 2006·27 cites·34 claims
- 0373US8501283B2Methods for depositing bevel protective filmSHIN NEUNGHO·Filed 2010·Granted Aug 6, 2013·4 cites·19 claims
- 0472US7977123B2Arrangements and methods for improving bevel etch repeatability among substratesLAM RES CORP·Filed 2009·Granted Jul 12, 2011·4 cites·20 claims
- 0572US7256134B2Selective etching of carbon-doped low-k dielectricsAPPLIED MATERIALS INC·Filed 2003·Granted Aug 14, 2007·16 cites·18 claims
- 0668US10217610B2Arrangements for manipulating plasma confinement within a plasma processing system and methods thereofLAM RES CORP·Filed 2016·Granted Feb 26, 2019·1 cites·11 claims
- 0760US9275838B2Arrangements for manipulating plasma confinement within a plasma processing system and methods thereofJUCO ELLER Y·Filed 2009·Granted Mar 1, 2016·1 cites·16 claims
- 0844US2013312913A1Arrangement for depositing bevel protective filmSHIN NEUNGHO·Filed 2013·Application pending·0 cites
- 0942US2011259520A1Arrangements for improving bevel etch repeatability among substratesFISCHER ANDREAS·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →