Inventor · disambiguated record
Noburu Shimizu
Also filed as: SHIMIZU NOBURU
22 granted patents·2 pending applications·354 citations·filing 1984–2013
96Inventor score
Top patents by PatentIndex Score
24 records- 0192US8554356B2Processing end point detection method, polishing method, and polishing apparatusSHIMIZU NOBURU·Filed 2007·Granted Oct 8, 2013·25 cites·9 claims
- 0290US8388408B2Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection methodKOBAYASHI YOICHI·Filed 2009·Granted Mar 5, 2013·15 cites·10 claims
- 0388US8157616B2Polishing end point detection methodSHIMIZU NOBURU·Filed 2009·Granted Apr 17, 2012·15 cites·14 claims
- 0488US6595831B1Method for polishing workpieces using fixed abrasivesEBARA CORP·Filed 2000·Granted Jul 22, 2003·43 cites·24 claims
- 0584US5951368APolishing apparatusEBARA CORP·Filed 1997·Granted Sep 14, 1999·34 cites·49 claims
- 0677US6343978B1Method and apparatus for polishing workpieceEBARA CORP·Filed 2000·Granted Feb 5, 2002·20 cites·67 claims
- 0773US6413156B1Method and apparatus for polishing workpieceEBARA CORP·Filed 1999·Granted Jul 2, 2002·31 cites·41 claims
- 0870US7960188B2Polishing methodEBARA CORP·Filed 2009·Granted Jun 14, 2011·3 cites·4 claims
- 0969US8025759B2Polishing apparatus and polishing methodEBARA CORP·Filed 2004·Granted Sep 27, 2011·12 cites·19 claims
- 1068US5989107AMethod for polishing workpieces and apparatus thereforEBARA CORP·Filed 1997·Granted Nov 23, 1999·27 cites·22 claims
- 1166US7780503B2Polishing apparatus and polishing methodEBARA CORP·Filed 2008·Granted Aug 24, 2010·2 cites·11 claims
- 1265US10207390B2Processing end point detection method, polishing method, and polishing apparatusEBARA CORP·Filed 2013·Granted Feb 19, 2019·1 cites·12 claims
- 1365US5954570AConditioner for a polishing toolTOSHIBA KK·Filed 1996·Granted Sep 21, 1999·24 cites·25 claims
- 1464US4688989AGas rotary machineEBARA CORP·Filed 1984·Granted Aug 25, 1987·21 cites·7 claims
- 1563US7011569B2Method and apparatus for polishing workpieceEBARA CORP·Filed 2002·Granted Mar 14, 2006·6 cites·13 claims
- 1661US8398811B2Polishing apparatus and polishing methodSASAKI TATSUYA·Filed 2011·Granted Mar 19, 2013·1 cites·4 claims
- 1759US5643056ARevolving drum polishing apparatusEBARA CORP·Filed 1995·Granted Jul 1, 1997·26 cites·39 claims
- 1854US6148463ACleaning apparatusEBARA CORP·Filed 1998·Granted Nov 21, 2000·14 cites·9 claims
- 1949US6183342B1Polishing apparatusEBARA CORP·Filed 1999·Granted Feb 6, 2001·10 cites·11 claims
- 2047US5827115APolishing apparatusEBARA CORP·Filed 1996·Granted Oct 27, 1998·15 cites·6 claims
- 2145US2007243797A1Polishing method and polishing apparatusFUKUNAGA AKIRA·Filed 2007·Application pending·0 cites
- 2245US2005090188A1Method and apparatus for polishing workpieceFiled 2004·Application pending·0 cites
- 2337US5314320AScrew vacuum pump with a reduced starting loadEBARA CORP·Filed 1992·Granted May 24, 1994·5 cites·5 claims
- 2435US5374170AScrew vacuum pumpEBARA CORP·Filed 1992·Granted Dec 20, 1994·4 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →