Inventor · disambiguated record
Norman L. Turner
Also filed as: TURNER NORMAN · TURNER NORMAN L
35 granted patents·3 pending applications·2,290 citations·filing 1980–2008
98Inventor score
Files withVARIAN ASSOCIATES12APPLIED MATERIALS INC7PURSER KENNETH H6APPLIED KOMATSU TECHNOLOGY INC5VARIAN SEMICONDUCTOR EQUIPMENT3
Top patents by PatentIndex Score
38 records- 0198US5512320AVacuum processing apparatus having improved throughputAPPLIED MATERIALS INC·Filed 1994·Granted Apr 30, 1996·261 cites·18 claims
- 0297US6235634B1Modular substrate processing systemAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted May 22, 2001·420 cites·83 claims
- 0396US4283631ABean scanning and method of use for ion implantationVARIAN ASSOCIATES·Filed 1980·Granted Aug 11, 1981·64 cites·8 claims
- 0495US7301156B2Controlling the characteristics of implanter ion-beamsPURSER KENNETH H·Filed 2005·Granted Nov 27, 2007·25 cites·19 claims
- 0595US6933507B2Controlling the characteristics of implanter ion-beamsFiled 2003·Granted Aug 23, 2005·43 cites·14 claims
- 0695US5674786AMethod of heating and cooling large area glass substratesAPPLIED MATERIALS INC·Filed 1995·Granted Oct 7, 1997·220 cites·5 claims
- 0794US6688375B1Vacuum processing system having improved substrate heating and coolingAPPLIED MATERIALS INC·Filed 1997·Granted Feb 10, 2004·266 cites·16 claims
- 0893US4383180AParticle beam acceleratorVARIAN ASSOCIATES·Filed 1981·Granted May 10, 1983·62 cites·8 claims
- 0992US5607009AMethod of heating and cooling large area substrates and apparatus thereforAPPLIED MATERIALS INC·Filed 1993·Granted Mar 4, 1997·138 cites·12 claims
- 1092US4421988ABeam scanning method and apparatus for ion implantationVARIAN ASSOCIATES·Filed 1982·Granted Dec 20, 1983·59 cites·19 claims
- 1192US4367411AUnitary electromagnet for double deflection scanning of charged particle beamVARIAN ASSOCIATES·Filed 1980·Granted Jan 4, 1983·49 cites·9 claims
- 1290US6746198B2Substrate transfer shuttleAPPLIED MATERIALS INC·Filed 2001·Granted Jun 8, 2004·42 cites·21 claims
- 1388US7888660B2Controlling the characteristics of implanter ion-beamsPURSER KENNETH H·Filed 2006·Granted Feb 15, 2011·8 cites·32 claims
- 1488US7351984B2Controlling the characteristics of implanter ion-beamsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Apr 1, 2008·7 cites·11 claims
- 1588US6517303B1Substrate transfer shuttleAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Feb 11, 2003·79 cites·38 claims
- 1688US4463255AApparatus for enhanced neutralization of positively charged ion beamVARIAN ASSOCIATES·Filed 1982·Granted Jul 31, 1984·40 cites·17 claims
- 1787US6881305B2Heated and cooled vacuum chamber shieldAPPLIED MATERIALS INC·Filed 2001·Granted Apr 19, 2005·39 cites·6 claims
- 1887US4433247ABeam sharing method and apparatus for ion implantationVARIAN ASSOCIATES·Filed 1981·Granted Feb 21, 1984·28 cites·5 claims
- 1983US4567938AMethod and apparatus for controlling thermal transfer in a cyclic vacuum processing systemVARIAN ASSOCIATES·Filed 1985·Granted Feb 4, 1986·63 cites·3 claims
- 2082US7414249B2Broad energy-range ribbon ion beam collimation using a variable-gradient dipolePURSER KENNETH H·Filed 2005·Granted Aug 19, 2008·5 cites·20 claims
- 2182US5447570APurge gas in wafer coating area selectionGENUS INC·Filed 1992·Granted Sep 5, 1995·88 cites·33 claims
- 2282US4535834AMethod and apparatus for controlling thermal transfer in a cyclic vacuum processing systemVARIAN ASSOCIATES·Filed 1984·Granted Aug 20, 1985·50 cites·9 claims
- 2381US4680474AMethod and apparatus for improved ion dose accuracyVARIAN ASSOCIATES·Filed 1985·Granted Jul 14, 1987·26 cites·8 claims
- 2477US4745287AIon implantation with variable implant angleIONEX HEI·Filed 1986·Granted May 17, 1988·53 cites·2 claims
- 2577US4412153ADual filament ion sourceVARIAN ASSOCIATES·Filed 1981·Granted Oct 25, 1983·23 cites·6 claims
- 2676US7439526B2Beam neutralization in low-energy high-current ribbon-beam implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Oct 21, 2008·3 cites·42 claims
- 2775US7897943B2Controlling the characteristics of implanter ion-beamsPURSER KENNETH H·Filed 2006·Granted Mar 1, 2011·2 cites·31 claims
- 2873US7829866B2Broad energy-range ribbon ion beam collimation using a variable-gradient dipolePURSER KENNETH H·Filed 2008·Granted Nov 9, 2010·2 cites·37 claims
- 2971US6432203B1Heated and cooled vacuum chamber shieldAPPLIED KOMATSU TECHNOLOGY INC·Filed 1998·Granted Aug 13, 2002·32 cites·12 claims
- 3066US4775796ATreating workpieces with beamsPURSER KENNETH H·Filed 1987·Granted Oct 4, 1988·13 cites·3 claims
- 3164US5753133AMethod and apparatus for etching film layers on large substratesAPPLIED KOMATSU TECHNOLOGY INC·Filed 1994·Granted May 19, 1998·36 cites·35 claims
- 3264US4717829APlaten and beam setup flag assembly for ion implanterVARIAN ASSOCIATES·Filed 1987·Granted Jan 5, 1988·12 cites·8 claims
- 3360US7365340B2Resonance method for production of intense low-impurity ion beams of atoms and moleculesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 29, 2008·2 cites·31 claims
- 3454US4475045ARapid pumpdown for high vacuum processingVARIAN ASSOCIATES·Filed 1983·Granted Oct 2, 1984·7 cites·7 claims
- 3553US5509464AMethod and apparatus for cooling rectangular substratesAPPLIED MATERIALS INC·Filed 1993·Granted Apr 23, 1996·23 cites·20 claims
- 3647US2005150757A1Heated and cooled vacuum chamber shieldAPPLIED KOMATSU TECHNOLOGY INC·Filed 2005·Application pending·0 cites
- 3740US2004149926A1Emittance measuring device for ion beamsFiled 2003·Application pending·0 cites
- 3838US2003197133A1Method and apparatus for scanning a workpiece in a vacuum chamberFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →