Inventor · disambiguated record
Paul D. Butterfield
Also filed as: BUTTERFIELD PAUL · BUTTERFIELD PAUL D
51 granted patents·25 pending applications·627 citations·filing 1994–2024
98Inventor score
Files withAPPLIED MATERIALS INC65BUTTERFIELD PAUL D2CHANG SHOU-SUNG2MANENS ANTOINE P2BUTTERFIELD PAUL1
Top patents by PatentIndex Score
76 records- 0197US11446711B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2020·Granted Sep 20, 2022·8 cites·11 claims
- 0296US7422516B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2007·Granted Sep 9, 2008·42 cites·18 claims
- 0396US7375449B2Optimized modular electrical machine using permanent magnetsBUTTERFIELD PAUL D·Filed 2006·Granted May 20, 2008·78 cites·20 claims
- 0496US7278911B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2005·Granted Oct 9, 2007·33 cites·18 claims
- 0595US11633833B2Use of steam for pre-heating of CMP componentsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 25, 2023·3 cites·20 claims
- 0695US6962524B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted Nov 8, 2005·80 cites·32 claims
- 0794US10562147B2Polishing system with annular platen or polishing pad for substrate monitoringAPPLIED MATERIALS INC·Filed 2017·Granted Feb 18, 2020·4 cites·11 claims
- 0893US7182680B2Apparatus for conditioning processing padsAPPLIED MATERIALS INC·Filed 2005·Granted Feb 27, 2007·15 cites·1 claims
- 0992US6841057B2Method and apparatus for substrate polishingAPPLIED MATERIALS INC·Filed 2002·Granted Jan 11, 2005·21 cites·38 claims
- 1091US6991528B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted Jan 31, 2006·45 cites·27 claims
- 1190US6988942B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2004·Granted Jan 24, 2006·41 cites·18 claims
- 1288US7207878B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2005·Granted Apr 24, 2007·11 cites·19 claims
- 1386US7066800B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2001·Granted Jun 27, 2006·31 cites·67 claims
- 1485US12459011B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2024·Granted Nov 4, 2025·0 cites·14 claims
- 1585US9687960B2Polishing pad cleaning systems employing fluid outlets oriented to direct fluid under spray bodies and towards inlet ports, and related methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jun 27, 2017·5 cites·20 claims
- 1685US9061394B2Systems and methods for substrate polishing end point detection using improved friction measurementCHANG SHOU-SUNG·Filed 2012·Granted Jun 23, 2015·5 cites·11 claims
- 1785US6884153B2Apparatus for electrochemical processingAPPLIED MATERIALS INC·Filed 2003·Granted Apr 26, 2005·30 cites·37 claims
- 1884US9358658B2Polishing system with front side pressure controlAPPLIED MATERIALS INC·Filed 2014·Granted Jun 7, 2016·4 cites·17 claims
- 1983US11077536B2Slurry distribution device for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2017·Granted Aug 3, 2021·2 cites·8 claims
- 2082US10967483B2Slurry distribution device for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2017·Granted Apr 6, 2021·2 cites·17 claims
- 2182US7137879B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2006·Granted Nov 21, 2006·7 cites·20 claims
- 2281US7160432B2Method and composition for polishing a substrateAPPLIED MATERIALS INC·Filed 2003·Granted Jan 9, 2007·21 cites·34 claims
- 2381US2023415297A1Control of steam generation for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2480US11986926B2Slurry distribution device for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Granted May 21, 2024·0 cites·18 claims
- 2580US8142260B2Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing padsKOLLATA EASHWER·Filed 2008·Granted Mar 27, 2012·10 cites·20 claims
- 2679US11780046B2Polishing system with annular platen or polishing padAPPLIED MATERIALS INC·Filed 2022·Granted Oct 10, 2023·0 cites·16 claims
- 2779US10076817B2Orbital polishing with small padAPPLIED MATERIALS INC·Filed 2014·Granted Sep 18, 2018·3 cites·17 claims
- 2879US7569134B2Contacts for electrochemical processingAPPLIED MATERIALS INC·Filed 2006·Granted Aug 4, 2009·5 cites·7 claims
- 2978US12030093B2Steam treatment stations for chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2022·Granted Jul 9, 2024·0 cites·15 claims
- 3078US9452506B2Vacuum cleaning systems for polishing pads, and related methodsAPPLIED MATERIALS INC·Filed 2014·Granted Sep 27, 2016·3 cites·20 claims
- 3177US9308623B2Multi-disk chemical mechanical polishing pad conditioners and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Apr 12, 2016·3 cites·15 claims
- 3276US11511388B2Polishing system with support post and annular platen or polishing padAPPLIED MATERIALS INC·Filed 2019·Granted Nov 29, 2022·0 cites·13 claims
- 3376US7666061B2Method for conditioning processing padsAPPLIED MATERIALS INC·Filed 2007·Granted Feb 23, 2010·4 cites·7 claims
- 3475US7125477B2Contacts for electrochemical processingAPPLIED MATERIALS INC·Filed 2002·Granted Oct 24, 2006·14 cites·67 claims
- 3575US2023256562A1Use of steam for pre-heating of cmp componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3674US11806835B2Slurry distribution device for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2021·Granted Nov 7, 2023·0 cites·20 claims
- 3773US9862070B2Systems and methods for substrate polishing end point detection using improved friction measurementCHANG SHOU-SUNG·Filed 2012·Granted Jan 9, 2018·2 cites·14 claims
- 3873US2021331288A1Slurry distribution device for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 3972US11833637B2Control of steam generation for chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
- 4071US7374644B2Conductive polishing article for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2003·Granted May 20, 2008·13 cites·58 claims
- 4170US7608173B2Biased retaining ringAPPLIED MATERIALS INC·Filed 2004·Granted Oct 27, 2009·12 cites·23 claims
- 4270US6645050B1Multimode substrate carrierAPPLIED MATERIALS INC·Filed 2000·Granted Nov 11, 2003·12 cites·19 claims
- 4369US6977036B2Method and apparatus for substrate polishingAPPLIED MATERIALS INC·Filed 2004·Granted Dec 20, 2005·6 cites·35 claims
- 4469US2023249225A1Steam cleaning of cmp componentsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4568US2009036032A1Temperature control for ecmp processHU YONGQI·Filed 2008·Application pending·0 cites
- 4666US7344432B2Conductive pad with ion exchange membrane for electrochemical mechanical polishingAPPLIED MATERIALS INC·Filed 2006·Granted Mar 18, 2008·3 cites·30 claims
- 4765US12392427B2Insulated fluid lines in chemical mechanical polishingAPPLIED MATERIALS INC·Filed 2022·Granted Aug 19, 2025·0 cites·14 claims
- 4864US11628478B2Steam cleaning of CMP componentsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 18, 2023·0 cites·10 claims
- 4964US6679755B1Chemical mechanical planarization systemAPPLIED MATERIALS INC·Filed 2000·Granted Jan 20, 2004·9 cites·25 claims
- 5062US9808906B2Polishing system with front side pressure controlAPPLIED MATERIALS INC·Filed 2016·Granted Nov 7, 2017·0 cites·9 claims
Showing the top 50 of 76 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Paul D. Butterfield files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →