Inventor · disambiguated record
Paulus Martinus Maria Liebregts
Also filed as: LIEBREGTS PAULUS M M · LIEBREGTS PAULUS MARTINUS MARI · LIEBREGTS PAULUS MARTINUS MARIA
35 granted patents·2 pending applications·142 citations·filing 1990–2019
97Inventor score
Files withASML NETHERLANDS BV21STREEFKERK BOB2BERKVENS PAUL PETRUS JOANNES1CORTIE ROGIER HENDRIKUS MAGDALENA1DE GRAAF ROELOF FREDERIK1
Top patents by PatentIndex Score
37 records- 0192US9256136B2Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supplyCORTIE ROGIER HENDRIKUS MAGDALENA·Filed 2011·Granted Feb 9, 2016·7 cites·21 claims
- 0290US9846372B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 19, 2017·3 cites·20 claims
- 0390US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 0488US8248577B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2005·Granted Aug 21, 2012·9 cites·28 claims
- 0587US7561250B2Lithographic apparatus having parts with a coated film adhered theretoASML NETHERLANDS BV·Filed 2007·Granted Jul 14, 2009·9 cites·36 claims
- 0686US8259283B2Immersion lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Sep 4, 2012·10 cites·24 claims
- 0783US10620544B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 0883US8823919B2Lithographic apparatus, removable member and device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2010·Granted Sep 2, 2014·5 cites·20 claims
- 0981US8659741B2Lithographic apparatus, removable member and device manufacturing methodDE GRAAF ROELOF FREDERIK·Filed 2010·Granted Feb 25, 2014·4 cites·20 claims
- 1081US8218126B2Lithographic apparatus and device manufacturing methodSTEFFENS KOEN·Filed 2008·Granted Jul 10, 2012·7 cites·32 claims
- 1180US6870601B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Mar 22, 2005·24 cites·8 claims
- 1278US8405817B2Lithographic apparatus, a method of controlling the apparatus and a device manufacturing methodSTAVENGA MARCO KOERT·Filed 2010·Granted Mar 26, 2013·4 cites·20 claims
- 1376US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 1475US7924403B2Lithographic apparatus and device and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 12, 2011·3 cites·25 claims
- 1572US9477153B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Oct 25, 2016·1 cites·20 claims
- 1670US8860924B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2012·Granted Oct 14, 2014·1 cites·20 claims
- 1768US7253880B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 7, 2007·9 cites·34 claims
- 1864US10209624B2Fluid handling structure, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Feb 19, 2019·0 cites·20 claims
- 1961US10488759B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 26, 2019·0 cites·77 claims
- 2060US10268127B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·0 cites·20 claims
- 2159US9645506B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 2259US9036127B2Lithographic apparatusVAN DEN DUNGEN CLEMENS JOHANNES GERARDUS·Filed 2009·Granted May 19, 2015·1 cites·20 claims
- 2358US10649341B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted May 12, 2020·0 cites·22 claims
- 2458US10451973B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 22, 2019·0 cites·74 claims
- 2556US7202934B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·4 cites·12 claims
- 2655US9465302B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Oct 11, 2016·0 cites·20 claims
- 2755US8681308B2Lithographic apparatus and device manufacturing methodBERKVENS PAUL PETRUS JOANNES·Filed 2007·Granted Mar 25, 2014·1 cites·22 claims
- 2855US7274431B2Lithographic projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 25, 2007·4 cites·18 claims
- 2955US7126664B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·4 cites·29 claims
- 3053US5179897APattern repeat presetting of a multi-color rotary screen printing machineSTORK BRABANT BV·Filed 1990·Granted Jan 19, 1993·9 cites·5 claims
- 3149US8634058B2Lithographic apparatus and device manufacturing methodKUIT JAN-JAAP·Filed 2009·Granted Jan 21, 2014·0 cites·19 claims
- 3249US7361911B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 22, 2008·2 cites·22 claims
- 3347US2011273679A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 3446US8780321B2Lithographic apparatus and device manufacturing methodKNAAPEN THIJS EGIDIUS JOHANNES·Filed 2009·Granted Jul 15, 2014·0 cites·21 claims
- 3545US8675173B2Lithographic apparatus and device manufacturing methodLIEBREGTS PAULUS MARTINUS MARIA·Filed 2011·Granted Mar 18, 2014·0 cites·20 claims
- 3644US7078708B2Lithographic apparatus and method of manufacturing a device and method of performing maintenanceASML NETHERLANDS BV·Filed 2003·Granted Jul 18, 2006·3 cites·14 claims
- 3741US2005068511A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →