Inventor · disambiguated record
Qibiao Chen
Also filed as: CHEN QIBIAO
5 granted patents·180 citations·filing 2007–2019
79Inventor score
Top patents by PatentIndex Score
5 records- 0195US7705331B1Methods and systems for providing illumination of a specimen for a process performed on the specimenKLA TENCOR TECH CORP·Filed 2007·Granted Apr 27, 2010·157 cites·116 claims
- 0286US9625726B2Lens array-based illumination for wafer inspectionKLA TENCOR CORP·Filed 2015·Granted Apr 18, 2017·4 cites·26 claims
- 0384US7654715B1System and method for illuminating a specimen with uniform angular and spatial distributionKLA TENCOR TECH CORP·Filed 2007·Granted Feb 2, 2010·16 cites·22 claims
- 0473US10811158B1Multi-mirror laser sustained plasma light sourceKLA CORP·Filed 2019·Granted Oct 20, 2020·1 cites·24 claims
- 0573US9128064B2Super resolution inspection systemKLA TENCOR CORP·Filed 2013·Granted Sep 8, 2015·2 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →