Inventor · disambiguated record
Raphael Casaes
Also filed as: CASAES RAPHAEL
9 granted patents·4 pending applications·26 citations·filing 2005–2024
84Inventor score
Top patents by PatentIndex Score
13 records- 0191US10658222B2Moveable edge coupling ring for edge process control during semiconductor wafer processingLAM RES CORP·Filed 2015·Granted May 19, 2020·7 cites·18 claims
- 0285US7638004B1Method for cleaning microwave applicator tubeLAM RES CORP·Filed 2006·Granted Dec 29, 2009·8 cites·28 claims
- 0382US2024355667A1Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0479US11798789B2Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering featuresLAM RES CORP·Filed 2018·Granted Oct 24, 2023·3 cites·41 claims
- 0579US7976641B1Extending storage time of removed plasma chamber components prior to cleaning thereofLAM RES CORP·Filed 2005·Granted Jul 12, 2011·3 cites·20 claims
- 0675US12500068B2Edge rings providing kinematic coupling and corresponding substrate processing systemsLAM RES CORP·Filed 2023·Granted Dec 16, 2025·0 cites·51 claims
- 0772US12027410B2Edge ring arrangement with moveable edge ringsLAM RES CORP·Filed 2021·Granted Jul 2, 2024·0 cites·18 claims
- 0871US8525139B2Method and apparatus of halogen removalSINGH HARMEET·Filed 2010·Granted Sep 3, 2013·3 cites·20 claims
- 0970US9029267B2Controlling temperature of a faraday shieldLAM RES CORP·Filed 2013·Granted May 12, 2015·2 cites·20 claims
- 1062US8216388B2Extending storage time of removed plasma chamber components prior to cleaning thereofSHIH HONG·Filed 2011·Granted Jul 10, 2012·0 cites·20 claims
- 1159US2019013232A1Moveable edge ring designLAM RES CORP·Filed 2018·Application pending·0 cites
- 1253US2024355597A1Ion beam etch system and methodLAM RES CORP·Filed 2022·Application pending·0 cites
- 1342US2013102156A1Components of plasma processing chambers having textured plasma resistant coatingsLAM RES CORP·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →