Inventor · disambiguated record
Ramkishan Rao Lingampalli
Also filed as: LINGAMPALLI RAMKISHAN · LINGAMPALLI RAMKISHAN RAO
12 granted patents·6 pending applications·576 citations·filing 1995–2022
92Inventor score
Top patents by PatentIndex Score
18 records- 0198US9449795B2Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactorNOVELLUS SYSTEMS INC·Filed 2013·Granted Sep 20, 2016·398 cites·22 claims
- 0297US10147610B1Substrate pedestal module including metallized ceramic tubes for RF and gas deliveryLAM RES CORP·Filed 2017·Granted Dec 4, 2018·27 cites·20 claims
- 0396US10400333B2Hybrid ceramic showerheadNOVELLUS SYSTEMS INC·Filed 2016·Granted Sep 3, 2019·7 cites·20 claims
- 0496US9441296B2Hybrid ceramic showerheadSABRI MOHAMED·Filed 2012·Granted Sep 13, 2016·18 cites·24 claims
- 0595US10431467B2Module including metallized ceramic tubes for RF and gas deliveryLAM RES CORP·Filed 2018·Granted Oct 1, 2019·14 cites·11 claims
- 0695US10217614B2Ceramic gas distribution plate with embedded electrodeLAM RES CORP·Filed 2015·Granted Feb 26, 2019·32 cites·18 claims
- 0793US9719169B2System and apparatus for flowable deposition in semiconductor fabricationMOHN JONATHAN D·Filed 2011·Granted Aug 1, 2017·31 cites·18 claims
- 0880US6632325B2Article for use in a semiconductor processing chamber and method of fabricating sameAPPLIED MATERIALS INC·Filed 2002·Granted Oct 14, 2003·24 cites·10 claims
- 0964US10964545B2Apparatus including metallized-ceramic tubes for radio-frequency and gas deliveryLAM RES CORP·Filed 2019·Granted Mar 30, 2021·0 cites·20 claims
- 1061US2025146132A1Active temperature control of showerheads for high temperature processesLAM RES CORP·Filed 2022·Application pending·0 cites
- 1160US6175485B1Electrostatic chuck and method for fabricating the sameAPPLIED MATERIALS INC·Filed 1996·Granted Jan 16, 2001·18 cites·45 claims
- 1255US2023073259A1High temperature substrate support with heat spreaderLAM RES CORP·Filed 2021·Application pending·0 cites
- 1353US2025132132A1Electrode-dielectric nozzle for plasma processingLAM RES CORP·Filed 2022·Application pending·0 cites
- 1449US12368029B2Lamellar ceramic structureLAM RES CORP·Filed 2020·Granted Jul 22, 2025·0 cites·21 claims
- 1547US5785878ARF antenna having high temperature, oxidation resistant coatingAPPLIED MATERIALS INC·Filed 1995·Granted Jul 28, 1998·7 cites·17 claims
- 1647US2024023204A1Coated conductor for heater embedded in ceramicLAM RES CORP·Filed 2021·Application pending·0 cites
- 1744US2024128062A1Monolithic anisotropic substrate supportsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1836US2019032211A1Monolithic ceramic gas distribution plateLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →