Inventor · disambiguated record
Ralf Scharnweber
Also filed as: SCHARNWEBER RALF
10 granted patents·1 pending application·35 citations·filing 2005–2015
87Inventor score
Top patents by PatentIndex Score
11 records- 0192US8587767B2Illumination optics for EUV microlithography and related system and apparatusFIOLKA DAMIAN·Filed 2010·Granted Nov 19, 2013·12 cites·22 claims
- 0281US7561253B2Method for a multiple exposure, microlithography projection exposure installation and a projection systemZEISS CARL SMT AG·Filed 2005·Granted Jul 14, 2009·5 cites·18 claims
- 0380US8634060B2Method for a multiple exposure, microlithography projection exposure installation and a projection systemSCHARNWEBER RALF·Filed 2010·Granted Jan 21, 2014·4 cites·24 claims
- 0477US7880969B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2008·Granted Feb 1, 2011·4 cites·20 claims
- 0571US7875418B2Method for a multiple exposure, microlithography projection exposure installation and a projection systemZEISS CARL SMT AG·Filed 2008·Granted Jan 25, 2011·2 cites·9 claims
- 0669US9217930B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Dec 22, 2015·1 cites·25 claims
- 0769US8520307B2Optical integrator for an illumination system of a microlithographic projection exposure apparatusWOLF OLIVER·Filed 2010·Granted Aug 27, 2013·4 cites·48 claims
- 0868US8395756B2Illumination system for a microlithographic projection exposure apparatusWANGLER JOHANNES·Filed 2008·Granted Mar 12, 2013·2 cites·49 claims
- 0965US9946161B2Optical system for a microlithographic projection exposure apparatus and microlithographic exposure methodZEISS CARL SMT GMBH·Filed 2012·Granted Apr 17, 2018·1 cites·27 claims
- 1056US9575414B2Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2015·Granted Feb 21, 2017·0 cites·22 claims
- 1140US2006055909A1Illumination system for a microlithographic projection exposure apparatusZEISS CARL SMT AG·Filed 2005·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Ralf Scharnweber files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →