Inventor · disambiguated record
Riki Ogawa
Also filed as: OGAWA RIKI
64 granted patents·11 pending applications·132 citations·filing 2001–2023
98Inventor score
Top patents by PatentIndex Score
75 records- 0193US9575010B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Feb 21, 2017·6 cites·20 claims
- 0292US11385192B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Jul 12, 2022·2 cites·18 claims
- 0390US7345755B2Defect inspecting apparatus and defect inspection methodTOSHIBA KK·Filed 2005·Granted Mar 18, 2008·12 cites·24 claims
- 0487US9194817B2Defect detection methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Nov 24, 2015·6 cites·12 claims
- 0587US7379176B2Mask defect inspection apparatusTOPCON CORP·Filed 2005·Granted May 27, 2008·8 cites·17 claims
- 0686US11004193B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted May 11, 2021·2 cites·12 claims
- 0785US10734190B2Multiple electron beam irradiation apparatus, multiple electron beam inspection apparatus and multiple electron beam irradiation methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Aug 4, 2020·3 cites·10 claims
- 0884US9804103B2Inspection method, template substrate, and focus offset methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Oct 31, 2017·4 cites·13 claims
- 0984US9423356B2Illumination apparatus and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Aug 23, 2016·4 cites·13 claims
- 1084US7508526B2Defect inspecting apparatusTOSHIBA KK·Filed 2005·Granted Mar 24, 2009·7 cites·10 claims
- 1181US8072592B2Reticle defect inspection apparatus and reticle defect inspection methodWATANABE TOSHIYUKI·Filed 2011·Granted Dec 6, 2011·3 cites·5 claims
- 1280US11101103B2Multiple electron beam inspection apparatus and multiple electron beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted Aug 24, 2021·1 cites·10 claims
- 1380US10712295B2Electron beam inspection apparatus and electron beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Jul 14, 2020·1 cites·20 claims
- 1480US7911599B2Reticle defect inspection apparatus and reticle defect inspection methodTOSHIBA KK·Filed 2008·Granted Mar 22, 2011·5 cites·4 claims
- 1579US10036714B2Image capturing device and inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Jul 31, 2018·2 cites·11 claims
- 1678US10197507B2Inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Feb 5, 2019·3 cites·9 claims
- 1778US10041892B2Charged particle beam inspection apparatus and charged particle beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Aug 7, 2018·2 cites·10 claims
- 1878US7123345B2Automatic focusing apparatusTOSHIBA KK·Filed 2004·Granted Oct 17, 2006·16 cites·20 claims
- 1976US9086388B2Pattern evaluation method and apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jul 21, 2015·2 cites·11 claims
- 2075US8767200B2Luminous flux branching element and mask defect inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jul 1, 2014·2 cites·8 claims
- 2174US10775326B2Electron beam inspection apparatus and electron beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Sep 15, 2020·1 cites·11 claims
- 2274US10768126B2Multiple charged particle beam inspection apparatus and multiple charged particle beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Sep 8, 2020·1 cites·10 claims
- 2374US10401299B2Image capturing apparatus and inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Sep 3, 2019·2 cites·20 claims
- 2473US10984978B2Multiple electron beam inspection apparatus and multiple electron beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2019·Granted Apr 20, 2021·1 cites·15 claims
- 2573US9683947B2Defect inspection deviceNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jun 20, 2017·1 cites·16 claims
- 2671US9846928B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Dec 19, 2017·2 cites·3 claims
- 2771US9207189B2Sample support apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Dec 8, 2015·1 cites·10 claims
- 2871US7551273B2Mask defect inspection apparatusTOPCON CORP·Filed 2008·Granted Jun 23, 2009·2 cites·17 claims
- 2969US9557277B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jan 31, 2017·1 cites·9 claims
- 3069US9410899B2Illumination apparatus and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Aug 9, 2016·1 cites·5 claims
- 3169US7894051B2Reticle defect inspection apparatus and reticle defect inspection methodTOSHIBA KK·Filed 2008·Granted Feb 22, 2011·2 cites·10 claims
- 3268US10846846B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Nov 24, 2020·1 cites·12 claims
- 3368US8004655B2Automatic focus adjusting mechanism and optical image acquisition apparatusTOSHIBA KK·Filed 2010·Granted Aug 23, 2011·2 cites·6 claims
- 3467US7491959B2Defect inspection apparatusTOSHIBA KK·Filed 2006·Granted Feb 17, 2009·2 cites·12 claims
- 3566US12265043B2Inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2022·Granted Apr 1, 2025·0 cites·9 claims
- 3666US7495779B2Level detection apparatusADVANCED MASK INSPECTION TECH·Filed 2008·Granted Feb 24, 2009·1 cites·10 claims
- 3766US2024175829A1Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 3865US10359370B2Template substrate for use in adjusting focus offset for defect detectionNUFLARE TECHNOLOGY INC·Filed 2017·Granted Jul 23, 2019·0 cites·17 claims
- 3965US10222341B2Focusing apparatus, focusing method, and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Mar 5, 2019·1 cites·10 claims
- 4062US7388660B2Light amount measurement device and light amount measurement methodADVANCED MASK INSPECTION TECH·Filed 2006·Granted Jun 17, 2008·3 cites·10 claims
- 4162US6909501B2Pattern inspection apparatus and pattern inspection methodTOSHIBA KK·Filed 2001·Granted Jun 21, 2005·10 cites·10 claims
- 4262US2018335394A1Image capturing device and inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2018·Application pending·0 cites
- 4360US9157870B2Pattern test apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 13, 2015·0 cites·8 claims
- 4458US10410335B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2018·Granted Sep 10, 2019·0 cites·5 claims
- 4558US9036143B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted May 19, 2015·1 cites·8 claims
- 4657US10984525B2Pattern inspection method and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2019·Granted Apr 20, 2021·0 cites·15 claims
- 4756US10007980B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Jun 26, 2018·0 cites·4 claims
- 4854US8199403B2Light polarization control using serial combination of surface-segmented half wavelength platesOGAWA RIKI·Filed 2009·Granted Jun 12, 2012·1 cites·20 claims
- 4954US2015377800A1Pattern test apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Application pending·0 cites
- 5051US9213001B2Focal position adjustment method and inspection methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Dec 15, 2015·0 cites·10 claims
Showing the top 50 of 75 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Riki Ogawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →