Inventor · disambiguated record
Robert Rash
Also filed as: RASH ROBERT · RASH ROBERT CHARLES
49 granted patents·15 pending applications·447 citations·filing 2004–2025
98Inventor score
Top patents by PatentIndex Score
64 records- 0198US9834852B2Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplatingNOVELLUS SYSTEMS INC·Filed 2016·Granted Dec 5, 2017·13 cites·20 claims
- 0297US9523155B2Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplatingNOVELLUS SYSTEMS INC·Filed 2013·Granted Dec 20, 2016·15 cites·22 claims
- 0397US9394620B2Control of electrolyte hydrodynamics for efficient mass transfer during electroplatingNOVELLUS SYSTEMS INC·Filed 2014·Granted Jul 19, 2016·13 cites·16 claims
- 0497US8377268B2Electroplating cup assemblyNOVELLUS SYSTEMS INC·Filed 2011·Granted Feb 19, 2013·19 cites·23 claims
- 0597US7985325B2Closed contact electroplating cup assemblyNOVELLUS SYSTEMS INC·Filed 2007·Granted Jul 26, 2011·36 cites·24 claims
- 0697US7935231B2Rapidly cleanable electroplating cup assemblyNOVELLUS SYSTEMS INC·Filed 2007·Granted May 3, 2011·36 cites·24 claims
- 0796US10094034B2Edge flow element for electroplating apparatusLAM RES CORP·Filed 2015·Granted Oct 9, 2018·11 cites·14 claims
- 0896US10066311B2Multi-contact lipseals and associated electroplating methodsLAM RES CORP·Filed 2016·Granted Sep 4, 2018·9 cites·19 claims
- 0996US9567685B2Apparatus and method for dynamic control of plated uniformity with the use of remote electric currentLAM RES CORP·Filed 2015·Granted Feb 14, 2017·11 cites·18 claims
- 1095US10662545B2Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplatingNOVELLUS SYSTEMS INC·Filed 2017·Granted May 26, 2020·4 cites·22 claims
- 1195US9752248B2Methods and apparatuses for dynamically tunable wafer-edge electroplatingLAM RES CORP·Filed 2014·Granted Sep 5, 2017·18 cites·20 claims
- 1295US8858774B2Electroplating apparatus for tailored uniformity profileMAYER STEVEN T·Filed 2012·Granted Oct 14, 2014·14 cites·15 claims
- 1395US8603305B2Electrolyte loop with pressure regulation for separated anode chamber of electroplating systemRASH ROBERT·Filed 2011·Granted Dec 10, 2013·27 cites·34 claims
- 1494US9624592B2Cross flow manifold for electroplating apparatusNOVELLUS SYSTEMS INC·Filed 2013·Granted Apr 18, 2017·18 cites·24 claims
- 1594US9260793B2Electroplating apparatus for tailored uniformity profileNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 16, 2016·10 cites·17 claims
- 1693US10208395B2Bubble and foam solutions using a completely immersed air-free feedback flow control valveLAM RES CORP·Filed 2017·Granted Feb 19, 2019·3 cites·13 claims
- 1793US10017869B2Electroplating apparatus for tailored uniformity profileNOVELLUS SYSTEMS INC·Filed 2016·Granted Jul 10, 2018·6 cites·19 claims
- 1893US9221081B1Automated cleaning of wafer plating assemblyMAYER STEVEN T·Filed 2012·Granted Dec 29, 2015·13 cites·27 claims
- 1993US9139927B2Electrolyte loop with pressure regulation for separated anode chamber of electroplating systemNOVELLUS SYSTEMS INC·Filed 2013·Granted Sep 22, 2015·5 cites·21 claims
- 2093US8475637B2Electroplating apparatus with vented electrolyte manifoldFENG JINGBIN·Filed 2008·Granted Jul 2, 2013·14 cites·24 claims
- 2193US8398831B2Rapidly cleanable electroplating cup sealGHONGADI SHANTINATH·Filed 2011·Granted Mar 19, 2013·18 cites·27 claims
- 2292US9988733B2Apparatus and method for modulating azimuthal uniformity in electroplatingLAM RES CORP·Filed 2015·Granted Jun 5, 2018·3 cites·11 claims
- 2392US8172992B2Wafer electroplating apparatus for reducing edge defectsPRABHAKAR VINAY·Filed 2009·Granted May 8, 2012·21 cites·26 claims
- 2491US10190230B2Cross flow manifold for electroplating apparatusNOVELLUS SYSTEMS INC·Filed 2017·Granted Jan 29, 2019·6 cites·15 claims
- 2591USD648289SElectroplating flow shaping plate having offset spiral hole patternNOVELLUS SYSTEMS INC·Filed 2010·Granted Nov 8, 2011·51 cites·1 claims
- 2690US10053793B2Integrated elastomeric lipseal and cup bottom for reducing wafer stickingLAM RES CORP·Filed 2015·Granted Aug 21, 2018·6 cites·11 claims
- 2790US9455139B2Methods and apparatus for wetting pretreatment for through resist metal platingNOVELLUS SYSTEMS INC·Filed 2013·Granted Sep 27, 2016·11 cites·16 claims
- 2888US11001934B2Methods and apparatus for flow isolation and focusing during electroplatingLAM RES CORP·Filed 2018·Granted May 11, 2021·6 cites·20 claims
- 2988US9617652B2Bubble and foam solutions using a completely immersed air-free feedback flow control valveLAM RES CORP·Filed 2013·Granted Apr 11, 2017·3 cites·18 claims
- 3086US10982346B2Integrated elastomeric lipseal and cup bottom for reducing wafer stickingLAM RES CORP·Filed 2018·Granted Apr 20, 2021·3 cites·16 claims
- 3185US9721800B2Apparatus for wetting pretreatment for enhanced damascene metal fillingNOVELLUS SYSTEMS INC·Filed 2014·Granted Aug 1, 2017·5 cites·32 claims
- 3284US10087545B2Automated cleaning of wafer plating assemblyNOVELLUS SYSTEMS INC·Filed 2015·Granted Oct 2, 2018·3 cites·22 claims
- 3383US10092933B2Methods and apparatuses for cleaning electroplating substrate holdersNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 9, 2018·6 cites·27 claims
- 3483US10014170B2Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivityLAM RES CORP·Filed 2015·Granted Jul 3, 2018·3 cites·17 claims
- 3581US11549192B2Electroplating apparatus for tailored uniformity profileNOVELLUS SYSTEMS INC·Filed 2021·Granted Jan 10, 2023·0 cites·20 claims
- 3681US9828688B2Methods and apparatus for wetting pretreatment for through resist metal platingNOVELLUS SYSTEMS INC·Filed 2016·Granted Nov 28, 2017·3 cites·16 claims
- 3778US10920335B2Electroplating apparatus for tailored uniformity profileNOVELLUS SYSTEMS INC·Filed 2018·Granted Feb 16, 2021·1 cites·19 claims
- 3873US10781527B2Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplatingLAM RES CORP·Filed 2017·Granted Sep 22, 2020·2 cites·13 claims
- 3971USD1096679SDebubbler componentLAM RES CORP·Filed 2025·Granted Oct 7, 2025·0 cites·1 claims
- 4071USD1091491SDebubbler componentLAM RES CORP·Filed 2025·Granted Sep 2, 2025·0 cites·1 claims
- 4171USD1090468SDebubbler componentLAM RES CORP·Filed 2025·Granted Aug 26, 2025·0 cites·1 claims
- 4270US10301738B2Methods and apparatus for wetting pretreatment for through resist metal platingNOVELLUS SYSTEMS INC·Filed 2017·Granted May 28, 2019·1 cites·20 claims
- 4368US10975489B2One-piece anode for tuning electroplating at an edge of a substrateLAM RES CORP·Filed 2018·Granted Apr 13, 2021·0 cites·17 claims
- 4467US2018363162A1Multi-contact lipseals and associated electroplating methodsLAM RES CORP·Filed 2018·Application pending·0 cites
- 4566US2018312991A1Apparatus and method for modulating azimuthal uniformity in electroplatingLAM RES CORP·Filed 2018·Application pending·0 cites
- 4663US11655556B2Flow assisted dynamic seal for high-convection, continuous-rotation platingLAM RES CORP·Filed 2020·Granted May 23, 2023·0 cites·18 claims
- 4758US12281402B2Low angle membrane frame for an electroplating cellLAM RES CORP·Filed 2020·Granted Apr 22, 2025·0 cites·20 claims
- 4858US10923340B2Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivityLAM RES CORP·Filed 2018·Granted Feb 16, 2021·0 cites·22 claims
- 4958US10612151B2Flow assisted dynamic seal for high-convection, continuous-rotation platingLAM RES CORP·Filed 2018·Granted Apr 7, 2020·0 cites·14 claims
- 5058US2024076795A1Spatially and dimensionally non-uniform channelled plate for tailored hydrodynamics during electroplatingLAM RES CORP·Filed 2022·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Robert Rash files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →