Inventor · disambiguated record
Ron Rulkens
Also filed as: RULKENS RON
21 granted patents·2 pending applications·1,386 citations·filing 2002–2018
96Inventor score
Files withNOVELLUS SYSTEMS INC12RULKENS RON3LAM RES CORP2AIR PROD & CHEM1BEIJING APOLLO DING RONG SOLAR TECH CO LTD1
Top patents by PatentIndex Score
23 records- 0198US7790633B1Sequential deposition/anneal film densification methodNOVELLUS SYSTEMS INC·Filed 2006·Granted Sep 7, 2010·643 cites·23 claims
- 0298US7148155B1Sequential deposition/anneal film densification methodNOVELLUS SYSTEMS INC·Filed 2004·Granted Dec 12, 2006·416 cites·34 claims
- 0393US7297608B1Method for controlling properties of conformal silica nanolaminates formed by rapid vapor depositionNOVELLUS SYSTEMS INC·Filed 2004·Granted Nov 20, 2007·68 cites·32 claims
- 0490US7202185B1Silica thin films produced by rapid surface catalyzed vapor deposition (RVD) using a nucleation layerNOVELLUS SYSTEMS INC·Filed 2004·Granted Apr 10, 2007·48 cites·37 claims
- 0589US7097878B1Mixed alkoxy precursors and methods of their use for rapid vapor deposition of SiO2 filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Aug 29, 2006·35 cites·19 claims
- 0689US6762849B1Method for in-situ film thickness measurement and its use for in-situ control of deposited film thicknessNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 13, 2004·45 cites·36 claims
- 0784US10211351B2Photovoltaic cell with high efficiency CIGS absorber layer with low minority carrier lifetime and method of making thereofBEIJING APOLLO DING RONG SOLAR TECH CO LTD·Filed 2018·Granted Feb 19, 2019·4 cites·25 claims
- 0882US7129189B1Aluminum phosphate incorporation in silica thin films produced by rapid surface catalyzed vapor deposition (RVD)NOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 31, 2006·26 cites·26 claims
- 0982US6919279B1Endpoint detection for high density plasma (HDP) processesNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 19, 2005·28 cites·27 claims
- 1081US7491653B1Metal-free catalysts for pulsed deposition layer process for conformal silica laminatesNOVELLUS SYSTEMS INC·Filed 2005·Granted Feb 17, 2009·7 cites·28 claims
- 1181US7271112B1Methods for forming high density, conformal, silica nanolaminate films via pulsed deposition layer in structures of confined geometryNOVELLUS SYSTEMS INC·Filed 2004·Granted Sep 18, 2007·25 cites·17 claims
- 1277US7294583B1Methods for the use of alkoxysilanol precursors for vapor deposition of SiO2 filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Nov 13, 2007·18 cites·23 claims
- 1373US9169548B1Photovoltaic cell with copper poor CIGS absorber layer and method of making thereofCORSON JOHN·Filed 2010·Granted Oct 27, 2015·4 cites·15 claims
- 1471US7972652B2Electroless plating systemLAM RES CORP·Filed 2006·Granted Jul 5, 2011·1 cites·12 claims
- 1571US7223707B1Dynamic rapid vapor deposition process for conformal silica laminatesNOVELLUS SYSTEMS INC·Filed 2004·Granted May 29, 2007·10 cites·36 claims
- 1670US7913644B2Electroless deposition systemLAM RES CORP·Filed 2006·Granted Mar 29, 2011·1 cites·9 claims
- 1769US7064227B1Precursors for silica or metal silicate filmsAIR PROD & CHEM·Filed 2004·Granted Jun 20, 2006·5 cites·14 claims
- 1868US10043921B1Photovoltaic cell with high efficiency cigs absorber layer with low minority carrier lifetime and method of making thereofMIASOLE·Filed 2012·Granted Aug 7, 2018·2 cites·17 claims
- 1952US8622017B2Electroless plating systemIVANOV IGOR·Filed 2011·Granted Jan 7, 2014·0 cites·11 claims
- 2048US9255323B2Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tubeMARTINSON ROBERT·Filed 2012·Granted Feb 9, 2016·0 cites·23 claims
- 2148US2011135824A1Electroless Deposition SystemRULKENS RON·Filed 2011·Application pending·0 cites
- 2247US9128493B2Method and apparatus for plating solution analysis and controlRULKENS RON·Filed 2008·Granted Sep 8, 2015·0 cites·20 claims
- 2335US2009288688A1Non-corrosive chemical rinse systemRULKENS RON·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →