Inventor · disambiguated record
Salam Harb
Also filed as: HARB SALAM
11 granted patents·6 pending applications·137 citations·filing 2006–2025
87Inventor score
Top patents by PatentIndex Score
17 records- 0196US8664594B1Electron-optical system for high-speed and high-sensitivity inspectionsJIANG XINRONG·Filed 2011·Granted Mar 4, 2014·120 cites·9 claims
- 0278US8169768B1Electrostatic chuckTAHMASSEBPUR MOHAMMED·Filed 2009·Granted May 1, 2012·7 cites·12 claims
- 0370US7800735B2Z-stage with dynamically driven stage mirror and chuck assemblyKLA TENCOR TECH CORP·Filed 2006·Granted Sep 21, 2010·3 cites·8 claims
- 0468US2025353190A1End-effector with self powered electrostatic chuckASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0565US10953441B2System and method for cleaning optical surfaces of an extreme ultraviolet optical systemKLA TENCOR CORP·Filed 2013·Granted Mar 23, 2021·1 cites·18 claims
- 0664US8390789B2Z-stage with dynamically driven stage mirror and chuck assemblyHARB SALAM·Filed 2010·Granted Mar 5, 2013·2 cites·15 claims
- 0763US2025218803A1Transfer chambers, associated semiconductor processing systems, and methods for preventing moisture entering a transfer chamberASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0862US7919193B1Shielding, particulate reducing high vacuum componentsKLA TENCOR CORP·Filed 2007·Granted Apr 5, 2011·2 cites·2 claims
- 0962US2025109978A1Weight and/or layer thickness measuring equipment and substrate processing systems and methods including such equipmentASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1060US2025038012A1Systems and methods for substrate cooling and/or heating using cooling gas introduced from another chamberASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1159US2025174483A1Load lock arrangements configured for performing parallel processes, and associated systems and methodsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 1254US9141002B2Z-stage with dynamically driven stage mirror and chuck assembly having constraintKLA TENCOR CORP·Filed 2013·Granted Sep 22, 2015·0 cites·13 claims
- 1354US7566873B1High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatusKLA TENCOR TECH CORP·Filed 2006·Granted Jul 28, 2009·2 cites·21 claims
- 1452US2022065727A1Coolant Microleak Sensor for a Vacuum SystemKLA CORP·Filed 2021·Application pending·0 cites
- 1551US9879684B2Apparatus and method for shielding a controlled pressure environmentKLA TENCOR CORP·Filed 2013·Granted Jan 30, 2018·0 cites·18 claims
- 1647US8092927B2Shielding, particulate reducing high vacuum componentsTAHMASSEBPUR MOHAMMED·Filed 2011·Granted Jan 10, 2012·0 cites·5 claims
- 1745US9874512B2Method and system for gas flow mitigation of molecular contamination of opticsKLA TENCOR CORP·Filed 2014·Granted Jan 23, 2018·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →