Inventor · disambiguated record
Santosh Kumar
Also filed as: KUMAR SANTOSH · KUMAR SANTOSH NARAYAN RAMACHANDRA
6 granted patents·6 pending applications·26 citations·filing 2013–2022
79Inventor score
Top patents by PatentIndex Score
12 records- 0192US9476139B2Cleaning electroplating substrate holders using reverse current deplatingNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 25, 2016·10 cites·29 claims
- 0290US10053793B2Integrated elastomeric lipseal and cup bottom for reducing wafer stickingLAM RES CORP·Filed 2015·Granted Aug 21, 2018·6 cites·11 claims
- 0386US10982346B2Integrated elastomeric lipseal and cup bottom for reducing wafer stickingLAM RES CORP·Filed 2018·Granted Apr 20, 2021·3 cites·16 claims
- 0483US10092933B2Methods and apparatuses for cleaning electroplating substrate holdersNOVELLUS SYSTEMS INC·Filed 2013·Granted Oct 9, 2018·6 cites·27 claims
- 0571US10538855B2Cleaning electroplating substrate holders using reverse current deplatingNOVELLUS SYSTEMS INC·Filed 2016·Granted Jan 21, 2020·1 cites·4 claims
- 0666US11542630B2Cleaning electroplating substrate holders using reverse current deplatingNOVELLUS SYSTEMS INC·Filed 2019·Granted Jan 3, 2023·0 cites·10 claims
- 0755US2023175161A1Blended contact fingers for preventing cracks during thin substrate handlingLAM RES CORP·Filed 2021·Application pending·0 cites
- 0851US2024141541A1Electrodeposition of metals using an ionically resistive ionically permeable element or a shield spatially tailored to die-level patterns on a substrateLAM RES CORP·Filed 2022·Application pending·0 cites
- 0949US2022267898A1Precursor delivery system and method for high speed cyclic depositionEUGENUS INC·Filed 2022·Application pending·0 cites
- 1045US2018251907A1Wide lipseal for electroplatingLAM RES CORP·Filed 2017·Application pending·0 cites
- 1142US2017073832A1Durable low cure temperature hydrophobic coating in electroplating cup assemblyLAM RES CORP·Filed 2016·Application pending·0 cites
- 1240US2022220627A1Substrate sticking and breakage mitigationLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →