Inventor · disambiguated record
Schubert S. Chu
Also filed as: CHU SCHUBERT · CHU SCHUBERT S
79 granted patents·36 pending applications·1,113 citations·filing 2006–2025
99Inventor score
Top patents by PatentIndex Score
115 records- 0198US9929055B2Method to grow thin epitaxial films at low temperatureAPPLIED MATERIALS INC·Filed 2016·Granted Mar 27, 2018·313 cites·20 claims
- 0298US7780789B2Vortex chamber lids for atomic layer depositionAPPLIED MATERIALS INC·Filed 2007·Granted Aug 24, 2010·458 cites·24 claims
- 0397US9923081B1Selective process for source and drain formationAPPLIED MATERIALS INC·Filed 2017·Granted Mar 20, 2018·23 cites·20 claims
- 0496US7682946B2Apparatus and process for plasma-enhanced atomic layer depositionAPPLIED MATERIALS INC·Filed 2006·Granted Mar 23, 2010·40 cites·33 claims
- 0595US12163229B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0695US11821088B2Multi zone spot heating in EPIAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·2 cites·19 claims
- 0795US7850779B2Apparatus and process for plasma-enhanced atomic layer depositionAPPLIED MATERISALS INC·Filed 2006·Granted Dec 14, 2010·69 cites·6 claims
- 0894US9768013B2Apparatus and method for selective depositionAPPLIED MATERIALS INC·Filed 2016·Granted Sep 19, 2017·10 cites·7 claims
- 0994US7562672B2Chemical delivery apparatus for CVD or ALDAPPLIED MATERIALS INC·Filed 2006·Granted Jul 21, 2009·15 cites·16 claims
- 1093US10062598B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Aug 28, 2018·7 cites·12 claims
- 1193US7585762B2Vapor deposition processes for tantalum carbide nitride materialsAPPLIED MATERIALS INC·Filed 2007·Granted Sep 8, 2009·24 cites·23 claims
- 1293US2025364306A1Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1392US10090147B2Integrated system and method for source/drain engineeringAPPLIED MATERIALS INC·Filed 2018·Granted Oct 2, 2018·6 cites·19 claims
- 1491US11021795B2Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·4 cites·19 claims
- 1591US8110489B2Process for forming cobalt-containing materialsGANGULI SESHADRI·Filed 2007·Granted Feb 7, 2012·15 cites·52 claims
- 1690US11177144B2Wafer spot heating with beam width modulationAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·5 cites·20 claims
- 1790US11124874B2Methods for depositing metallic iridium and iridium silicideAPPLIED MATERIALS INC·Filed 2019·Granted Sep 21, 2021·2 cites·20 claims
- 1890US10930543B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Feb 23, 2021·4 cites·17 claims
- 1990US10043667B2Integrated method for wafer outgassing reductionAPPLIED MATERIALS INC·Filed 2017·Granted Aug 7, 2018·3 cites·19 claims
- 2089US11164737B2Integrated epitaxy and preclean systemAPPLIED MATERIALS INC·Filed 2018·Granted Nov 2, 2021·4 cites·20 claims
- 2189US11152221B2Methods and apparatus for metal silicide depositionAPPLIED MATERIALS INC·Filed 2020·Granted Oct 19, 2021·2 cites·19 claims
- 2289US9530638B2Method to grow thin epitaxial films at low temperatureAPPLIED MATERIALS INC·Filed 2015·Granted Dec 27, 2016·5 cites·20 claims
- 2389US9032906B2Apparatus and process for plasma-enhanced atomic layer depositionMA PAUL·Filed 2007·Granted May 19, 2015·13 cites·20 claims
- 2487US11946135B2Low temperature deposition of iridium containing filmsAPPLIED MATERIALS INC·Filed 2023·Granted Apr 2, 2024·0 cites·14 claims
- 2587US7833358B2Method of recovering valuable material from exhaust gas stream of a reaction chamberAPPLIED MATERIALS INC·Filed 2006·Granted Nov 16, 2010·17 cites·11 claims
- 2687US2024200188A1Low temperature deposition of iridium containing filmsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2786US12400904B2Thermal processing susceptorAPPLIED MATERIALS INC·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 2886US2025354250A1Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 2985US11996307B2Semiconductor processing tool platform configuration with reduced footprintAPPLIED MATERIALS INC·Filed 2021·Granted May 28, 2024·1 cites·15 claims
- 3085US9650726B2Methods and apparatus for deposition processesMYO NYI O·Filed 2011·Granted May 16, 2017·6 cites·17 claims
- 3185US2025066918A1Multi zone spot heating in epiAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3284US9881790B2Method to enhance growth rate for selective epitaxial growthAPPLIED MATERIALS INC·Filed 2016·Granted Jan 30, 2018·3 cites·20 claims
- 3383US11171023B2Diode laser for wafer heating for EPI processesAPPLIED MATERIALS INC·Filed 2016·Granted Nov 9, 2021·4 cites·20 claims
- 3483US8951478B2Ampoule with a thermally conductive coatingCHU SCHUBERT S·Filed 2007·Granted Feb 10, 2015·7 cites·19 claims
- 3583US7568495B2Chemical delivery apparatus for CVD or ALDAPPLIED MATERIALS INC·Filed 2007·Granted Aug 4, 2009·9 cites·20 claims
- 3682US11049719B2Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removalAPPLIED MATERIALS INC·Filed 2018·Granted Jun 29, 2021·3 cites·17 claims
- 3782US9011973B2Methods for depositing oxygen deficient metal filmsAPPLIED MATERIALS INC·Filed 2013·Granted Apr 21, 2015·2 cites·16 claims
- 3882US7748400B2Chemical delivery apparatus for CVD or ALDAPPLIED MATERIALS INC·Filed 2009·Granted Jul 6, 2010·8 cites·25 claims
- 3981US12371776B2Overlap susceptor and preheat ringAPPLIED MATERIALS INC·Filed 2023·Granted Jul 29, 2025·0 cites·20 claims
- 4081US10269647B2Self-aligned EPI contact flowAPPLIED MATERIALS INC·Filed 2017·Granted Apr 23, 2019·3 cites·20 claims
- 4181US10199215B2Apparatus and method for selective depositionAPPLIED MATERIALS INC·Filed 2017·Granted Feb 5, 2019·2 cites·13 claims
- 4281US2025283251A1Method for forming silicon-phosphorous materialsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4380US10276688B2Selective process for source and drain formationAPPLIED MATERIALS INC·Filed 2018·Granted Apr 30, 2019·2 cites·18 claims
- 4480US10269614B2Susceptor design to reduce edge thermal peakAPPLIED MATERIALS INC·Filed 2015·Granted Apr 23, 2019·3 cites·15 claims
- 4579US12338547B2Method for forming silicon-phosphorous materialsAPPLIED MATERIALS INC·Filed 2023·Granted Jun 24, 2025·0 cites·26 claims
- 4679US10115607B2Method and apparatus for wafer outgassing controlAPPLIED MATERIALS INC·Filed 2016·Granted Oct 30, 2018·2 cites·20 claims
- 4779US2025132155A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4879US2025087485A1Apparatus, systems, and methods of using atomic hydrogen radicals with selective epitaxial depositionAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4979US2025046596A1Integrated epitaxy and preclean systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 5077US8815724B2Process for forming cobalt-containing materialsGANGULI SESHADRI·Filed 2012·Granted Aug 26, 2014·3 cites·10 claims
Showing the top 50 of 115 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →