Inventor · disambiguated record
Scott A. Young
Also filed as: YOUNG SCOTT · YOUNG SCOTT A · YOUNG SCOTT ALLEN
24 granted patents·4 pending applications·744 citations·filing 1986–2021
96Inventor score
Top patents by PatentIndex Score
28 records- 0196US9772297B2Apparatus and methods for combined brightfield, darkfield, and photothermal inspectionKLA TENCOR CORP·Filed 2015·Granted Sep 26, 2017·12 cites·13 claims
- 0295US4805123AAutomatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systemsKLA INSTR CORP·Filed 1986·Granted Feb 14, 1989·369 cites·52 claims
- 0394US10360477B2Accelerating semiconductor-related computations using learning based modelsKLA TENCOR CORP·Filed 2017·Granted Jul 23, 2019·22 cites·39 claims
- 0494US9165742B1Inspection site preparationKLA TENCOR CORP·Filed 2015·Granted Oct 20, 2015·21 cites·33 claims
- 0594US9041930B1Digital pathology systemYOUNG SCOTT·Filed 2011·Granted May 26, 2015·32 cites·22 claims
- 0693US9916965B2Hybrid inspectorsKLA TENCOR CORP·Filed 2016·Granted Mar 13, 2018·13 cites·30 claims
- 0793US8600143B1Method and system for hierarchical tissue analysis and classificationKULKARNI ASHOK V·Filed 2011·Granted Dec 3, 2013·46 cites·25 claims
- 0892US6867406B1Confocal wafer inspection method and apparatus using fly lens arrangementKLA TENCOR CORP·Filed 2000·Granted Mar 15, 2005·43 cites·32 claims
- 0990US10733744B2Learning based approach for aligning images acquired with different modalitiesKLA TENCOR CORP·Filed 2018·Granted Aug 4, 2020·13 cites·25 claims
- 1090US9553034B1Combined semiconductor metrology systemYOUNG SCOTT A·Filed 2012·Granted Jan 24, 2017·15 cites·28 claims
- 1190US9176072B2Dark field inspection system with ring illuminationZHAO GUOHENG·Filed 2010·Granted Nov 3, 2015·10 cites·30 claims
- 1289US7858911B2Confocal wafer inspection system and methodKLA TENCOR CORP·Filed 2008·Granted Dec 28, 2010·15 cites·19 claims
- 1389US7109458B2Confocal wafer depth scanning inspection methodKLA TENCOR CORP·Filed 2005·Granted Sep 19, 2006·15 cites·20 claims
- 1488US11580375B2Accelerated training of a machine learning based model for semiconductor applicationsKLA TENCOR CORP·Filed 2016·Granted Feb 14, 2023·9 cites·37 claims
- 1586US10533954B2Apparatus and methods for combined brightfield, darkfield, and photothermal inspectionKLA TENCOR CORP·Filed 2017·Granted Jan 14, 2020·2 cites·9 claims
- 1686US6141038AAlignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 1997·Granted Oct 31, 2000·82 cites·28 claims
- 1785US10325753B2Method and system for focus adjustment of a multi-beam scanning electron microscopy systemKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·14 claims
- 1884US10402688B2Data augmentation for convolutional neural network-based defect inspectionKLA TENCOR CORP·Filed 2017·Granted Sep 3, 2019·5 cites·18 claims
- 1982US8604447B2Solar metrology methods and apparatusYOUNG SCOTT·Filed 2012·Granted Dec 10, 2013·6 cites·21 claims
- 2078US7399950B2Confocal wafer inspection method and apparatus using fly lens arrangementKLA TENCOR CORP·Filed 2006·Granted Jul 15, 2008·6 cites·19 claims
- 2173US8643835B2Active planar autofocusYOUNG SCOTT A·Filed 2010·Granted Feb 4, 2014·4 cites·6 claims
- 2261US11644756B23D structure inspection or metrology using deep learningKLA CORP·Filed 2021·Granted May 9, 2023·0 cites·26 claims
- 2348US2008304734A1Alignment correction prio to image sampling in inspection systemsKLA INSTR CORP·Filed 2008·Application pending·0 cites
- 2445US10861671B2Method and system for focus adjustment of a multi-beam scanning electron microscopy systemKLA TENCOR CORP·Filed 2019·Granted Dec 8, 2020·0 cites·20 claims
- 2544US2005254698A1Alignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 2005·Application pending·0 cites
- 2643US9961326B2Stereo extended depth of focusKLA TENCOR CORP·Filed 2012·Granted May 1, 2018·0 cites·21 claims
- 2739US2002075385A1Alignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 2002·Application pending·0 cites
- 2839US2003063190A1Alignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →