Inventor · disambiguated record
Shuji Azumo
Also filed as: AZUMO SHUJI
17 granted patents·31 pending applications·940 citations·filing 2010–2025
91Inventor score
Top patents by PatentIndex Score
48 records- 0198US8999102B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 7, 2015·463 cites·6 claims
- 0297US8785311B2Film forming method, semiconductor device, manufacturing method thereof and substrate processing apparatus thereforMIYOSHI HIDENORI·Filed 2011·Granted Jul 22, 2014·464 cites·13 claims
- 0389US12152304B2Film forming method for forming self-assembled monolayer on substrateTOKYO ELECTRON LTD·Filed 2020·Granted Nov 26, 2024·2 cites·7 claims
- 0487US11788185B2Film formation method and film formation deviceTOKYO ELECTRON LTD·Filed 2020·Granted Oct 17, 2023·2 cites·5 claims
- 0582US9293543B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 22, 2016·5 cites·19 claims
- 0676US10833166B2Semiconductor device including an MIS structureROHM CO LTD·Filed 2017·Granted Nov 10, 2020·2 cites·15 claims
- 0776US10790138B2Method and system for selectively forming filmTOKYO ELECTRON LTD·Filed 2019·Granted Sep 29, 2020·2 cites·18 claims
- 0863US2025095985A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0962US2025034715A1Film forming methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1061US2025293021A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1159US2024191344A1Surface treatment method and substrate treatment deviceTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1258US2025263831A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1356US12456620B2Film-forming methodTOKYO ELECTRON LTD·Filed 2020·Granted Oct 28, 2025·0 cites·14 claims
- 1456US2025046607A1Substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1556US2025243581A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1656US2025207245A1Film formation method and film formation deviceTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1756US2025257446A1Film-forming method and substrate-processing deviceTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1856US2025207244A1Film formation method and film formation deviceTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1956US2025226228A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2056US2025197990A1Film formation method and film formation deviceTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2156US2025183032A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2255US2025257448A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2355US2025382704A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2453US2024290610A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 2552US12387926B2Selective film formation using self-assembled monolayerTOKYO ELECTRON LTD·Filed 2021·Granted Aug 12, 2025·0 cites·15 claims
- 2652US12341004B2Film formation method and film formation apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jun 24, 2025·0 cites·16 claims
- 2752US12183572B2Film formation method and film formation deviceTOKYO ELECTRON LTD·Filed 2020·Granted Dec 31, 2024·0 cites·7 claims
- 2852US11598001B2Film forming methodTOKYO ELECTRON LTD·Filed 2021·Granted Mar 7, 2023·0 cites·19 claims
- 2952US11417514B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 16, 2022·0 cites·11 claims
- 3051US11830741B2Method for forming filmTOKYO ELECTRON LTD·Filed 2020·Granted Nov 28, 2023·0 cites·12 claims
- 3151US2025191907A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 3250US2024030025A1Film formation methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 3349US2024263306A1Film forming method and film forming deviceTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 3449US2021398846A1Method for area selective deposition using a surface cleaning processTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 3548US11041239B2Film forming method for SiC filmTOKYO ELECTRON LTD·Filed 2017·Granted Jun 22, 2021·0 cites·2 claims
- 3648US2023175115A1Selective film formation methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 3747US2023009551A1Film formation method and film formation apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3847US2022341033A1Film-forming methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 3946US2022189777A1Film formation method and film formation apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 4046US2022336205A1Film formation methodTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 4145US10490443B2Selective film forming method and method of manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2018·Granted Nov 26, 2019·0 cites·8 claims
- 4238US8900991B2Film forming method and storage mediumAZUMO SHUJI·Filed 2012·Granted Dec 2, 2014·0 cites·6 claims
- 4337US2011174630A1Film formation method and storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 4437US2018076030A1SiC FILM FORMING METHOD AND SiC FILM FORMING APPARATUSTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 4536US2012164328A1Film formation method and storage mediumKOJIMA YASUHIKO·Filed 2010·Application pending·0 cites
- 4633US2015235842A1Transistor and method for manufacturing the sameTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 4732US2012211890A1Method for forming metal thin film, semiconductor device and manufacturing method thereofAZUMO SHUJI·Filed 2012·Application pending·0 cites
- 4830US2012171365A1Film forming apparatus, film forming method and storage mediumAZUMO SHUJI·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →