Inventor · disambiguated record
Shingo Okubo
Also filed as: OKUBO SHINGO
8 granted patents·4 pending applications·49 citations·filing 2008–2020
85Inventor score
Files withAIR LIQUIDE3GATINEAU JULIEN2HITACHI INT ELECTRIC INC2L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude2OKUBO SHINGO2
Top patents by PatentIndex Score
12 records- 0192US9109281B2Metal heterocyclic compounds for deposition of thin filmsL AIR LIQUIDE SOCIÉTÉ ANONYME POUR L ETUDE ET L EXPL DES PROCÉDÉS GEORGES CLAUDE·Filed 2014·Granted Aug 18, 2015·6 cites·20 claims
- 0289US8236381B2Metal piperidinate and metal pyridinate precursors for thin film depositionOKUBO SHINGO·Filed 2009·Granted Aug 7, 2012·16 cites·12 claims
- 0385US9633838B2Vapor deposition of silicon-containing films using penta-substituted disilanesL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2015·Granted Apr 25, 2017·4 cites·5 claims
- 0485US9343290B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted May 17, 2016·6 cites·19 claims
- 0584US8101237B2Tellurium precursors for film depositionOKUBO SHINGO·Filed 2009·Granted Jan 24, 2012·7 cites·10 claims
- 0680US9548198B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Jan 17, 2017·4 cites·16 claims
- 0773US8636845B2Metal heterocyclic compounds for deposition of thin filmsGATINEAU JULIEN·Filed 2009·Granted Jan 28, 2014·6 cites·16 claims
- 0854US2019027357A1Vapor disposition of silicon-containing films using penta-substituted disilanesAIR LIQUIDE·Filed 2018·Application pending·0 cites
- 0952US12473640B2Supply system for low volatility precursorsAIR LIQUIDE·Filed 2020·Granted Nov 18, 2025·0 cites·4 claims
- 1050US2017186597A1Vapor deposition of silicon-containing films using penta-substituted disilanesL'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude·Filed 2017·Application pending·0 cites
- 1146US2009162973A1Germanium precursors for gst film depositionGATINEAU JULIEN·Filed 2008·Application pending·0 cites
- 1237US2016118154A1Silicon/carbon composite, silicon alloy/carbon composite, and methods for producing the sameAIR LIQUIDE·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →