Inventor · disambiguated record
Soichi Isobe
Also filed as: ISOBE SOICHI
18 granted patents·4 pending applications·148 citations·filing 1993–2022
93Inventor score
Top patents by PatentIndex Score
22 records- 0193US8382558B2Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and methodEBARA CORP·Filed 2010·Granted Feb 26, 2013·14 cites·10 claims
- 0283US6783445B2Polishing apparatusEBARA CORP·Filed 2001·Granted Aug 31, 2004·22 cites·16 claims
- 0382US9144881B2Polishing apparatus and polishing methodEBARA CORP·Filed 2014·Granted Sep 29, 2015·5 cites·9 claims
- 0481US7063598B2Substrate delivery mechanismEBARA CORP·Filed 2003·Granted Jun 20, 2006·19 cites·22 claims
- 0580US7645185B2Substrate delivery mechanismEBARA CORP·Filed 2007·Granted Jan 12, 2010·5 cites·4 claims
- 0676US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 0774US7160180B2Substrate delivery mechanismEBARA CORP·Filed 2006·Granted Jan 9, 2007·3 cites·20 claims
- 0873US5716036AMounting structure for mounting a polygon mirrorEBARA CORP·Filed 1995·Granted Feb 10, 1998·39 cites·19 claims
- 0965US12358098B2Liquid feeder and polishing apparatusEBARA CORP·Filed 2022·Granted Jul 15, 2025·0 cites·14 claims
- 1063US6783427B2Polishing system with air exhaust systemEBARA CORP·Filed 2002·Granted Aug 31, 2004·9 cites·20 claims
- 1162US6746312B2Polishing method and polishing apparatusEBARA CORP·Filed 2001·Granted Jun 8, 2004·9 cites·26 claims
- 1259US7083506B2Polishing apparatusEBARA CORP·Filed 2004·Granted Aug 1, 2006·6 cites·16 claims
- 1353US11541502B2Substrate processing apparatusEBARA CORP·Filed 2020·Granted Jan 3, 2023·0 cites·9 claims
- 1453US9704728B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2013·Granted Jul 11, 2017·0 cites·3 claims
- 1553US8298369B2Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquidMAEDA KOJI·Filed 2007·Granted Oct 30, 2012·1 cites·6 claims
- 1653US2007093186A1Substrate delivery mechanismISOBE SOICHI·Filed 2006·Application pending·0 cites
- 1752US9842732B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2017·Granted Dec 12, 2017·0 cites·6 claims
- 1848US2009067959A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2007·Application pending·0 cites
- 1947US2015118944A1Polishing apparatus, method for attaching polishing pad, and method for replacing polishing padEBARA CORP·Filed 2014·Application pending·0 cites
- 2046US2012193506A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2012·Application pending·0 cites
- 2136US5598291APolygon mirror mounting structureEBARA CORP·Filed 1994·Granted Jan 28, 1997·6 cites·18 claims
- 2235US5373391APolygon mirror with embedded yokeEBARA CORP·Filed 1993·Granted Dec 13, 1994·8 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →