Inventor · disambiguated record
Sooyun Joh
Also filed as: JOH SOOYUN
13 granted patents·2 pending applications·114 citations·filing 2002–2018
91Inventor score
Top patents by PatentIndex Score
15 records- 0194US8697197B2Methods for plasma processingSAVAS STEPHEN EDWARD·Filed 2010·Granted Apr 15, 2014·23 cites·31 claims
- 0293US10147507B2Steam generator for a nuclear reactorNUSCALE POWER LLC·Filed 2014·Granted Dec 4, 2018·9 cites·15 claims
- 0389US9230697B2Steam generator for a nuclear reactorGROOME JOHN T·Filed 2012·Granted Jan 5, 2016·10 cites·16 claims
- 0482US8291935B1Flexible gas mixing manifoldMERRITT NEIL J·Filed 2009·Granted Oct 23, 2012·24 cites·17 claims
- 0581US9443702B2Methods for plasma processingAIXTRON SE·Filed 2015·Granted Sep 13, 2016·2 cites·17 claims
- 0681US9096933B2Methods for plasma processingAIXTRON INC·Filed 2014·Granted Aug 4, 2015·3 cites·21 claims
- 0780US6918824B2Uniform fluid distribution and exhaust system for a chemical-mechanical planarization deviceNOVELLUS SYSTEMS INC·Filed 2003·Granted Jul 19, 2005·22 cites·24 claims
- 0871US8765232B2Apparatus and method for dielectric depositionSAVAS STEPHEN EDWARD·Filed 2012·Granted Jul 1, 2014·2 cites·20 claims
- 0970US9096932B2Methods for plasma processingAIXTRON INC·Filed 2014·Granted Aug 4, 2015·1 cites·34 claims
- 1070US6758591B1Mixing of materials in an integrated circuit manufacturing equipmentNOVELLUS SYSTEMS INC·Filed 2002·Granted Jul 6, 2004·16 cites·19 claims
- 1169US10526708B2Methods for forming thin protective and optical layers on substratesAIXTRON SE·Filed 2018·Granted Jan 7, 2020·1 cites·20 claims
- 1269US9359674B2Apparatus and method for dielectric depositionAIXTRON INC·Filed 2014·Granted Jun 7, 2016·0 cites·5 claims
- 1366US10049859B2Plasma generating units for processing a substrateSAVAS STEPHEN EDWARD·Filed 2010·Granted Aug 14, 2018·1 cites·24 claims
- 1450US2013337657A1Apparatus and method for forming thin protective and optical layers on substratesPLASMASI INC·Filed 2013·Application pending·0 cites
- 1547US2016289837A1Apparatus and method for forming thin protective and optical layers on substratesAIXTRON INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →